[KSCI] Korea Science Citation Index Service

Polymer/Metal Based Flexible MEMS Biosensors for Nerve Signal Monitoring and Sensitive Skin

Kim, Yong-Ho (School of Mechanical Engineering, Yonsei University, Republic of Korea)
Hwang, Eun-Soo (School of Mechanical Engineering, Yonsei University, Republic of Korea)
Kim, Yong-Jun (School of Mechanical Engineering, Yonsei University, Republic of Korea)

Publication Information

JSTS:Journal of Semiconductor Technology and Science / v.5, no.1, 2005 , pp. 11-16 More about this Journal

Abstract

This paper presents fabrication process and experimental results of two different types of flexible MEMS biosensors based on polymer/metal multilayer processing techniques. One type of a biosensor is a microelectrode array (MEA) for nerve signal monitoring through implanting the MEA into a living body, and another is a tactile sensor capable of being mounted on an arbitrary-shaped surface. The microelectrode array was fabricated and its electrical characteristics have been examined through in vivo and in vitro experiment. For sensitive skin, flexible tactile sensor array was fabricated and its sensitivity has been analyzed. Mechanical flexibility of these biosensors has been achieved by using a polymer, and it is verified by implanting a MEA to an animal and mounting the tactile sensor on an arbitrary-shaped surface.

Keywords

Polymer; Flexible; Biosensor; Microelectrode array; Tactile Sensor;

Citations & Related Records

Reference

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