International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
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Development of a Miniature Air-bearing Stage with a Moving-magnet Linear Motor

  • Ro, Seung-Kook (Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials) ;
  • Park, Jong-Kweon (Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials)
  • Published : 2008.01.01
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Abstract

We propose a new miniature air-bearing stage with a moving-magnet slotless linear motor. This stage was developed to achieve the precise positioning required for submicron-level machining and miniaturization by introducing air bearings and a linear motor sufficient for mesoscale precision machine tools. The linear motor contained two permanent magnets and was designed to generate a preload force for the vertical air bearings and a thrust force for the stage movement. The characteristics of the air bearings, which used porous pads, were analyzed with numerical methods, and a magnetic circuit model was derived for the linear motor to calculate the required preload and thrust forces. A prototype of a single-axis miniature stage with dimensions of $120\;(W)\;{\times}\;120\;(L)\;{\times}\;50\;(H)\;mm$ was designed and fabricated, and its performance was examined, including its vertical stiffness, load capacity, thrust force, and positioning resolution.

Keywords

References

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