Browse > Article
http://dx.doi.org/10.5762/KAIS.2011.12.4.1803

Analysis of the Electrical Defect Detection Mechanism using a Low Energy Electron Beam on the TFT Substrate for TFT-LCDs  

Oh, Tae-Sik (Department of Information Display, Sun Moon University)
Kim, Ho-Seob (Department of Information Display, Sun Moon University)
Kim, Dae-Wook (Department of Information Display, Sun Moon University)
Ahn, Seung-Joon (Department of Information Display, Sun Moon University)
Lee, Gun-Hee (Inspection Engineering Office, LG Display Co., Ltd.)
Publication Information
Journal of the Korea Academia-Industrial cooperation Society / v.12, no.4, 2011 , pp. 1803-1811 More about this Journal
Abstract
We have analyzed the electrical defect detection mechanism using low energy microcolumn on the TFT substrate for TFT-LCD. In this study, we have acquired the SEM images of the various pixel defects for 7-inch TFT substrate by scanning of low energy electron beam in the high vacuum chamber. Futhermore, we have interpreted the defect detection mechanism through the correlations between the SEM images and electrical behaviors of the defective pixels. As a result, we obtained consistent results as the follows. We can confirm that the SEM images using low energy electron beam are significantly affected by the space charge effect.
Keywords
Low energy microcolumn; TFT-LCD; TFT substrate; Defect inspection;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 T. H. P. Chang, M. G. R. Thomson, E. Kratschmer, H. S. Kim, M.L. Yu, K.Y. Lee, S. A. Rishton, B. W. Hussey, and S. Zolgharnain, "Electron-beam micro-columns for lithography and related applications," J. Vac. Sci. Technol. B 14, pp. 3774, 1996.   DOI   ScienceOn
2 H. S. Kim, D. W. Kim, S. J. Ahn, S. S. Park, M. H. Seol, and Y. C. Kim, "Multi-Beam Microcolumns Based on Arrayed SCM and WCM," J. of Korean Phys. Soc. 45(5), pp. 1214, 2004.   과학기술학회마을
3 J. C. Hunter, M. Brunner, R. Schmid, and F. Abboud, "Issues and Challenges Associated with Electrical Testing of Large LCD-TV Arrays," SID Symposium Digest of Technical Papers, Vol. 36(1), pp. 1800, 2005.   DOI
4 T. Tanaka, "Large Area Processing PECVD System," Proc. of ASID'06, 8-12 Oct, New Delhi, pp. 12, 2006.
5 "AKT Introduces AKT-40K EBT for Testing 7th Generation Flat Panel Display Substrates," http://www.physorg.com/news176.html
6 Tae-Sik Oh, Dae-Wook Kim, Young Chul Kim, Seungjoon Ahn, Gun-hee Lee, H. S. Kim, "Inspection of open defects in a thin film transistor-liquid crystal display panel by using a low-energy electron micro-column," J. Vac. Sci. Technol. B 28, pp. C6C69, 2010.   DOI
7 H. S. Kim, D. W. Kim, S. J. Ahn, Y. C. Kim, S. S. Park, K. W. Park, N. W. Hwang, S. W. Jin and S. Y. Bae, "Feasibility study of TFT-LCD array tester using low voltage micro-columns," Microelectronic Engineering, Vol. 85(5-6), pp. 782, 2008.   DOI
8 E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, and T. H. P. Chang, "An electron-beam microcolumn with improved resolution, beam current, and stability," J. Vac. Sci. Technol. B 13, pp. 2498, 1995.
9 H. Weigand, S. Gautsch, W. Strohmaier, M. Fleischer, U. Staufer, N.F. de Rooij, D.P. Kern, "Microcolumn design for a large scan field and pixel number," J. Vac. Sci. Technol. B, 27(6), pp. 2542, 2009.   DOI
10 E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, S. Zolgharnain, B. W. Hussey, and T. H. P. Chang, "Experimental evaluation of a $20{\times}20mm$ footprint microcolumn," J. Vac. Sci. Technol. B 14, pp. 3792, 1996.   DOI   ScienceOn
11 C. Stebler, T. Pfeffer, U. Staufer, and N. F. de Rooji, "Microfabricated double layer octupoles for microcolumn applications," Microelectronic Engineering 46, pp. 401, 1999.   DOI
12 "Applied Materials Enhanced Aerial Imaging Technology Addresses 22nm Photomask Inspection Challenges," http://www.businesswire.com/news/home/20100913005583/en/Applied-Materials-Enhanced-Aerial-Imaging-Technology-Addresses.
13 Y. C. Kim, D. W. Kim, S. Ahn, T. S. Oh, J. B. Kim, Y. S. Roh, D. G. Hasko, and H. S. Kim, "Inspection method for contact/via-holes using a low-energy electron microcolumn," J. Vac. Sci. Technol. B, 27(6), pp. 3208, 2009.   DOI
14 H. S. Kim, S. Ahn, D.W. Kim, Y.C. Kim, S. J. Ahn, "Photo-mask fabrication by low-energy micro-column lithography," Microelectronic Engineering, 86, pp. 2049, 2009.   DOI