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http://dx.doi.org/10.3807/KJOP.2002.13.4.314

Studies of electron emitters for a miniaturized electron column design  

Kim, Young-Chul (Dept. of Physics and Advanced Material Science, and Center for Next Generation Semiconductor Technology, Sunmoon University)
Kim, Dae-Wook (Dept. of Physics and Advanced Material Science, and Center for Next Generation Semiconductor Technology, Sunmoon University)
Ahn, Seung-Joon (Dept. of Physics and Advanced Material Science, and Center for Next Generation Semiconductor Technology, Sunmoon University)
Kim, Ho-Seob (Dept. of Physics and Advanced Material Science, and Center for Next Generation Semiconductor Technology, Sunmoon University)
Jang, Won-Kweon (Dept. of Physics, Hansoe University)
Publication Information
Korean Journal of Optics and Photonics / v.13, no.4, 2002 , pp. 314-318 More about this Journal
Abstract
We examine the adjustment of the semiconvergent angle and current for the miniaturized micro column working at low voltage but producing maximized current. Our study shows that the minimum electron beam sizes are 10 ㎚ for the cold field emitter (CFE) and 20 ㎚ for the thermal field emitter (TFE) at a given condition.
Keywords
micro column; electron beam; electron emitter;
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  • Reference
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