한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제30권12호
  • /
  • Pages.1321-1325
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  • 2013
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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능동 자기예압 공기베어링 스테이지의 진동감쇠 제어

Active Damping Control of an Air Bearing Stage with Magnetic Preloads

  • 노승국 (한국기계연구원 첨단생산장비연구본부) ;
  • 김수현 (한국과학기술원 기계공학과) ;
  • 곽윤근 (한국과학기술원 기계공학과) ;
  • 박천홍 (한국기계연구원 첨단생산장비연구본부)
  • Ro, Seung-Kook (Division of Advanced Manufacturing System Research, Korea Institute of Machinery and Materials) ;
  • Kim, Soohyun (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kwak, Yoonkeun (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Park, Chun Hong (Division of Advanced Manufacturing System Research, Korea Institute of Machinery and Materials)
  • 투고 : 2013.10.01
  • 심사 : 2013.11.19
  • 발행 : 2013.12.01
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초록

In this paper, we proposed an air bearing stage with active magnetic preloads in vertical directions compensating motion errors and attenuating vibrations to improve dynamic characteristics. This preloaded design gives simpler configuration of the stage, and active control of preload can be used for compensating motion errors by feedforward method. To improve dynamic characteristics, vibration of the table is monitored by an accelerometer, and controlled by a DSP based digital controller with integrator and band pass filters for suppressing roll and pitch vibration modes. The modes were evaluated by measuring frequency response functions, and compared with compensated responses. This showed effective results for suppressing poorly damped regenerative vibration of air bearings.

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참고문헌

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  3. Ro, S. -K., Kim, S., Kwak, Y., and Park, C. -H., "Measurement and Active Compensation for 3-DOF Motion Errors of an Air Bearing Stage with Magnetic Preloads," J. Korean Soc. Precis. Eng., Vol. 26, No. 2, pp. 109-117, 2009.
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