Enhanced Anti-reflective Effect of SiNx/SiOx/InSnO Multi-layers using Plasma Enhanced Chemical Vapor Deposition System with Hybrid Plasma Source |
Choi, Min-Jun
(Division of Physics and Semiconductor Science, Dongguk University)
Kwon, O Dae (R&D Center, SNTEK Co.) Choi, Sang Dae (R&D Center, SNTEK Co.) Baek, Ju-Yeoul (R&D Center, SNTEK Co.) An, Kyoung-Joon (R&D Center, SNTEK Co.) Chung, Kwun-Bum (Division of Physics and Semiconductor Science, Dongguk University) |
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