• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.8
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• pp.744-750
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• 2009

In this study, the pumping performance of a piezoelectric valveless micropump is simulated. The micropump, which was developed in the previous work, is composed of a four-layer lightweight piezocomposite actuator, a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, the fluid domain and the structural domain are coupled in the three-dimensional simulation. We used ANSYS for the piezoelectric and structural domains and ANSYS CFX for the fluid domain. The effects of driven frequency on the flow rate have been investigated by simulating the flow characteristics for 10 Hz and 40 Hz driven frequencies. The flow rates with respect to driven frequencies up to 300 Hz have been calculated.

• Design & Manufacturing
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• v.13 no.4
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• pp.10-16
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• 2019

Semiconductor chip is bonded to the substrate by melting solder bumps. In general, the chip bonding is applied by a Reflow process or a Thermo-Compression(TC) bonding process. In this paper, we introduce a Laser Assisted Thermo-Compression bonding (LATCB) process to improve the anxiety of the existing process(Reflow, TC bonding). In the LATCB process, the chip is bonded to the substrate by irradiating a laser with a uniform energy density in the same area as the chip to melt only the solder bumps and press the chip with a Transparent Compression Module (TCM). The TCM consists of a fused silica header for penetrating the laser and pressurizing the chip, and a piezoelectric actuator (P.A.) coupled to both ends of the header for micro displacement control of the header. In addition, TCM is a structure that can pressurize the chip and deliver it to the chip and solder bumps without losing the energy of the laser. Fused silica, which is brittle, is vulnerable to deformation, so the header may be damaged when an external force is applied for pressurization or a displacement differenced is caused by piezoelectric actuators at both ends. On the other hand, in order to avoid interference between the header and the adjacent chip when pressing the chip using the TCM, the header has a notch at the bottom, and breakage due to stress concentration of the notch is expected. In this study, the thickness and notch length that the header does not break when the external force (500 N) is applied to both ends of the header are optimized using structural analysis and Coulomb-Mohr failure theory. In addition, the maximum displacement difference of the P.A.s at both ends where no break occurred in the header was derived. As a result, the thickness of the header is 11 mm, and the maximum displacement difference between both ends is 8 um.

• Journal of Adhesion and Interface
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• v.25 no.1
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• pp.169-274
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• 2024

Recent attention has been drawn to materials that undergo reversible expansion and contraction in response to external stimuli, leading to morphological changes. These materials hold potential applications in various fields including soft robotics, sensors, and artificial muscles. In this study, a novel material capable of responding to high temperatures for protection or encapsulation is proposed. To achieve this, liquid crystal elastomer (LCE) with nematic-isotropic transition properties and polyimide (PI) with high mechanical strength and thermal stability were utilized. To utilize a solution process, a dope solution was synthesized and introduced into micro-printing techniques to develop a two-dimensional pattern of LCE/PI bilayer structures with sub-millimeter widths. The honeycomb-patterned LCE/PI bilayer mesh combined the mechanical strength of PI with the high-temperature contraction behavior of LCE, and selective printing of LCE facilitated deformation in desired directions at high temperatures. Consequently, the functionality of selectively and reversibly encapsulating specific high-temperature materials was achieved. This study suggests potential applications in various actuator fields where functionalities can be implemented across different temperature ranges without the need for electrical energy input, contingent upon molecular changes in LCE.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.81-87
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• 2012

This paper focuses on three-dimensional measurement system of micro balls on micro Ball-Grid-Array(BGA) packages in-line. Most of visual inspection system still suffers from sophisticate reflection characteristics of micro balls. For accurate shape measurement of them, a specially designed visual sensor system is proposed under the sensing principle of phase shifting moire interferometry. The system consists of a pattern projection system with four projection subsystems and an imaging system. In the projection system, four subsystems have spatially different projection directions to make target objects experience the pattern illuminations with different incident directions. For the phase shifting, each grating pattern of subsystem is regularly moved by PZT actuator. To remove specular noise and shadow area of BGA balls efficiently, a compact multiple-pattern projection and imaging system is implemented and tested. Especially, a sensor fusion algorithm to integrate four information sets, acquired from multiple projections, into one is proposed with the basis of Bayesian sensor fusion theory. To see how the proposed system works, a series of experiments is performed and the results are analyzed in detail.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.2 s.245
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• pp.110-116
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• 2006

A syringe pump or a device using high electric voltage has been used for controlling flows inside a LOC (lab-on-a-chip). Compared to LOC, however, these microfluidic devices are large and heavy that they are burdensome for a portable ${\mu}-TAS$ (micro total analysis system). In this study, a new flow control technique employing pressure regulators and pressure chambers was developed. This technique utilizes compressed air to control the micro-scale flow inside a LOC, instead of a mechanical actuator or an electric power supply. The pressure regulator controls the output air pressure by adjusting the variable resistor attached. We checked the feasibility of this system by measuring the flow rate inside a capillary tube of $100{\mu}m$ diameter in the Re numbers ranged from 0.5 to 50. In addition, the performance of this flow control system was compared with that of a conventional syringe pump. The developed flow control system was found to show superior performance, compared with the syringe pump. It maintains automatically the: air pressure inside a pressure chamber whether the flow inside the capillary tube is on or off. Since the flow rate is nearly proportional to the resistance, we can control flow in multiple microchannels precisely. However, the syringe pump shows large variation of flow rate when the fluid flow is blocked in the microchannel.

• Transactions on Electrical and Electronic Materials
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• v.17 no.2
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• pp.92-97
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• 2016

This paper presents design and simulation of wide band RF microswitch that uses electrostatic actuation for its operation. RF MEMS devices exhibit superior high frequency performance in comparison to conventional devices. Similar techniques that are used in Very Large Scale Integration (VLSI) can be employed to design and fabricate MEMS devices and traditional batch-processing methods can be used for its manufacturing. The proposed switch presents a novel design approach to handle reliability concerns in MEMS switches like dielectric charging effect, micro welding and stiction. The shape has been optimized at actuation voltage of 14-16 V. The switch has an improved restoring force of 20.8 μN. The design of the proposed switch is very elemental and primarily composed of electrostatic actuator, a bridge membrane and coplanar waveguide which are suspended over the substrate. The simple design of the switch makes it easy for fabrication. Typical insertion and isolation of the switch at 1 GHz is -0.03 dB and -71 dB and at 85 GHz it is -0.24 dB and -29.8 dB respectively. The isolation remains more than - 20 db even after 120 GHz. To our knowledge this is the first demonstration of a metal contact switch that shows such a high and sustained isolation and performance at W-band frequencies with an excellent figure-of merit (fc=1/2.pi.Ron.Cu =1,900 GHz). This figure of merit is significantly greater than electronic switching devices. The switch would find extensive application in wideband operations and areas where reliability is a major concern.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.38 no.8
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• pp.767-773
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• 2010

This paper describes development of a non-explosive separation device which can be equipped on small satellites. The spur geared micro DC motor, which has high reliability and advantage of price, is adopted as an actuator. The proposed separation device has resettability and it does not need extra jig to reload. In addition, the simple structure makes it easy to fabricate and assemble. To verify the performance of the proposed device, the response time tests, maximum preload tests and maximum shock level tests were performed. Also, through the vibration tests and thermal vacuum tests, feasibility of the proposed separation device was shown in launching and space environments. Therefore, we expect that the proposed separation device can replace the imported separation devices in near future.

• Journal of Mechanical Science and Technology
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• v.20 no.1
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• pp.51-58
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• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.12
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• pp.1185-1191
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• 2011

The kinematic characteristics of cutting device significantly affects cutting performance in 2-dimensional elliptical vibration cutting(EVC) where the cutting tool cuts workpiece, traversing a micro-scale elliptical trajectory in a trochoidal motion. In this study, kinematical characteristics of EVC device constructed with two parallel stacked piezoelectric actuators were analytically modeled and compared with the experimental results. The EVC device was subjected to step and low-frequency(0.1 Hz) sinusoidal inputs to reveal only its kinematical displacement characteristics. Hysteresis in the motion of the device was observed in the thrust direction and distinctive skew of the major axis of the elliptical trajectory of the cutting tool was also noticed. Discrepancy in the voltage-to-displacement characteristics of the piezoelectric actuators was found to largely contribute to the skew of the major axis of the elliptical trajectory of the cutting tool. Analytical kinematical model predicted the cutting direction displacement within 10 % error in magnitude with no phase error, but in estimating the thrust direction displacement, it showed a $27^{\circ}$ of phase-lag compared with the measured displacement with no magnitude error.

• Journal of Institute of Control, Robotics and Systems
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• v.8 no.9
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• pp.736-746
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• 2002

There has been a great demand for smart actuators in the field of micro-machines. However, the control accuracy of smart actuators, e.g., a shape memory alloy(SMA) and a piezoceramic actuator, is limited due to the inherent hysteresis nonlinearity. The Preisach hysteresis model has emerged as an appropriate model f3r the behavior of those smart actuators. Yet it is still not easy to construct a practical model of hysteresis using the classical Preisach model. Accordingly, in this paper, we propose a new simple method for modeling of the hysteresis nonlinearity of SMA. Using only the proportional relation of the major loop of hysteresis, the proposed method makes the computation of the Preisach model easy. We prove the efficacy of the proposed model through the comparative the experimentation with the classical Preisach model.