• Transactions on Electrical and Electronic Materials
• /
• v.12 no.4
• /
• pp.131-134
• /
• 2011

Back-end-of-line using ultra low-k (ULK; k < 2.5) has been required to reduce resistive capacitance beyond 45 nmtechnologies, because micro-processing units need higher speed and density. There are two strategies to manufacture ULK inter-layer dielectric (ILD) materials using an air-gap (k = 1). The former ULK and calcinations of ILD degrade the mechanical strength and induce a high cost due to the complication of following process, such as chemical mechanical polishing and deposition of the barrier metal. In contrast, the air-gap based low-k ILD with a relatively higher density has been researched on the trench-type with activity, but it has limited application to high density devices due to its high air-gap into the next metal layer. The height of air-gap into the next metal layer was reduced by changing to the via-typed air-gap, up to about 50% compared to that of the trench-typed air-gap. The controllable ULK was easily fabricated using the via-typed air-gap. It is thought that the via-type air-gap made the better design margin like via-patterning in the area with the dense and narrow lines.

• Proceedings of the KSME Conference
• /
• 2008.11b
• /
• pp.2357-2362
• /
• 2008

LHP is different from a conventional heat pipes in design and heat and fluid flow passages. The situations of the former is much complex than the latter. In LHPs, evaporation occurs at the contact interface between the heating plate and the porous wick, so some micro channels machined at the contact interface serve to let the vapor flow out of the evaporator. This complexity of contact geometry was known to cause a high resistance to heat flow. The present work was to study the problem of heat passage across the contact surface for LHPs and determine those values contact resistance. For two cases of contact structures, the thermal contact resistances were examined experimentally, one being obtained through mechanical contact under pressure and the other through sintered bonding. Nickel powder wick and copper plate were used for specimens. The result showed that a substantial reduction of contact resistance of an order of degree could be obtainable by sintered bonding.

• Journal of The Geomorphological Association of Korea
• /
• v.19 no.4
• /
• pp.27-37
• /
• 2012

This study investigated granite landforms formed by Hantan-gang fluvial erosion and deposition, or by weathering in the area neighboring the Seungil-gyo bridge in Cheorwon-gun Gangwon-do Korea, in which the contact zone of Myeongseongsan granite and Cheorwon lava plateau creates a unique landform. Major granite landforms are deeply weathered hill, sheet erosional landform, paleo-landform surface and paleosoil, micro-fluvial landforms such as pothole and groove, granite rampart, sand bar and boulder bar, former riverbed. And river cliffs on a weakly weathered dome act as a barrier to lateral shifting of the river.

• Current Optics and Photonics
• /
• v.2 no.2
• /
• pp.147-152
• /
• 2018

We propose a novel bi-focal metallic Fresnel zone plate (MFZP) with shallow depth-of-field (DOF) characteristics. We design the specific annular slit patterns, exploiting the phase-selection-rule method along with the particle swarm optimization algorithm, which we have recently proposed. We numerically investigate the novel characteristics of the bi-focal MFZP in comparison with those of another bi-focal MFZP having equivalent functionality but designed by the conventional multi-zone method. We verify that whilst both bi-focal MFZPs can produce dual focal spots at $15{\mu}m$ and $25{\mu}m$ away from the MFZP plane, the former exhibits characteristics superior to those of the latter from the viewpoint of axial resolution, including the axial side lobe suppression and axial DOF shallowness. We expect the proposed bi-focal MFZP can readily be fabricated with electron-beam evaporation and focused-ion-beam processes and further be exploited for various applications, such as laser micro-machining, optical trapping, biochemical sensing, confocal sensing, etc.

• Journal of the Korean Magnetic Resonance Society
• /
• v.23 no.1
• /
• pp.12-19
• /
• 2019

A former study has shown that the spin-lattice relaxation time ($T_1$) in cancerous prostate tissue had enhanced contrast at an ultra-low magnetic field, $132{\mu}T$. To study the field dependence and the origin of the contrast we measured $T_1$ in pairs of ex-vivo prostate tissues at the Earth's magnetic field. A portable and coil-based nuclear magnetic resonance (NMR) system was adopted for $T_1$ measurements at $40{\mu}T$. The $T_1$ contrast, ${\delta}=1-T_1$ (more cancer)/$T_1$(less cancer), was calculated from each pair. Additionally, we performed pathological examinations such as Gleason's score, cell proliferation index, and micro-vessel density (MVD), to quantify correlations between the pathological parameters and $T_1$ of the cancerous prostate tissues.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.26 no.4
• /
• pp.57-64
• /
• 2022

Chloride, which is one of the main deterioration factors in reinforced concrete structures, can degrade the performance of the structure due to chloride-induced corrosion of steel. Chloride content at steel depth or the rate of chloride penetration is necessary to determine deterioration of reinforced concrete or to calculate initiation time of steel corrosion caused by chloride attack. Chlorides in concrete are generally identified with typical two methods including chloride profiling using potentiometric titration method and discoloration method using AgNO₃ solution. The former is advantageous to estimate chloride penetration rate (diffusion coefficient in general) with measured chloride contents directly, but it is laborious. In the case of latter, while the result is obtained easily with the range of discoloration, the error may occur depending on workmanship when the depth of chloride ingress is measured. This study shows that chloride penetrated depth is evaluated with the results obtained from discoloration method through image analysis, thereby the error is minimized by workmanship. In addition, the effect of micro-crack in concrete is studied on chloride penetration. In conclusion, the depth of chloride penetration was quantified with image analysis and as it was confirmed that chlorides can rapidly penetrate through micro-cracks, caution is especially required for cracks in concrete structure.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.17 no.2
• /
• pp.58-65
• /
• 2016

This study was a preparatory experiment aimed the development of membrane scaffolds for tissue engineering. A PCL composite solution contained sodium chloride(NaCl). PCL porous membrane scaffolds were formed on a glass casting plate using a film applicator and immersed in distilled water to remove the NaCl reaching after drying. NaCl was used as a pore former for a 3 dimensional pore net-work. The dry condition parameters were $4^{\circ}C$, room temperature (RT) and $40^{\circ}C$ for each different temperatures in the drying experiment. SEM revealed the morphology of the pores in the membrane after drying and evaluated the in vitro cytotoxicity for basic bio-compatibility. The macro and micro pores existed together in the scaffold and showed a 3-dimensional pore net-working morphology at RT. The in vitro cytotoxicity test result was "grade 2" in accordance with the criterion for cytotoxicity by ISO 10993-5. The dry condition affected the formation of a 3 dimensional pore network and micro and macro pores. Therefore, these results are expected provide the basic process for the development of porous membrane scaffolds to control degradation and allow drug delivery.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.24 no.6
• /
• pp.573-580
• /
• 2004

The main goal of this study was to develop a micro-fabrication process for the capacitive micromachined ultrasonic transducer (cMUT). In order to achieve this goal, the former research results of the micro-electro-mechanical system (MEMS) process for the cMUT were analyzed. The membrane deposition, sacrificial layer deposition and etching were found to be a main process of fabricating the cMUT. The optimal conditions for those microfabrication were determined by the experiment. The thickness, uniformity, and residual stress of the $Si_3N_3$ deposition which forms the membrane of the cMUT were characterized after growing the $Si_3N_3$ on Si-wafer under various process conditions. As a sacrificial layer, the growth rate of the $SiO_2$ deposition was analyzed under several process conditions. The optimal etching conditions of the sacrificial layer were analyzed. The microfabrication process developed in this study will be used to fabricate the cMUT.

• The Journal of the Petrological Society of Korea
• /
• v.18 no.3
• /
• pp.211-221
• /
• 2009

This study illustrates the relationship between the petrographic characteristics of micrographic granite and the topographic features around Ijin-ri. Light-brown to light- gray granite is composed of intergrown fine-grained quartz + orthoclase, displaying micrographic textures. Miarolitic cavities are abundant. Many micro-landforms including tor, tafoni, and gnamma occurred in the micrographic granite of the study area. Tafoni is dominant in the north and gnamma is dominant in south. From our study of the occurrence and textural properties, two alteration zones were clearly identified; one is an external zone (A) characterized by abundant of small sized miarolitic cavities and the other is an internal zone (B) having them less than zone A. The former is dominant in north, and the latter is dominant in south. Particular geomorphologic features such as fluting cores and raised rims are present in the Ijin-ri area. This suggests that development of miarolitic cavities played an important role in the formation of the various geomorphologic features. Consequently, the petrogenesis of the micrographic granite is related to geomorphologic features in the external zone typified by abundant tafoni such as the tiger rock, and the formation of a platform as micro-landforms is influenced by thetextural differences of host rock in the internal zone.

• Journal of Science Education
• /
• v.43 no.1
• /
• pp.94-118
• /
• 2019

The purpose of this study is to explore the multi-faceted understanding and issues of science subject matter competencies from the trends of competency-based curriculum discourse, and to examine the relationship between general core competencies and science subject matter competencies. First, we examined the theoretical background of competency-based curriculum focusing on behaviorism, humanism, and its comprehensive synthesis. After that, we reviewed OECD's competency-related projects (DeSeCo; OECD Education 2030), US Next-Generation Science Standards (NGSS) and Korea's 2015 Revised National Curriculum from the viewpoint of competency-based curriculum. After that, we summarized and systematically analyzed a list of competencies, 105 general core competencies and 45 science subject matter competencies proposed by 15 important documents from home and abroad. The results of this study are as follows: First, the issues of the proper number, appropriate dimension, and how individual competencies should be unique and independent were pointed, in terms of defining and categorizing competencies. Second, it was suggested that the competency items are presented in various dimensions such as personal-micro dimension, community meso-dimension, and social-macro dimension. Meso-dimension was placed on both general core competencies and subject matter competencies. Third, in the relationship between general core competencies and subject matter competencies, the former emphasizes macro-dimension, and the latter emphasizes micro-dimension, revealing an existing gap, and where the two can meet each other is the meso-dimension. These discussions are thought to provide insight into the understanding of competencies in the national curriculum, including the 2015 Revised National Curriculum.