• 천문학회보
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• 제36권2호
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• pp.132.2-132.2
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• 2011

We are developing Adaptive Optics (AO) system for astronomical use. The He-Ne laser works as an artificial light source. The tip-tilt correction servo is added to our AO system. The tip-tilt term, among the Zernike terms, is the biggest contributor of wavefront deformation caused by atmospheric turbulence at small telescopes. The tip-tilt correction servo consists of a Piezo tip-tilt platform with a mirror, a quadrant photodiode as a tip-tilt sensor, and controllers. The Shack-Hartmann wavefront sensor measures the residual wavefront errors and they are corrected by the MEMS (Micro Electro Mechanical System) deformable mirror. The MEMS deformable mirror allows the compact size at low cost compare to adaptive secondary mirror and other deformable mirrors. As the frame rates of the MEMS deformable mirror is about tens of kHz, the frame rates of the detector in wavefront sensor is the bottleneck of the wavefront correction speed. For faster performance, we replaced a CCD which provides frame rates only 70 Hz with a CMOS with frame rates up to 450 Hz.

• 센서학회지
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• 제19권2호
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• pp.130-136
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• 2010

The microbolometer array sensor with fine pitch pixel array has been implemented to the released amorphous silicon layer supported by two contact pads. For the design of focal plane mirror with geometrical flatness, the simple beam test structures were fabricated and characterized. As the beam length decreased, the effect of beam width on the bending was minimized, Mirror deformation of focal plane in a real pixel showed downward curvature by residual stress of a-Si and Ti layer. The mirror tilting was caused by the mis-align effect of contact pad and confirmed by FEA simulation results. The properties of bolometer have been measured as such that the NETD 145 mK, the TCR -2 %/K, and thermal time constant 1.99 ms.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1914-1917
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• 2001

3D Feed Horn Shape MEMS Antenna Array는 적외선 이미지 소자 또는 Tera hertz band 등에서 많은 응용을 할 수 있는 장점을 가진 MEMS 구조체 이다. 하지만 일반적인 MEMS 공정을 이용해서 3D Feed Horn Shape MEMS antenna array를 구현하기는 적합하지 않았다. 본 논문에서는 마스크와 웨이퍼가 일체 된 형태의 경사된 척이 초 저속으로 회전하면서 노광을 할 수 있는 새로운 방식과 미러 반사구조를 이용해서 평행광을 얻을수 있는 노광장치 (MRPBI : Mirror Reflected Parallel Beam Illuminator) System제작방법을 제안하였다. 3D Feed Horn Shape MEMS Antenna의 구조적인 high apect ratio의 특성에 의해서 SU-8과 PMER Negative Photo resist를 이용한 기본적인 실험을 통해 3D 구조체의 구현 가능성을 증명하였다. 또한 Microbolometer의 성능향상을 위한 이론적인 3D MEMS Antenna Model들을 HFSS(High Frequency Structure Simulator)을 이용해서 그 최적구조를 제안하고 3D MEMS Antenna Gain 값을 비교 분석하였다.

• 천문학회보
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• 제36권1호
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• pp.65.1-65.1
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• 2011

We built a simple Adaptive Optics (AO) system at laboratory. This AO system is a step toward developing AO system for astronomical use. In this step, the AO system consists of He-Ne laser as a artificial light source, wavefront sensor, MEMS (Micro electro mechanical system) type deformable mirror and several lenses. MEMS deformable mirror allows the compact system at low cost and the only several mm sized collimated beam. We made Shack-Hartmann wavefront sensor using a lenslet array and a fast frame CCD. Its performance is verified using an artificial phase disturber and noting the movement of spot images by the lenslet array. The frame rate of the driving software is about 70 fps, depending on the control parameters. The characteristics of MEMS deformable mirror was measured which includes the voltage-to-deflection relation, influence function, and cross-talk. The total system is operated under closed-loop control for the artificial phase disturber and the wavefront is found to be compensated successfully.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1522-1526
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• 2005

In this study, the fabrication of large area silicon mirror is accomplished by anisotropic etching using MEMS for implementation of integrated optical pickup and the process condition is also established for improving the mirror surface roughness. Until now, few results have been reported about the production of highly stepped $9.74^{\circ}$ off-axis-cut silicon wafer using wet etching. In addition rough surface of the mirror is achieved in case of long etching time. Hence a novel method called magnetorheolocal finishing is introduced to enhancing the surface quality of the mirror plane. Finally, areal peak to valley surface roughness of mirror plane is reduced about 100nm in large area of $mm^2$ and it is applicable to optical pickup using infrared wavelength.

• Journal of Electrical Engineering and Technology
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• 제2권2호
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• pp.263-266
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• 2007

We report a nickel optical MEMS switch, being able to rotate through a large angle and to accommodate multiple channels. The proposed optical switch consists of a thin nickel mirror and two torsion springs supporting the mirror. The torsion springs are designed using a finite element method (FEM) such that plastic deformation of the thin nickel is avoided during the large torsion actuation. For switching speed improvement, transient vibration of the released mirror is suppressed by optimizing the mirror design and a fast switching response of $200\;{\mu}s\;(pull-down)/300\;{\mu}s\;(pull-up)$ is demonstrated.

• 한국정밀공학회지
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• 제20권5호
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• pp.218-224
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• 2003

This paper describes a novel MEMS integration technique on a CMOS chip. MEMS integration on CMOS circuit has many advantages in view of manufacturing cost and reliability. The surface topography of a CMOS chip from a commercial foundry has 0.9 ${\mu}{\textrm}{m}$ bumps due to the conformal coating on aluminum interconnect patterns, which are used for addressing each MEMS element individually. Therefore, it is necessary to achieve a flat mirror-like CMOS chip fer the microelectromechanical system (MEMS) such as micro mirror array. Such CMOS chip needs an additional thickness of the dielectric passivation layer to ease the subsequent planarization process. To overcome a temperature limit from the aluminum thermal degradation, this study uses RF sputtering of silicon nitride at low temperature and then polishes the CMOS chip together with the surrounding dummy pieces to define a polishing plane. Planarization reduces 0.9 ${\mu}{\textrm}{m}$ of the bumps to less than 25 nm.

• 전기의세계
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• 제45권9호
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• pp.37-41
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• 1996

MEMS 기술에 의해 개발되고 있는 많은 제품들 가운데 가장 잠재력 있고 큰 시장을 가진 대형 projector의 개발은 핵심 chip이 현재 DMD(Digital Micromirror Device), AMA(Actuated Mirror Array), 그리고 GLV(Grating Light Valve) 방식으로 진행되고 있으며 TI사가 개발 중인 DMD projector가 상품화에 근접해 있으며 고화질의 시제품을 SID(Society for Information Display) 국제 전시회에 출품하여 전세계 연구원들의 이목을 끌었으며 앞으로 어떻게 수율을 높이고 광학계의 단순화를 이루어 제작비를 낮추는 가가 관심의 초점이다. MEMS 연구를 하는 한 사람으로서의 사견으로도 이 제품이 성공하여야 범세계적으로 일어나고 있는 MEMS 기술이 더욱 확실한 신기술로서의 지위를 갖고 연구되리라 믿는다.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2011년도 한국우주과학회보 제20권1호
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• pp.23.1-23.1
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• 2011

The SMT is a subsystem of the UFFO (Ultra-Fast Flash Observatory) pathfinder onboard the Lomonosov spacecraft planed to be launched in November 2011. The UFFO is designed for extremely fast observation of optical afterglow of Gamma Ray Burst (GRB). This study is primarily concerned with performance measurement of the SMT optical system under the integration and test phase. SMT is a 100mm Ritchey-Chretien type telescope with a motorized slewing mirror and a $256{\times}256$ pixels Intensified Charge-Coupled Device (ICCD) of 22.2${\mu}m$ in pixel size. SMT is designed to operate over the wavelength coverage between 200 nm and 650 nm. It has 17 arcmin FOV (Field of View), providing 4arcsec in detector pixel resolution. In this study, we describe the integration and test process of the SMT optical system and interim performance measurement results with motorized slewing mirror and ICCD.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.591-592
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• 2008