Fabrication and characterization of fine pitch IR image sensor using a-Si
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Kim, Kyoung-Min
(MEMS&Bio Team. NNFC)
Kim, Byeong-Il (MEMS&Bio Team. NNFC) Kim, Hee-Yeoun (MEMS&Bio Team. NNFC) Jang, Won-Soo (OCAS) Kim, Tae-Hyun (OCAS) Kang, Tai-Young (OCAS) |
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