• Journal of the Korean Electrochemical Society
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• v.7 no.2
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• pp.100-107
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• 2004

The nano or micro sized structures of conducting polymer had been prepared by synthesizing the desired polymer within the pores of template of nano or micro porous membrane filter. In this study, we had tried to fabricate conducting polymer microstructures on an electrode by using electrochemical deposition adopting template synthesis. Our attention was focused on two different things, attaching template on the electrode and fabricating microstructures only at limited areas of the electrode. A conducting polymer, PEDiTT (poly 3,4-ethylenedithi-athiophene) solution was blended with PVA(polyvinyl alcohol) solution and used as an conducting adhesive. After attaching template membrane, the electrode were immersed in 0.5M pyrrole in 0.1M KCI solution, and electrochemical polymerization was performed. The growth process of the microstructures studied by SEM. The electrochemical fabrication of conducting polymer was performed by using two-electrode system. A large working electrode and a micro scale disc electrode were used for the confined area synthesis. Polymerization potential was 4V in an electrolytic solution made of KCI in deionized water. The optimum polymerization conditions were, i.e. (4V/100sec) for $250{\mu}m$ electrode and (6V/30 sec) for $10{\mu}m$ electrode.

• Korean Chemical Engineering Research
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• v.45 no.2
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• pp.149-154
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• 2007

Nanoimprint lithography (NIL) is useful technique because of its low cost and high throughput capability for the fabrication of sub-micrometer patterns which has potential applications in micro-optics, magnetic memory devices, bio sensors, and photonic crystals. Usually, a chemical surface treatment of the stamp is needed to ensure a clean release after imprinting and to protect the expensive original master against contamination. Meanwhile, adhesion promoter between resin and substrate is also important in the nanoscale pattern. In this work, we have investigated the effect of surface treatment using silane coupling agent as release layer and adhesion promoter for UV-Nanoimprint lithography. Uniform SAM (self-assembled monolayer) could be fabricated by vapor deposition method. Vapor phase process eliminates the use of organic solvents and greatly simplifies the handling of the sample. It was also proven that 3-acryloxypropyl methyl dichlorosilane (APMDS) could strongly improve the adhesion force between resin and substrate compared with common planarization layer such as DUV-30J or oxygen plasma treatment.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.423.1-423.1
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• 2016

Polyvinylidene fluoride (PVDF) has drawn much attention due to its many advantages. PVDF shows high mechanical strength and flexibility, thermal stability, and good piezoelectricity enabling its application to various fields such as sensors, actuators, and energy transducers. Further studies have been conducted on PVDF in the form of thin films. The thin films exhibit different ionic conductivity according to the number of pores within the film, letting these films to be applied as electrolytes or separators of batteries. Porous PVDF membranes are also easily processed, usually made by using electrospinning. However, a large portion of researches were conducted using PVDF membranes produced by far field electrospinning, which is not a well-controlled experimental method. In this paper, we use near field electrospinning (NFES) process for more controlled, small-scaled, mesh type PVDF structures of nano to micro fibers fabricated by controlling process parameters and investigate the properties of such membranous structures. These membranes vary according to geometrical shape, pore density, and fiber thickness. We then measured the mechanical strength and piezoelectric characteristic of the structures. With various geometries in the fiber structures and various scales in the fibers, these types of structures can potentially lead to broader applications for stretchable electronics and dielectric electro active polymers.

• Journal of Sensor Science and Technology
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• v.23 no.6
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• pp.383-387
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• 2014

Electrically conductive polypyrrole-polyvinylpyrrolidone (PPy-PVP) nanofiber mats with a core-shell structure have been successfully fabricated by a two-step process: the formation of FeCl3-containing PVP nanofiber mat by electrospinning, and the vapor-phase polymerization (VPP) of pyrrole monomer on the mat in a sealed chamber at room temperature. Surface morphology and chemical composition of the PPy-PVP mat were characterized by SEM, EDX and FTIR analyses. The as-prepared nonwoven mat was composed of PPy-PVP nanofibers with an average diameter of 300 nm. The sheet conductivity of the nanofiber mat was measured to be approximately 0.01 S/cm by a four-point probe. We have also investigated gas-sensing properties of PPy-PVP nanofiber mat upon exposure to methanol vapor. The PPy-PVP nanofiber sensors were observed to have excellent methanol-sensing performance. The nanofiber-based core-shell nanostructure could give an opportunity to fabricate a highly sensitive and fast response sensor due to its high surfaceto-volume ratio.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.56-62
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• 2003

The precision fabrication of glass is increasingly demanded for the latest industrial applications of spherical lenses, micro-optical components, and so on. In many cases, the surface roughness of glass is required to be minute for improving the optical characteristics. In this paper, machining characteristics of SF-5 glass and quarts glass are studied by using the ELID grinding process to get mirror surface and productivity compared with a general lapping process. A rotary type grinder with air spindle was used for the experiments. Mitutoyo surface tester and AFM were also used to measure the grinded surface of glass. As the results of experiments, they showed that the surface roughness (Ra) of SF-5 glass was under 7.8 nm and that of quartz glass was under 3.0 m using the # 8000 grinder. So, the possibility of highly efficient and accurate surface for optical components can be achieved by the ELID grinding process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.597-598
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• 2006

In this study, we used the ESD method to prepare the protein microarrays for observation the stem cell responses to pattern size, space and shapes. The ESD method allows a reduction in spot size, high efficiency of substance transfer, and high rate in fabrication as a result of ability to simultaneously deposit thousands of identical spots. Typical electro spraying conditions for the deposition of proteins were a voltage of $3{\sim}5keV$ and the humidity under 30%. The patterns of masks have a variety of shapes, spaces, and hole sizes from 10 um to $300{\mu}m$. Three kinds of proteins(collagen, fibronectin, and vitronectin dissolved in PBS) are deposited in a dry state, preserving the functional activity of proteins. Stem cells were cultured on each protein patterned sample at $37^{\circ}C$ for 1day.

• Transactions of the Korean hydrogen and new energy society
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• v.16 no.4
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• pp.372-378
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• 2005

Ni/YSZ ($Y_2O_3$-stabilized $ZrO_2$) composite powder for a cathode material in high temperature electrolysis(HTE) was synthesized by a mechanical alloying method with Ni and YSZ powder. Microstructure of the composite and cell thickness for HTE reaction has been analyzed with various techniques of XRD, SEM to investigate effects of fabrication conditions. Employing the composite material, furthermore, the unit cell for HTE has been studied to evolve hydrogen from water. XRD patterns showed that the composites after wet mechanical alloying were composed of respective nano-sized crystalline Ni and YSZ. While ethanol as additive for mechanical alloying increased to $20\;{\mu}m$ of average particle size of the composites, alpha-terpineol effectively decreased to sub-micro size of that. This study has been found out the evolution of hydrogen by HTE reaction employing the fabricated cathode material, showing 1.4 ml/min of $H_2$ generation rate as increasing $20\;{\mu}m$ of cathode thickness.

• Transactions on Electrical and Electronic Materials
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• v.14 no.2
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• pp.63-66
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• 2013

This paper describes the highly productive process technologies of microprobe arrays, which were used for a probe card to test a Dynamic Random Access Memory (DRAM) chip with fine pitch pads. Cantilever-type microprobe arrays were fabricated using conventional micro-electro-mechanical system (MEMS) process technologies. Bonding material, gold-tin (Au-Sn) paste, was used to bond the Ni-Co alloy microprobes to the ceramic space transformer. The electrical and mechanical characteristics of a probe card with fabricated microprobes were measured by a conventional probe card tester. A probe card assembled with the fabricated microprobes showed good x-y alignment and planarity errors within ${\pm}5{\mu}m$ and ${\pm}10{\mu}m$, respectively. In addition, the average leakage current and contact resistance were approximately 1.04 nA and 0.054 ohm, respectively. The proposed highly productive microprobes can be applied to a MEMS probe card, to test a DRAM chip with fine pitch pads.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.34 no.6
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• pp.401-415
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• 2021

Soft robots are promising devices for applications in drug delivery, sensing, and manufacturing. Traditional hard robotics are manufactured with rigid materials and their degrees of motion are constrained by the orientation of the joints. In contrast to rigid counterpart, soft robotics, employing soft and stretchable materials that easily deforms in shape, can realize complex motions (i.e., locomotion, swimming, and grappling) with a simple structure, and easily adapt to dynamic environment. Among them, the magnetic actuators exhibit unique characteristics such as rapid and accurate motion control, biocompatibility, and facile remote controllability, which make them promising candidates for the next-generation soft robots. Especially, the magnetic actuators instantly response to the stimuli, and show no-hysteresis during the recovery process, essential for continuous motion control. Here, we present the state-of-the-art fabrication process of magnetically controllable nano-/micro-composites, magnetically aligning process of the composites, and 1-dimensional/multi-dimensional multimodal motion control for the nextgeneration soft actuators.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.4
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• pp.1838-1843
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• 2014

Nanoimprint lithography (NIL) fabrication process is regarded as the main alternative to existing expensive photo-lithography in areas such as micro- and nano-electronics including optical components and sensors, as well as the solar cell and display device industries. Functional patterns, including anti-reflective moth-eye pattern, photonic crystal pattern, fabricated by NIL can improve the overall efficiency of such devices. To successfully imprint a nano-sized pattern, the process conditions such as temperature, pressure, and time should be appropriately selected. In this paper, a cavity-filling process of the moth-eye pattern during the thermal-NIL within the temperature range, where the polymer resist shows the viscoelastic behaviors with consideration of stress relaxation effect of the polymer, were investigated with three-dimensional finite element analysis. The effects of initial thickness of polymer resist and imprinting pressure on cavity-filling process has been discussed. From the analysis results it was found that the cavity filling can be completed within 100 s, under the pressure of more than 4 MPa.