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Development of a Miniature Air-bearing Stage with a Moving-magnet Linear Motor  

Ro, Seung-Kook (Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials)
Park, Jong-Kweon (Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.9, no.1, 2008 , pp. 19-24 More about this Journal
Abstract
We propose a new miniature air-bearing stage with a moving-magnet slotless linear motor. This stage was developed to achieve the precise positioning required for submicron-level machining and miniaturization by introducing air bearings and a linear motor sufficient for mesoscale precision machine tools. The linear motor contained two permanent magnets and was designed to generate a preload force for the vertical air bearings and a thrust force for the stage movement. The characteristics of the air bearings, which used porous pads, were analyzed with numerical methods, and a magnetic circuit model was derived for the linear motor to calculate the required preload and thrust forces. A prototype of a single-axis miniature stage with dimensions of $120\;(W)\;{\times}\;120\;(L)\;{\times}\;50\;(H)\;mm$ was designed and fabricated, and its performance was examined, including its vertical stiffness, load capacity, thrust force, and positioning resolution.
Keywords
Miniature air-bearing stage; Slotless linear motor; Magnetic preload; Micromachining tool;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
Times Cited By Web Of Science : 5  (Related Records In Web of Science)
Times Cited By SCOPUS : 7
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