• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.135-136
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• 2006

A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.805-806
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• 2011

• Journal of the Korean Society for Precision Engineering
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• v.24 no.8 s.197
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• pp.89-96
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• 2007

In this paper, a new air bearing stage with magnetic preload and a linear motor has been developed for the small precision machine systems. The new air bearing stage is unique in the sense that permanent magnets attached bottom of the iron core of table are used not only for preloading air bearings in vertical direction but also for generating thrust force by current of the coil at base. The characteristics of air bearings using porous pads were analyzed with numerical method, and the magnetic circuit model was derived for linear motor for calculating required preload force and thrust force. A prototype of single axis miniature stage with size of $120(W){\times}120(L){\times}50(H)\;mm^3$ was designed and fabricated and examined its performances, vertical stiffness, load capacity, thrust force and positioning resolution.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.1
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• pp.19-24
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• 2008

We propose a new miniature air-bearing stage with a moving-magnet slotless linear motor. This stage was developed to achieve the precise positioning required for submicron-level machining and miniaturization by introducing air bearings and a linear motor sufficient for mesoscale precision machine tools. The linear motor contained two permanent magnets and was designed to generate a preload force for the vertical air bearings and a thrust force for the stage movement. The characteristics of the air bearings, which used porous pads, were analyzed with numerical methods, and a magnetic circuit model was derived for the linear motor to calculate the required preload and thrust forces. A prototype of a single-axis miniature stage with dimensions of $120\;(W)\;{\times}\;120\;(L)\;{\times}\;50\;(H)\;mm$ was designed and fabricated, and its performance was examined, including its vertical stiffness, load capacity, thrust force, and positioning resolution.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.11
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• pp.1214-1220
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• 2012

Vibration assisted cutting (VAC) is one of the promising methods for precision machining, which has been normally equipped with piezoelectric materials. In this paper, a feasibility of applying magnetostrictive materials to VAC as a cutting device instead of piezoelectric materials was studied. For this, the vibrational characteristics of a magnetostrictive material was investigated with respect to a coil design, a preload, and the effects of a biasing and an exciting magnetic fields. The output strain of a magnetostrictive material is restricted due to an increasing inductive impedance as the exciting frequency increases and the heat of coil, etc. Through the experimental results, it was found that the biasing and the exciting magnetic field affected the output performance significantly but not the preload. In conclusion, the magnetostrictive material could be used only in the low frequency range but not a good candidate for high frequency actuating application.

• Computational Structural Engineering
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• v.9 no.2
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• pp.143-151
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• 1996

The optimal design for Electro-magnetic Launcher (EML : Rail Gun) considering structural and electrical constraints are presented. For the structure of EML under high pulsed currency, the cross section is minimized subject to maximum stress of each element(rail, side wall, ceramic, and steel) within allowable stress and preload limits. The electrical constraint is the effective ceramic thickness which prevents the eddy current effect reducing the performance of EML. The stress analysis and optimization procedure of 90mm EML is conducted with ANSYS Code. The optimal design under preload is reduced to 53% of area compared with optimal design without preload. In case of rail with arc angle .theta.=45.deg., the performance of EML is the best among the other rail arc angles. The optimal design for rail with arc angle .theta.=45.deg., results in the reduction of 9% of area and 10.4% of deformation compared with Fahrenthold's design. The optimal preload 59.8MPa is much lower than Fahrenthold's design(186MPa). The results show that the optimal design of EML meets the design requirements.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.155-162
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• 2004

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1321-1325
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• 2013

In this paper, we proposed an air bearing stage with active magnetic preloads in vertical directions compensating motion errors and attenuating vibrations to improve dynamic characteristics. This preloaded design gives simpler configuration of the stage, and active control of preload can be used for compensating motion errors by feedforward method. To improve dynamic characteristics, vibration of the table is monitored by an accelerometer, and controlled by a DSP based digital controller with integrator and band pass filters for suppressing roll and pitch vibration modes. The modes were evaluated by measuring frequency response functions, and compared with compensated responses. This showed effective results for suppressing poorly damped regenerative vibration of air bearings.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.109-117
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• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.