Fabrication and Characterization of Thermally Actuated Bimorph Probe for Living Cell Measurements with Experimental and Numerical Analysis |
Cho Young-Hak
(CIRMM, Institute of Industrial Science, The University of Tokyo)
Kang Beom-Joon (CIRMM, Institute of Industrial Science, The University of Tokyo) Hong Seok-Kwan (Korea Institute of Industrial Technology) Kang Jeong-Jin (Korea Institute of Industrial Technology) |
1 | Kim, B. J., Collard, D., Lagouge, M., Conseil, F., Legrand, B. and Buchaillot, L., 2003, 'Thermally Actuated Probe Arrays for Manipulation and Characterization of Individual Bio-cell,' Proc. of the 12th. Int. Conference on Solid-State Sensors, Actuators and Microsystems, Vol. 2, 3E22.P, pp. 1255-1258 DOI |
2 | Incropera, F. P. and De Witt, D. P., 1990, Introduction to Heat Transfer, 2nd Edition, John Wiley & Sons |
3 | Yu, C. C. and Yang, Y. J., 2003, 'Extraction of Heat Transfer Macromodels for MEMS devices,' Proc. of the 12th. Int. Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1852-1855 |
4 | Kim, N., Lee, J., Seo, T. and Kim, C., 2002, 'Combined Convection and Radiation in a Tube with Circumferential Fins and Circular Disks,' KSME International Journal, Vol. 16, No. 12, pp. 1725-1732 DOI |
5 | Weast, R. C., Astle, M. J. and Beyer, W. H., 2003, Handbook of chemistry and physics, 84th Edition, CRC Press |
6 | Ataka, M., Omodaka, A., Takeshima, N. and Fujita, H., 1993, 'Fabrication and Operation of Polyimide Bimorph Actuators for a Ciliary Motion System,' IEEE Journal of Microelectro-mechanical Systems, Vol. 2, pp. 146-150 DOI ScienceOn |
7 | Chronis, N. and Lee, L. P., 2004, 'Polymer MEMS-based Microgripper for Single Cell Manipulation,' Proc. IEEE Micro Electromechanical Systems Workshop, pp. 17-20 DOI |
8 | Fadmacher, M., 1997, 'Measuring the Elastic Properties of Biological Samples with the AFM,' IEEE Engineering in Medicine and biology, Vol. 16, pp.47-57 DOI ScienceOn |
9 | Vargaftik, N. B., 1956, Teplofizicheskiye Svoystva Veshchestv (Thermophyical Properties of Substances), Reference Book, Gosenergoizdat, pp. 142-143 |
10 | Pichonat-Gallois, E. and Labachelerie, M., 2003, 'Thermal Actuators Used for a Micro-optical Bench : Application for a Tunable Fabryperot Filter,' Proc. of the 12th. Int. Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1419-1422 |