한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2005년도 춘계학술대회 논문집
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- Pages.1522-1526
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- 2005
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- 2005-8446(pISSN)
MRF 공정을 이용한 집적형 광 픽업용 대면적 실리콘 미러 제작
Fabrication of Large Area Si Mirror for Integrated Optical Pickup by using Magnetorheological Finishing
초록
In this study, the fabrication of large area silicon mirror is accomplished by anisotropic etching using MEMS for implementation of integrated optical pickup and the process condition is also established for improving the mirror surface roughness. Until now, few results have been reported about the production of highly stepped
키워드