Journal of Mechanical Science and Technology

The Korean Society of Mechanical Engineers (대한기계학회)
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Fabrication and Characterization of Thermally Actuated Bimorph Probe for Living Cell Measurements with Experimental and Numerical Analysis

  • Cho Young-Hak (CIRMM, Institute of Industrial Science, The University of Tokyo) ;
  • Kang Beom-Joon (CIRMM, Institute of Industrial Science, The University of Tokyo) ;
  • Hong Seok-Kwan (Korea Institute of Industrial Technology) ;
  • Kang Jeong-Jin (Korea Institute of Industrial Technology)
  • Published : 2006.03.01
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Abstract

This paper deals with a novel structure for single-cell characterization which makes use of bimorph micro thermal actuators combined with electrical sensor device and integrated microfluidic channel. The goal for this device is to capture and characterize individual biocell. Quantitative and qualitative characteristics of bimorph thermal actuator were analyzed with finite element analysis methods. Furthermore, optimization for the dimension of cantilevers and integrated parallel probe systems with microfluidic channels is able to be realized through the virtual simulation for actuation and the practical fabrication of prototype of probes. The experimental value of probe deflection was in accordance with the simulated one.

Keywords

References

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