Motion Error Compensation Method for Hydrostatic Tables Using Actively Controlled Capillaries |
Park Chun Hong
(Intelligent Machine Systems Center, Korea Institute of Machinery & Materials)
Oh Yoon Jin (Intelligent Machine Systems Center, Korea Institute of Machinery & Materials) Hwang Joo Ho (Intelligent Machine Systems Center, Korea Institute of Machinery & Materials) Lee Deug Woo (Nano Science and Technology Faculty, Pusan National University) |
1 | Sharma, S. C., Jain, S. C. and Bharuka, D. K., 2002, 'Influence of Recess Shape on the Performance of a Capillary Compensated Circular Thrust Pad Hydrostatic Bearing,' Tribology International, Vol. 35, pp. 347-356 DOI ScienceOn |
2 | Canbulut, F., Sinanoglu, C. and Yildirim, S., 2004, 'Analysis of Effects of Sizes of Orifice and Pockets on the Rigidity of Hydrostatic Bearing Using Neural Network Predictor System,' KSME International Journal, Vol. 18, No.3, pp.432-442 과학기술학회마을 |
3 | Hageman, L. A. and Young, D. M., 1981, Ap-plied Iterative Methods, Academic Press, Inc. |
4 | Mizumoto, H., Arii, S., Kami, Y., Goto, K., Yamamoto, T. and Kawamoto, M., 1996, 'Active Inherent Restrictor for Air-bearing Spindles,' Precision Engineering, Vol. 19, No. 2/3, pp. 141-147 DOI ScienceOn |
5 | Park, C. H., Moriwaki, T. and Shamoto, E., 1998, 'Coupling Mechanism for High Precision Feed Table with Ballscrew,' Int. Conf on Manufacturing Milestones toward the Century, JSME, pp. 139-144 |
6 | Aoyama, H., Watanabe, I., Akutsu, K. and Shimokohbe, A., 1988, 'An Ultra Precision Straight Motion System (151 Report-Two Degrees of Freedom Control of Motion),' J. of JSPE, Vol. 54, No.3, pp. 130-135 |
7 | Aoyama, T., 1990, Hydrostatic Bearing - Design and Applications, Kougyojoushakai |