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http://dx.doi.org/10.5370/JEET.2007.2.2.263

A Nickel Micro Switch Operating in a Wide Range of Torsion Angles  

Kahng, Seong-Joong (System LSI Division, Samsung Electronics Co.)
Kim, Jae-Hyeok (HMED Lab. Dept. of Electrical, Information and Control Engineering, Hongik University)
Kim, Young-Min (HMED Lab. Dept. of Electrical, Information and Control Engineering, Hongik University)
Publication Information
Journal of Electrical Engineering and Technology / v.2, no.2, 2007 , pp. 263-266 More about this Journal
Abstract
We report a nickel optical MEMS switch, being able to rotate through a large angle and to accommodate multiple channels. The proposed optical switch consists of a thin nickel mirror and two torsion springs supporting the mirror. The torsion springs are designed using a finite element method (FEM) such that plastic deformation of the thin nickel is avoided during the large torsion actuation. For switching speed improvement, transient vibration of the released mirror is suppressed by optimizing the mirror design and a fast switching response of $200\;{\mu}s\;(pull-down)/300\;{\mu}s\;(pull-up)$ is demonstrated.
Keywords
MEMS; Optical switch; Switching response; Yield strength;
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