• Journal of the Semiconductor & Display Technology
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• v.14 no.2
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• pp.1-7
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• 2015

In this paper, a new capacitive pressure sensor has been proposed for a displacement measurement. The new sensor is mainly composed of a gap of $5{\mu}m$ and a notch of $1{\mu}m$. And the sensor has the performance as the high sensitivity and capacitance compared with a commercial capacitive sensor. Therefore, the advantages of the new capacitive pressure sensor are good sensitivity in normal range, mechanically robust and large overload protection. The analytical model is induced for confirming the performance of the proposed sensor. In addition, FEM (finite elements method) simulation has been performed to verify the analytical model. Firstly, the displacement characteristics of diaphragm membrane were simulated by the analytical model and FEM in the case of different structure and materials. At last, through this analysis, these simulation results can be predicted the change of the performance when the device parameters are varied. And it is used as a design tool to achieve at a set of performance we desired.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.2
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• pp.170-177
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• 2012

A force/torque sensor using carbon fiber plate was designed and developed to make the sensor be able to measure a wide range of multi degree of force and torque. Using carbon fiber plate of 0.3 mm thickness, the sensor was designed and developed, which has a ${\mu}N$ level order of resolution and about 0.01 N ~ 390 N of wide measurement range. The elastic deformation part has a tripod plate structure and strain gauges are attached on the part to detect the force/torque. The coefficient of determination for the sensor is over 0.955 by the calibration experiment so that the linearity of the sensor is confirmed to be good. Also, experiments on applying 0.005 ~ 40 kg (0.05 ~ 390 N) to each axis were implemented and the sensor is proved to be safe under a high load. Finally, to verify the function calculating the direction of load vector, the directions of various load vectors which have the same magnitude but different directions and the directions of the calculated load vectors are compared and analyzed to accord well.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.1
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• pp.212-218
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• 2002

This research is the development of a distributed tactile sensor using PVDF film far the detection of the contact state. The prototype of the tactile sensor with 8$\times$8 taxels was fabricated using PVDF film and flexible circuitry. In the fabrication procedure, the electrode and the common electrode patterns are attached to the both side of the 28${\mu}m$ thickness PVDF film. The sensor is covered with polyester film for insulation. The signals of a contact pressure to the tactile sensor are sensed and processed in the DSP system in which the signals are digitalized and filtered. And the signals are integrated for taking the force profile. The processed signals of the output of the sensor are visualized to take the shape and force distribution of the contact object in personal computer. The usefulness of the sensor system is verified through the sensing examples.

• Journal of the Korean Society of Visualization
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• v.7 no.2
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• pp.17-21
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• 2010

This paper presents the fabrication and performance measurement of a temperature sensor array on a flexible substrate attachable to a curved surface using MEMS technology. Specifically, the fabrication uses the well-developed printed circuit board fabrication technology for complex electrode definition. The temperature sensor array are lifted off with a $10{\times}10$ matrix in a $50\;mm{\times}50\;mm$ to visualize temperature distribution. Copper is used as temperature sensing material to measure the change in resistances with temperature increase. In a thermal oven with temperature control, the temperature sensor array is Characterized. The constant slope of resistance change is obtained and temperature distribution is measured from the relationship between resistance and temperature.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.11-16
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• 2005

This paper presents fabrication process and experimental results of two different types of flexible MEMS biosensors based on polymer/metal multilayer processing techniques. One type of a biosensor is a microelectrode array (MEA) for nerve signal monitoring through implanting the MEA into a living body, and another is a tactile sensor capable of being mounted on an arbitrary-shaped surface. The microelectrode array was fabricated and its electrical characteristics have been examined through in vivo and in vitro experiment. For sensitive skin, flexible tactile sensor array was fabricated and its sensitivity has been analyzed. Mechanical flexibility of these biosensors has been achieved by using a polymer, and it is verified by implanting a MEA to an animal and mounting the tactile sensor on an arbitrary-shaped surface.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.749-754
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• 2004

Up to now, non-explosive demining system adaptable to a mobile robot has been developed. This system has much smaller platform and consists of non-explosive mechanism. Brief experiment indoors showed thai developed demining system can remove landmines well. But, out of doors, some problems are detected i.e. Inclination of overall system causes a suspension of rake rotation. In this research, a study on performance improvement of developed non-explosive demining system is mainly discussed. To compensate the inclination of the system, mechanical sensor composed of shaft and spring is used. This sensor gives a signal to a leadscrew motor and controls a rotating direction. From an experiment, it is confirmed that the mechanical sensor as stated is a good solution of the inclination of the system.

• Journal of Mechanical Science and Technology
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• v.15 no.3
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• pp.309-319
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• 2001

This paper demonstrates the development of optical temperature sensor based on the etched silica-based planar waveguide Bragg grating. Topics include design and fabrication of the etched planar waveguide Bragg grating optical temperature sensor. The typical bandwidth and reflectivity of the surface etched grating has been ∼0.2nm and ∼9%, respectively, at a wavelength of ∼1552nm. The temperature-induced wavelength change is found to be slightly non-linear over ∼200$^{\circ}C$ temperature range. Typically, the temperature-induced fractional Bragg wavelength shift measured in this experiment is 0.0132nm/$^{\circ}C$ with linear curve fit. Theoretical models with nonlinear temperature effect for the grating response based on waveguide and plate deformation theories agree with experiments to within acceptable tolerance.

• Journal of Sensor Science and Technology
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• v.14 no.3
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• pp.156-159
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• 2005

Liposomes are microscopic spherical vesicles that form when lipids are hydrated and have been widely used for biochemical assay, drug delivery and molecular imaging. In particular, they are well known for artificial cell membranes to study cellular functions such as cell fusions and membrane proteins. Here, we firstly report the detection of liposomes by the highly sensitive microfabricated piezoresistive cantilever sensor chip and the phosphatidylserine recognition protein C2A which is chemically immobilized on the sensor surface. The signal created from the bending motion of piezoresistive cantilever after the liposome attachment has been monitored in real time.

• International Journal of Precision Engineering and Manufacturing
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• v.5 no.2
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• pp.46-52
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• 2004

Numerous connectors are used in automobiles for transmission of electrical signals across various electro-mechanical components. The connectors must operate with high reliability in order to minimize failures due to signal degradation. In this work, the effects of contamination at the contact interface of connectors used fur automobile crankshaft position sensor on the impedance change were investigated. An experimental set-up was built to simulate the electrical signal transmitted from the sensor to the engine control unit through a connector. Output from the connector was investigated using connectors contaminated with engine block residues and water droplets. It was found that slight contamination of the connectors could lead to significant signal degradation which can lead to engine failure. Also, the effect of water in the connector altered the signal severely. However, the signal gradually regained the original state as the water evaporated from the interface.

• Bulletin of the Korean Chemical Society
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• v.31 no.2
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• pp.467-469
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• 2010