• Title/Summary/Keyword: Microcolumn

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Study of SiO2 Thin Film Patterning by Low Energy Electron Beam Lithography Using Microcolumns (저 에너지 초소형 전자칼럼 리소그래피를 이용한 SiO2 박막의 Pattern 제작에 관한 연구)

  • Yoshimoto, T.;Kim, H.S.;Kim, D.W.;Ahn, S.
    • Journal of the Korean Magnetics Society
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    • v.17 no.4
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    • pp.178-181
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    • 2007
  • Electron beam lithography has been studied as a next-generation lithography technology instead of photo lithography for ULSI semiconductor devices. In this work, we have made a low-energy electron beam lithography system based on the microcolumn and investigated the dependence of the pattern thickness on the energies and dose concentration of the electron beam. We have also demonstrated the potential of low-energy lithography by achieving 100 nm-$SiO_2$ thin film patterning.

Analysis of the Electrical Defect Detection Mechanism using a Low Energy Electron Beam on the TFT Substrate for TFT-LCDs (TFT-LCD용 TFT기판에서 저에너지 전자빔을 이용한 전기적 결함 검출 메카니즘 분석)

  • Oh, Tae-Sik;Kim, Ho-Seob;Kim, Dae-Wook;Ahn, Seung-Joon;Lee, Gun-Hee
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.4
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    • pp.1803-1811
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    • 2011
  • We have analyzed the electrical defect detection mechanism using low energy microcolumn on the TFT substrate for TFT-LCD. In this study, we have acquired the SEM images of the various pixel defects for 7-inch TFT substrate by scanning of low energy electron beam in the high vacuum chamber. Futhermore, we have interpreted the defect detection mechanism through the correlations between the SEM images and electrical behaviors of the defective pixels. As a result, we obtained consistent results as the follows. We can confirm that the SEM images using low energy electron beam are significantly affected by the space charge effect.

Evaluation of ABO Antibody Titration Using Tube and Column Agglutination Techniques (ABO 동종 응집소 역가 측정을 위한 시험관 및 미세원주응집법의 평가)

  • Cho, Chi-Hyun;Kim, Ha-Nui;Yun, Seung-Gyu;Choi, Gye-Ryung;Choi, Jae-Yeoul;Kim, Jang-Su;Lim, Chae-Seung;Kim, Young-Kee;Lee, Kap-No
    • Laboratory Medicine Online
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    • v.1 no.1
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    • pp.57-63
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    • 2011
  • Background: ABO antibody titration is useful for the evaluation of ABO-incompatible bone marrow or solid organ transplantations, yet the results quite vary between different test methods used. We compared the results of microcolumn agglutination and tube methods. Methods: Anti-A and anti-B isoagglutionin titers were determined in 63 healthy individuals (23 O, 20 A, and 20 B blood groups) using 4 different methods: immediate spin tube (tube), microcolumn agglutination without anti-human globulin (AHG) (CAT), tube with AHG (tube-AHG) and microcolumn agglutination with AHG (CAT-AHG). Results: The median (range) titers of anti-A and anti-B in group O individuals by tube, CAT, tube-AHG, and CAT-AHG methods were 64 (8-512), 64 (8-512), 128 (8-2,048), and 128 (16-2,048); 64 (16-128), 128 (16-256), 128 (16-512), and 256 (16-512), respectively. The median (range) titers of anti-A in group B and anti-B in group A individuals by the four methods were 64 (16-128), 128 (8-128), 128 (8-256), and 256 (8-256); 64 (8-128), 64 (8-128), 32 (8-128), and 64 (8-256), respectively. The isoagglutinin titer measured by CAT-AHGmethod was the highest. The titers measured by CAT and CAT-AHG methods were 0-1 titer higher than those by tube and tube-AHG methods, respectively. Whatever method was used, the isoagglutinin titers were higher in women than in men. Conclusions: CAT-AHG was the most sensitive method among the four methods tested. Since AHG titer values are critical for the clinical management and CAT has less manual procedures than tube method, CAT-AHG method could be used for the standardization of ABO antibody titration in different institutions.

Wafer level vertical interconnection method for microcolumn array (마이크로컬럼 어레이에 적용 가능한 웨이퍼단위의 수직 배선 방법)

  • Han, Chang-Ho;Kim, Hyeon-Cheol;Kang, Moon-Koo;Chun, Kuk-Jin
    • Proceedings of the IEEK Conference
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    • 2005.11a
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    • pp.793-796
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    • 2005
  • In this paper, we propose a method which can improve uniformity of a miniaturized electron beam array for inspection of very small pattern with high speed using vertical interconnection. This method enables the individual control of columns so that it can reduce the deviation of beam current, beam size, scan range and so on. The test device that used vertical interconnection method was fabricated by multiple wafer bonding and metal reflow. Two silicon and one glass wafers were bonded and metal interconnection by melting of electroplated AuSn was performed. The contact resistance was under $10{\Omega}$.

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LC-MS/MS-based Proteomic Analysis to Identify Protein Phosphorylation in Emiliania huxleyi

  • Duong, Van-An;Nam, Onyou;Jin, EonSeon;Seo, Jae-Min;Park, Jong-Moon;Lee, Hookeun
    • Mass Spectrometry Letters
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    • v.12 no.4
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    • pp.163-171
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    • 2021
  • Emiliania huxleyi is a marine phytoplankton that plays a critical role in global carbon and sulfur cycling. The genome of E. huxleyi has been sequenced, and an in-depth proteomic profile of this organism has been reported. This study analyzed the phosphoproteome of E. huxleyi and identified its changes under calcium-limited conditions. A TiO2 microcolumn was used for phosphopeptide enrichment, followed by liquid chromatography-tandem mass spectrometry analysis. Overall, we identified 7,010 phosphorylated sites on 3,355 phosphopeptides associated with 2,929 phosphoproteins in E. huxleyi. Quantitative analysis revealed changes in the phosphoproteome in E. huxleyi when ambient conditions changed to calcium-limited conditions, notably the phosphorylation of some transporters was altered. This study provides an overview of protein phosphorylation in E. huxleyi and paves the way for further investigations of its biological functions.

Narrowbore high-performance liquid chromatographic method for the determination of cetirizine in plasma using column switching

  • Hyun, Myung-Ja;Ban, Eunmi;Woo, Jong-Soo;Kim, Chong-Kook
    • Proceedings of the PSK Conference
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    • 2002.10a
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    • pp.398.2-398.2
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    • 2002
  • A column switching HPLC assay was developed to allow the separation and quantitation of cetirizine in human plasma by ultraviolet (UV) detection. Plasma samples were prepared by liquid-liquid extraction. After drying, the residue was reconstituted in 20 mM phosphate buffer (pH 2.8) containing 15% acetonitrile. The samples were initially injected onto a clean-up Capcell Pak MF C18 column. (50 mm $\times$ 4.6 mm I.D.), and the chromatographic region containing the peaks of interest was followed in an analytical C18 microcolumn (250 mm$\times$1.5 mm I. D.) via column switching device. (omitted)

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Determination of rebamipide in human plasma by column-switching high- performance liqiud chromatography.

  • Koung, Joung-Sun;Park, Chang-Hun;Kim, Ho-Hyun;Lee, Hee-Joo;Beom, Han-Sang
    • Proceedings of the PSK Conference
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    • 2003.04a
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    • pp.278.2-278.2
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    • 2003
  • A column-switching semi-micro HPLC method with fluorescence detection was developed for the direct analysis of rebamipide in human plasma. Plasma was filtered through a 0.45 $\mu\textrm{m}$ membrane filter and 5 ${\mu}\ell$ of the filtrate was directly injected onto the pre-column. After elution of the plasma proteins to waste, the retained rebamipide and internal standard(ofloxacin) were transferred to a C18 semi-microcolumn (5$\mu\textrm{m}$, 150 ${\times}$2.0mm) where they were separated using acetonitrile-1.4% acetic acid (40:60, v/v) as mobile phase. (omitted)

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Studies of electron emitters for a miniaturized electron column design (초소형 전자 칼럼 설계를 위한 전자 방출원 연구)

  • Kim, Young-Chul;Kim, Dae-Wook;Ahn, Seung-Joon;Kim, Ho-Seob;Jang, Won-Kweon
    • Korean Journal of Optics and Photonics
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    • v.13 no.4
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    • pp.314-318
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    • 2002
  • We examine the adjustment of the semiconvergent angle and current for the miniaturized micro column working at low voltage but producing maximized current. Our study shows that the minimum electron beam sizes are 10 ㎚ for the cold field emitter (CFE) and 20 ㎚ for the thermal field emitter (TFE) at a given condition.

Study on the Characteristics of Electron Beam Dependent with the Structure of Wiggler in the Miniaturized Free Electron Laser Module (초소형 자유전자레이저 모듈에 있어서 위글러 구조에 따른 전자빔 특성 연구)

  • Kim, Young-Chul;Ahn, Seong-Joon;Kim, Dae-Wook;Kim, Ho-Seob;Ahn, Seung-Joon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.3
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    • pp.1319-1326
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    • 2011
  • We have investigated the characteristics of the electron beam (e-beam) in the miniaturized free electron laser module by using the commercial 3D simulation tool OPERA. The e-beam was made parallel before entering the slit-type wiggler by the negative bias applied to the central electrode of the electron lens. With respect to the different structures of the wiggler, we obtained the inner distributions of the electrical potential and the electric field, which was, in turn, used to calculate the trajectory of the e-beam in the wiggler.

Characteristic Studies for Scan-Field Size and Visibility of Current Image in a Low Voltage Micro-Column (저 전압 초소형 전자칼럼의 주사면적 크기 및 전류영상 특성 연구)

  • Noriyuki, Ichimura;Kim, Young-Chul;Kim, Ho-Seob;Jang, Won-Kweon
    • Korean Journal of Optics and Photonics
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    • v.19 no.5
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    • pp.365-369
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    • 2008
  • The optimal condition for focusing an electron beam was investigated employing an electrostatic deflector in a low voltage micro-column. At fixed voltage of the electron emission tip, the focusing electron beam with source lens showed a larger scan field size and poorer visibility than those with an Einzel lens. Theoretical 3-D simulation indicated that a focusing electron beam with a source lens should have a larger spot size and deflection than those of a focusing Einzel lens.