• Korean Journal of Materials Research
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• v.29 no.11
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• pp.715-719
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• 2019

Molybdenum is a low-resistivity transition metal that can be applied to silicon devices using Si-metal electrode structures and thin film solar cell electrodes. We investigate the deposition of metal Mo thin film by plasma-enhanced atomic layer deposition (PE-ALD). $Mo(CO)_6$ and $H_2$ plasma are used as precursor. $H_2$ plasma is induced between ALD cycles for reduction of $Mo(CO)_6$ and Mo film is deposited on Si substrate at $300^{\circ}C$. Through variation of PE-ALD conditions such as precursor pulse time, plasma pulse time and plasma power, we find that these conditions result in low resistivity. The resistivity is affected by Mo pulse time. We can find the reason through analyzing XPS data according to Mo pulse time. The thickness uniformity is affected by plasma power. The lowest resistivity is $176{\mu}{\Omega}{\cdot}cm$ at $Mo(CO)_6$ pulse time 3s. The thickness uniformity of metal Mo thin film deposited by PE-ALD shows a value of less than 3% below the plasma power of 200 W.

• Particle and aerosol research
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• v.9 no.1
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• pp.31-36
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• 2013

In this study, Mo metal powder was prepared by hydrogen reduction of Mo trioxides with different purity of 2N and 3N grades. We have obtained Mo metal powder with oxygen content of 1450 ppm by hydrogen reduction and subsequent heat treatment for degassing. Using the Mo metal powder, a low-oxygen Mo ingot was prepared by repetitive vacuum arc melting. The oxygen content of the obtained Mo ingot was less than 70 ppm after vacuum arc melting for 30 min. The purity of the Mo metal powder and the ingot was evaluated using glow discharge mass spectrometry. The purity of the respective Mo ingots was increased to 3N and 4N grades from the Mo powder of 2N and 3N grades after the repetitive vacuum arc melting. The low oxygen Mo ingot thus can be used as a raw material for sputtering targets.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.4
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• pp.23-28
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• 2004

In this paper, the properties of Mo as PMOS gate electrodes were studied. The work-function of Mo extracted from C-V characteristic curves was appropriate for PMOS. To identify the electrical and chemical stability of Mo metal gate, the changes of work-function and EOT(Effective Oxide Thickness) values were investigated after 600, 700, 800 and 90$0^{\circ}C$ RTA(Rapid Thermal Annealing). Also it was found that Mo metal gate was stable up to 90$0^{\circ}C$ with underlying SiO$_2$through X-ray diffraction measurement. Sheet resistances of Mo metal gate obtained from 4-point probe were less than 10$\Omega$/$\square$ that was much lower than those of polysilicon.

• Bulletin of the Korean Chemical Society
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• v.11 no.2
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• pp.109-114
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• 1990

The anionic transition metal hydrides $(HW(CO)_4P(OMe)_3\;^-,\;HW(CO)_5\;^-,\;HCr(CO)_5\;^-,\;HFe(CO)_4\;^-)$ react with transition metal alkyl $(CpMo(CO)_3(CH_3)$ to yield $CH_4\;and\;CH_3CHO$ in addition to the inorganic products $(CpMo(Co)_3\;^-$, etc.). The reaction of these anionic metal hydrides with CpMo(CO)3{CH2CH(CH2)2} may lead to an elucidation of the reaction mechanisms involved; the organic product distributions are among $CH_4,\;CH_2\;=\;CHCH_2CH_3$, and $CH_3CH(CH_2)_2$, depending upon the anionic metal hydride used. These anionic metal hydrides also are reported to undergo a hydride-halide exchange reaction with organic halides; therefore, these similar reactions have been compared in terms of leaving group ability $(CpMo(CO)_3\;^-\;vs.\;Br^-)$ and the mechanistic pathways.

• Journal of the Korean Chemical Society
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• v.42 no.6
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• pp.696-702
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• 1998

The effect of alkali metal salt on the activity of Co-Mo catalyst which has high resistance to sulfur poisoning for water gas shift reaction(WGSR) was studied. Two groups of catalysts were prepared to investigate the effects of anion and cation in alkali metal salts. For K-doped catalysts made with various potassium salts having different anion, the catalytic activity was explained to depend mainly on the BET surface area. Among the catalysts prepared by various nitrates of alkali metal as precursor, the Li-doped catalyst showed the best activity, and the others did not make significant differences giving relatively low activities. And the change of BET surface area by varying the loading of alkali metal showed a similar trend to that of activity. In this case, the activity was dependent on both BET surface area and the ratio of $Mo^{6+}$ with a tetrahedral coordination symmetry to $Mo^{6+}$ with an octahedral one, $Mo^6+[T]/Mo^{6+}[O]$ value.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.157-159
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• 2005

MOS capacitors were fabricated to study electrical and chemical properties of Ta-Mo metal alloy with $ZrO_2$. The work function of Ta-Mo alloy were varied from 4.1eV to 5.1eV by controlling the composition. When the atomic composition of Mo is 10%, good thermal stability up to $800^{\circ}C$ was observed and work function of MOS capacitor was 4.1eV, compatible for NMOS application. But pure Ta exhibited very poor thermal stability. After $600^{\circ}C$ annealing, equivalent oxide thickness of tantalum gate MOS capacitor was continuously decreased. Barrier heights of Ta-Mo alloy and pure metal that supported the work function values were calculated from Fowler-Nordheim analysis. As a result of these electrical?experiments, Ta-Mo metal alloy with $ZrO_2$ is excellent gate electrode for NMOS.

• Journal of Technologic Dentistry
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• v.37 no.1
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• pp.23-29
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• 2015

Purpose: The selective laser melting (SLM) process for dentistry, which is one of the additive manufacturing technologies (AM) allows for rapid production of a three-dimensional model with complex shape by directly melting metal powder. This process generates detailed items of a three-dimensional model shape through consolidation of a thin powder layer by utilizing both selective melting and laser beam simultaneously. In regard to SLM process, Fe-base powder, Ti-6AI-4V powder, AI-base powder, etc. have been researched. It is believed that the aforementioned technologies will be widely utilized in manufacturing metal parts using metal powder of raw material. This study chose Ni-Cr-Mo metal powder in order to manufacture metal powder materials that would be used in the selective laser melting for dentistry. Methods: This study manufactured metal powder using mechanical alloying technique (MA) among those metal powder manufacturing techniques. Moreover, this study aimed to utilize the metal powder manufactured after observing the characteristics of powder as preliminary data of Ni-Cr-Mo metal powder. This study could obtain the following conclusions within the experimental limitations. Results: As a result of mechanically alloying Ni-Cr-Mo powder over time, its mean particle size was $66.93{\mu}m$ $54.4{\mu}m$ and $45.39{\mu}m$ at 10h, 20h and 30h, respectively. The gtain form of metal powder by mechanical alloying technique was a sponge-like shape of irregular plate; however, the gtain form manufactured by high-pressure water aromization process had the following three types: globular type, chain type and oval type. Conclusion: This study found $37.65{\mu}m$ as the mean particle size of Ni-Cr-Mo metal powder, which was manufactured using water atomization technique under the following conditions: water atomization flux of 300 liter/min, hydraulic pressure of $400kgf/cm^2$ and injection angle of $45^{\circ}$. This study confirmed that the grain form of powder (solid particle form) would vary depending on the manufacturing process.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.2
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• pp.120-124
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• 2005

In this work, MOS capacitors were used to study the electrical properties of Mo gate electrode deposited on ZrO$_2$. The workfunctions of Mo gate extracted from C-V curves were appropriate for PMOS. Thermal stability of Mo metal was investigated by analyzing the variations of workfunction and EOT(effective oxide thickness) after 600, 700, and 800 $^{\circ}C$ RTA(rapid thermal annealing). It was found that Mo gate was stable up to 800 $^{\circ}C$ with underlying ZrO$_2$. The resistivities of Mo were 35$\mu$Ω$.$cm∼ 75$\mu$Ω$.$cm. These values are lower than those of heavily doped polysilicon. Based on these measurements, it can be concluded that Mo metal gate with ZrO$_2$ gate insulator is an excellent gate material for PMOS.

• Journal of the Korean Ceramic Society
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• v.54 no.3
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• pp.200-204
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• 2017

Molybdenum (Mo), an electrode material of alkali metal thermal-to-electric converters (AMTEC), facilitates grain growth behavior and forms Mo-Na-O compounds at high operating temperatures, resulting in reduced performance and shortened lifetime of the cell. Mo/TiN composite materials have been developed to provide a solution for such issues. Mo is a metal that possesses excellent electrical properties, and TiN is a ceramic compound with high-temperature durability and catalytic activity. In this study, a dip-coating process with an organic solvent-based slurry was used as an optimal coating method to achieve homogeneity and stability of the electrodes. Cell performance was evaluated under various conditions such as the number of coatings, ranging from 1 to 3 times, and heat treatment temperatures of $800-1100^{\circ}C$. The results confirmed that the cell yielded a maximum power of 9.99 W for the sample coated 3 times and heat-treated at $900^{\circ}C$.

• Journal of Ceramic Processing Research
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• v.22 no.1
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• pp.86-90
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• 2021

Fabrication of infrared (IR) transparent ZnS ceramics by spark plasma sintering (SPS) suffers from carbon contamination due to the graphite mold in the SPS system. In the present work, we consolidated transparent ZnS ceramics by SPS using Mo metal foil to prevent the generation of carbonate and/or carbon impurities in the sintered product. The effect of Mo foil on carbon contamination and IR transmittance was investigated. The Fourier transform infrared spectroscopy (FTIR) results revealed that the C-O absorption peak was significantly reduced, however, sulfur vacancies were generated, thus, deteriorating the overall transmittance. The sulfur vacancies were eliminated by post-annealing the specimen in a nitrogen atmosphere, whereby the overall IR transmittance was partially recovered. The results indicate that metal foil wrapping of green bodies could be potentially applicable for the fabrication of carbon contamination-free ZnS ceramics via SPS system.