A study on the brittle characteristics of fused silica header driven by piezoelectric actuator for laser assisted TC bonding |
Lee, Dong-Won
(Molds & Dies Technology R&B Group, Korea Institute of Industrial Technology)
Ha, Seok-Jae (Molds & Dies Technology R&B Group, Korea Institute of Industrial Technology) Park, Jeong-Yeon (Molds & Dies Technology R&B Group, Korea Institute of Industrial Technology) Yoon, Gil-Sang (Molds & Dies Technology R&B Group, Korea Institute of Industrial Technology) |
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