• Proceedings of the KIEE Conference
• /
• 2003.10a
• /
• pp.45-48
• /
• 2003

In the research of proteomics, mass spectrometry analysis is the essential method for identification of the unknown proteins. Trypsin treatment for the sample preparation of mass spectrometry is the inevitable procedure[1]. However, sample preparation procedure is cumbersome and time consuming. To resolve these problems, Temperature controllable microreactor was designed and fabricated. It consists of metering chamber, micro channel, reaction chamber, platinum (Pt) thin film heater and a temperature sensor so that micro metering and mixture of reagent with temperature control can be done on the same chip. The total size of the fabricated microreactor was $37{\times}30{\times}1\;mm^3$ and the size of channel cross section was $200{\times}100{\mu}m^2$. PID temperature controller was realized using NI DAQ, PCI-MIO-l6E-1 board and LabVIEW program.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.19 no.10
• /
• pp.894-900
• /
• 2006

This paper reports the fabrication and characterization of $32{\times}32$ thermal cantilever array for nano-scaled memory device applications. The $32{\times}32$ thermal cantilever array with integrated tip heater has been fabricated with micro-electro-mechanical systems(MEMS) technology on silicon on insulator(SOI) wafer using 9 photo masking steps. All of single-level cantilevers(1,024 bits) have a p-n junction diode in order to eliminate any electrical cross-talk between adjacent cantilevers. Nonlinear electrical characteristic of fabricated thermal cantilever shows its own thermal heating mechanism. In addition, n-channel high-voltage MOSFET device is integrated on a wafer for embedding driver circuitry.

• Journal of Mechanical Science and Technology
• /
• v.20 no.3
• /
• pp.297-309
• /
• 2006

This paper deals with a novel structure for single-cell characterization which makes use of bimorph micro thermal actuators combined with electrical sensor device and integrated microfluidic channel. The goal for this device is to capture and characterize individual biocell. Quantitative and qualitative characteristics of bimorph thermal actuator were analyzed with finite element analysis methods. Furthermore, optimization for the dimension of cantilevers and integrated parallel probe systems with microfluidic channels is able to be realized through the virtual simulation for actuation and the practical fabrication of prototype of probes. The experimental value of probe deflection was in accordance with the simulated one.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1277-1280
• /
• 2005

A high-aspect-ratio and high-resolution stainless steel shadow mask for organic thin-film transistors (OTFTs) circuit has been fabricated by a new method which combines photochemical machining, micro-electrical discharge machining (micro-EDM), and electrochemical etching (ECE). First, connection lines and source-drain holes are roughly machined by photochemical etching, and then the part of source and drain holes is finished by the combination of micro-EDM and ECE processes. Using this method a $100\;\mu{m}$ thick stainless steel (AISI 304) shadow mask for inverter can be fabricated with the channel length of $30\;\mu{m}\;and\;10\;\mu{m}\;respectively.\;The\;width\;of\;connection line\;is\;150\;\mu{m}$. The aspect ratio of the wall is about 5 and 15, respectively. Metal lines and source-drain electrodes of OTFTs were successfully deposited through the fabricated shadow mask.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.572-575
• /
• 2005

A microlens connected to microfluidic channel is fabricated. The microlens is sealed with an elastomeric membrane which deforms by pressure of fluid driven by a syringe pump resulting in the shape change of the microlens. The optical properties of the microlens could be controlled by changing the microlens shape. The microlens system were made of an elastomer, PDMS, using molding from a photoplastic master patterned by UV photolithography. The test results show the optical property of the lens could be made into convex and concave type by applying the fluidic pressure positive and negative.

• Proceedings of the KSME Conference
• /
• 2004.11a
• /
• pp.1516-1521
• /
• 2004

Mixing in Y-channel micro mixer is analyzed through computational fluid dynamics. In the case of passive mixing, we investigate the effect of geometric parameters on the mixing efficiency, such as shape of throttling geometry and angle between two inlets. Mixing performance improves as two fluids join not just horizontally but both vertically and horizontally, and it also improves when channel follows throttling shapes. A numerical results substantiate the highly efficient mixing performance. It is highly beneficial to fabrication process since the proposed throttling geometry is simple, but allows high mixing ratio.

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.2 no.4
• /
• pp.253-258
• /
• 2002

This paper reports the design, modeling, fabrication and measurement of passive microvalves, which are applicable to glaucoma implants. The proposed microvalves were designed using fluidic theory. The microvalves consisted of microchannels and chambers. The microchannels had a constant fluidic resistance generating a pressure difference. Six kinds of microvalves were designed using fluidic equations for laminar flow and fabricated to examine the influences of chamber size, channel length and the shape of channel cross section. The pressure difference between the designed microvalve and the fabricated microvalve was measured to be less than 4%.

• Proceedings of the KSME Conference
• /
• 2003.11a
• /
• pp.1016-1020
• /
• 2003

In this paper, we present a technology of producing anew chaotic micromixer, named Micromixer with Arranged Blocks(MAB), and the experimental result of the mixing performance. Chaotic mixing was successfully achieved by introducing periodic perturbation in the field of the channel flow by means of slanted blocks. The MAB was made by an RP(Rapid Prototyping) technology. We performed flow visualization experiments for the quantification of the mixing performance with the MAB. Lyapunov exponent was measured to be 0.3557 and 0.1305 for the block height 0.8 and 0.2 times the channel width.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2006.05a
• /
• pp.71-73
• /
• 2006

This research aims to develop a multiple channel electrochemical DNA chip using micro- fabrication technology. At first, we fabricated a high integrated type DNA chip array by lithography technology. Several probe DNAs consisting of thiol group at their 5-end were immobilized on the gold electrodes. Then target DNAs were hybridized by an electrical force. Redox peak of cyclic-voltammogram showed a difference between target DNA and mismatched DNA in the anodic peak current. Therefore. it is able to detect a various genes electrochemically after immobilization of a various probe DNA and hybridization of label-free DNA on the electrodes simultaneously. It suggested that this DNA chip could recognize the sequence specific genes.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.5
• /
• pp.38-45
• /
• 2004

As optical communication is being substituted for telecommunication, the demand of a large variety of fiber optic components is increasing. V-groove substrates, one of the module components, are used to connect optical fibers to optical planar circuits and to arrange fibers. Their applications are multi-channel optical connectors and optical waveguide fiber coupling, etc. Because these substrates are a critical part of the splitter in a multiplexer and a multi fiber connector, precise and reliable fabrication process is required. For precisely aligning core pitch between fibers, machined core pitch tolerance should be within sub-microns. Therefore, these are generally produced by state-of-the-art micro-fabrication like MEMS. However, most of the process equipment is very expensive. It is also difficult to change the process line for custom designs to meet specific requirements using various materials. For various design specifications such as different values of the V angle and low-priced process, the fabrication method should be flexible and low cost. To achieve this goal, we have suggested a miniaturized machine tool with high accuracy positioning system. Through this study, it is shown that this cutting process can be applied to produce V-groove subtracts. We also show the possibility of using a miniaturized machining system for producing small parts.