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Measurement and Active Compensation for 3-DOF Motion Errors of an Air Bearing Stage with Magnetic Preloads  

Ro, Seung-Kook (Intelligent Machine Systems Research Division, Korea Institute of Machinery and Materials)
Kim, Soo-Hyun (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
Kwak, Yoon-Keun (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
Park, Chun-Hong (Intelligent Machine Systems Research Division, Korea Institute of Machinery and Materials)
Publication Information
Journal of the Korean Society for Precision Engineering / v.26, no.2, 2009 , pp. 109-117 More about this Journal
Abstract
This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.
Keywords
Air Bearing Stage; Active Compensation of Motion Errors; Magnetic Preload; Combined Two Probe Method;
Citations & Related Records
Times Cited By KSCI : 6  (Citation Analysis)
연도 인용수 순위
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