Particle and aerosol research (한국입자에어로졸학회지)

Korean Association for Particle and Aerosol Research (한국입자에어로졸학회)
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Preparation of Low-Oxygen Ingot by Repetitive Melting and Mo Metal Powder by Hydrogen Reduction from $MoO_3$ Powder

삼산화 몰리브덴 분말로부터 수소 환원에 의한 금속 분말 및 반복 용해에 의한 저산소 잉곳 제조

  • Lee, Back-Kyu (Mineral Resources Research Division, Korea Institute of Geoscience and Mineral Resources) ;
  • Oh, Jung-Min (Mineral Resources Research Division, Korea Institute of Geoscience and Mineral Resources) ;
  • Kim, Hyung-Seok (Mineral Resources Research Division, Korea Institute of Geoscience and Mineral Resources) ;
  • Lim, Jae-Won (Mineral Resources Research Division, Korea Institute of Geoscience and Mineral Resources)
  • 이백규 (한국지질자원연구원 광물자원연구본부) ;
  • 오정민 (한국지질자원연구원 광물자원연구본부) ;
  • 김형석 (한국지질자원연구원 광물자원연구본부) ;
  • 임재원 (한국지질자원연구원 광물자원연구본부)
  • Published : 2013.03.31
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Abstract

In this study, Mo metal powder was prepared by hydrogen reduction of Mo trioxides with different purity of 2N and 3N grades. We have obtained Mo metal powder with oxygen content of 1450 ppm by hydrogen reduction and subsequent heat treatment for degassing. Using the Mo metal powder, a low-oxygen Mo ingot was prepared by repetitive vacuum arc melting. The oxygen content of the obtained Mo ingot was less than 70 ppm after vacuum arc melting for 30 min. The purity of the Mo metal powder and the ingot was evaluated using glow discharge mass spectrometry. The purity of the respective Mo ingots was increased to 3N and 4N grades from the Mo powder of 2N and 3N grades after the repetitive vacuum arc melting. The low oxygen Mo ingot thus can be used as a raw material for sputtering targets.

Keywords

References

  1. Choi, G.-S., Lim, J.-W., Munirathnam, N.R., Kim, I.-H., and Kim, J.-S. (2009). Preparation of 5N grade tantalum by electron beam melting, Journal of Alloys and Compounds, 469, 298-303. https://doi.org/10.1016/j.jallcom.2008.01.103
  2. Juang, M.H., Lin, T.Y., Jang, S.L. (2006). Formation of Mo gate electrode with adjustable work function on thin $Ta_2O_5$ high-k dielectric films, Solid-State Electronics, 50(2), 114-118. https://doi.org/10.1016/j.sse.2005.10.029
  3. Lim, J.-W., Mimura, K., Miyawaki, D., Oh, J.-M., Choi, G.-S., Kim, S.-B., Uchikoshi, M., and Isshiki, M. (2010). Hydrogen effect on refining of Mo metal by Ar-$H_2$ plasma arc melting, Materials Letters, 64, 2290-2292.
  4. Lee, B.-K., Oh, J.-M., Lee, S.-W., Kim, S.-B., and Lim, J.-W. (2011). Recyling and refining of molybdenum scraps by vacuum arc melting, Journal of Korean Inst of Resources Recycling, 20(5), 40-45.
  5. Lee, B.-K., Oh, J.-M., Suh, C.-Y., Kim, H.-S., and Lim, J.-W. (2013). Preparation of Low-Oxygen Mo Ingot by Optimizing Hydrogen Reduction and Subsequent Melting from $MoO_3$, Materials Transactions, 54(2), 238-241. https://doi.org/10.2320/matertrans.M2012305
  6. Mimura, K., Lee, S.-W., and Isshiki, M. (1995). Removal of alloying elements from zirconium alloys by hydrogen plasma-arc melting, Journal of Alloys and Compounds, 221, 267-273. https://doi.org/10.1016/0925-8388(94)01470-1
  7. Schiller, S., Heisig, U., and Panzer, S. (1982). Electron Beam Technology, New York, John Wiley and Sons, pp 29-137.
  8. Sohn, H.-S., Yi, H.-J., Park, J.-I. (2011). Reduction behavior of $MoO_3$ to$MoO_2$ by $Ar+H_2$ gas mixture, Journal of Korean Inst of Resources Recycling, 20(4), 71-77.
  9. Uyulgan, B., Cetinel, H., Ozdemir, I., Tekmen, C., Okumus, S.C., Celik, E. (2003). Friction and wear properties of Mo coatings on cast-iron substrates, Surface and Coatings Technology, 174, 1082-1088.