Browse > Article

Fabrication and Characterization of Thermally Actuated Bimorph Probe for Living Cell Measurements with Experimental and Numerical Analysis  

Cho Young-Hak (CIRMM, Institute of Industrial Science, The University of Tokyo)
Kang Beom-Joon (CIRMM, Institute of Industrial Science, The University of Tokyo)
Hong Seok-Kwan (Korea Institute of Industrial Technology)
Kang Jeong-Jin (Korea Institute of Industrial Technology)
Publication Information
Journal of Mechanical Science and Technology / v.20, no.3, 2006 , pp. 297-309 More about this Journal
Abstract
This paper deals with a novel structure for single-cell characterization which makes use of bimorph micro thermal actuators combined with electrical sensor device and integrated microfluidic channel. The goal for this device is to capture and characterize individual biocell. Quantitative and qualitative characteristics of bimorph thermal actuator were analyzed with finite element analysis methods. Furthermore, optimization for the dimension of cantilevers and integrated parallel probe systems with microfluidic channels is able to be realized through the virtual simulation for actuation and the practical fabrication of prototype of probes. The experimental value of probe deflection was in accordance with the simulated one.
Keywords
Bimorph Thermal Actuator; Single-cell Measurement; SU-8;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By Web Of Science : 0  (Related Records In Web of Science)
Times Cited By SCOPUS : 0
연도 인용수 순위
1 Kim, B. J., Collard, D., Lagouge, M., Conseil, F., Legrand, B. and Buchaillot, L., 2003, 'Thermally Actuated Probe Arrays for Manipulation and Characterization of Individual Bio-cell,' Proc. of the 12th. Int. Conference on Solid-State Sensors, Actuators and Microsystems, Vol. 2, 3E22.P, pp. 1255-1258   DOI
2 Incropera, F. P. and De Witt, D. P., 1990, Introduction to Heat Transfer, 2nd Edition, John Wiley & Sons
3 Yu, C. C. and Yang, Y. J., 2003, 'Extraction of Heat Transfer Macromodels for MEMS devices,' Proc. of the 12th. Int. Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1852-1855
4 Kim, N., Lee, J., Seo, T. and Kim, C., 2002, 'Combined Convection and Radiation in a Tube with Circumferential Fins and Circular Disks,' KSME International Journal, Vol. 16, No. 12, pp. 1725-1732   DOI
5 Weast, R. C., Astle, M. J. and Beyer, W. H., 2003, Handbook of chemistry and physics, 84th Edition, CRC Press
6 Ataka, M., Omodaka, A., Takeshima, N. and Fujita, H., 1993, 'Fabrication and Operation of Polyimide Bimorph Actuators for a Ciliary Motion System,' IEEE Journal of Microelectro-mechanical Systems, Vol. 2, pp. 146-150   DOI   ScienceOn
7 Chronis, N. and Lee, L. P., 2004, 'Polymer MEMS-based Microgripper for Single Cell Manipulation,' Proc. IEEE Micro Electromechanical Systems Workshop, pp. 17-20   DOI
8 Fadmacher, M., 1997, 'Measuring the Elastic Properties of Biological Samples with the AFM,' IEEE Engineering in Medicine and biology, Vol. 16, pp.47-57   DOI   ScienceOn
9 Vargaftik, N. B., 1956, Teplofizicheskiye Svoystva Veshchestv (Thermophyical Properties of Substances), Reference Book, Gosenergoizdat, pp. 142-143
10 Pichonat-Gallois, E. and Labachelerie, M., 2003, 'Thermal Actuators Used for a Micro-optical Bench : Application for a Tunable Fabryperot Filter,' Proc. of the 12th. Int. Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1419-1422