• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 G
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• pp.2501-2503
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• 1998

In this paper, the silicon-nitride membrane structure for IR sensor was fabricated through the etching and the direct bonding. The PTO layer as a IR detection layer was deposited on the membrane and its characteristics were measured. The attack of PTO layer during the etching of silicon wafer as well as the thermal isolation of the IR detection layer can be solved through the method of bonding/etching of silicon wafer. Because the PTO layer of c-axial orientation raised thermal polarization without polling, the more integration capability can be achieved. The surface roughness of the membrane was measured by AFM, the micro voids and the non-contacted area were inspected by IR detector, and the bonding interface was observed by SEM. The polarization characteristics and the dielectric characteristics of the PTO layer were measured, too.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.471-474
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• 2000

A flat type microgas sensor was fabricated on the p-type silicon wafer with low stress S $i_3$ $N_4$, whose thickness is 2${\mu}{\textrm}{m}$ using MEMS technology and its characteristics were investigated. W $O_3$thin film as a sensing material for detection of N $O_2$gas was deposited using a tungsten target by sputtering method, followed by thermal oxidation at several temperatures (40$0^{\circ}C$~$600^{\circ}C$) for one hour. N $O_2$gas sensitivities were investigated for the W $O_3$thin films with different annealing temperatures. The highest sensitivity when operating at 20$0^{\circ}C$ was obtained for the samples annealed at $600^{\circ}C$. As the results of XRD analysis, the annealed samples had polycrystalline phase mixed with triclinic and orthorhombic structures. The sample exhibit higher sensitivity when the system has less triclinic structure. The sensitivities, $R_{gas}$ $R_{air}$ operating at 20$0^{\circ}C$ to 5 ppm N $O_2$of the sample annealed at $600^{\circ}C$ were approximately 90. 90.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.528-531
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• 2000

Deposition of PZT with UV laser ablatio was applied for realization of thin film sensors and actuators. Deposition rate of more than 20nm/min was attained by pulsed KrF excimer laser deposition, which is fairly better than those obtained by the other methods. Perovskite phase was obtained at room temperature deposition with Fast Atom Beam(FAB) treatment and annealing. Smart MEMS(Micro electro-mechanical system) is now a suject of interest in the field of micro optical devices, micro pumps, AFM cantilever devices etc. It can be fabricated by deposition of PZT thin films and micromachining. PZT films of more than 1 micron thickness is difficult to obtain by conventional methods. This is the reason why we applied excimer laser ablation for thin film deposition. The remanent polarization Pr of 700nm PZT thin film was measured, and the relative dielectric constant was determined to about 900 and the dielectric loss tangent was also measured to be about 0.04. XRD analysis shows that, after annealing at 650 degrees C in 1 hour, the perovskite structure would be formed with some amount of pyrochlore phase, as is the case of the annealing at 750 degrees C in 1 hour.

• 대한금속재료학회지
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• 제49권5호
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• pp.395-399
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• 2011

In this study, micro gas sensors for ammonia gas were prepared by adopting MEMS technology and using a sol-gel process. Three types of sensors were prepared via different synthesis routes starting with W sol and Ru sol mixture. This mixture was deposited on a MEMS platform and the platform was subsegueny heated to a temperature of $350^{\circ}C$. The topography and crystal structure of the sensing film were studied using FE-SEM and XRD. The response of the gas sensor to $NH_3$ gas was examined at various operating temperatures and gas concentrations. The sensor response increased almost linearly with gas concentration and the best sensing response was obtained at $333^{\circ}C$ for 5.0 ppm $NH_3$ for the specimen prepared by coating $WO_3$ powders with the Ru sol mixture.

• 전자공학회논문지
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• 제51권6호
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• pp.78-86
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• 2014

본 논문에서는 질량-스프링 구조를 이용한 새로운 광세기 기반 광섬유 진동센서를 제안하고 시뮬레이션과 부분 실험을 통하여 그 실현 가능성을 제시한다. 제안한 광세기 기반 광섬유 진동센서는 네 개의 구불구불하게 휘어지는 스프링과 질량체 안의 사각형 개구면(aperture)으로 구성된 질량-스프링 구조를 가진다. 광시준기(optical collimator)는 질량체 안의 사각형 개구면의 변위에 의해서 변조되는 광을 넓히는 데 이용된다. 제안한 광섬유 진동센서를 광학적인 면과 기계적인 면에서 해석하고 설계한다. 기계적인 부분의 설계는 이론적인 해석, 수학적인 모델링 및 3 차원 유한요소법 시뮬레이션을 이용한다. 기계적인 진동이 가해질 때 개구면의 상대적인 변위관계를 3차원 유한요소법 시뮬레이션을 이용하여 구하고, 개구면의 상대적인 변위에 따른 출력값을 실험을 통하여 측정한다. 이를 이용하여 진동에 따른 출력 특성을 파악한 결과 센서 민감도 $15.731{\mu}W/G$, 감지영역 ${\pm}6.087G$를 얻었다. 그리고 입력광원의 파워가 10 dB까지 변하더라도 참조광을 이용하여 0.75%의 상대오차를 보이는 매우 안정된 출력광 파워를 얻었다. 제안한 광섬유 진동센서는 간단한 구조, 저비용 및 다지점 측정 가능의 특징을 가지면서, MEMS (Micro-Electro-Mechanical System) 기술을 이용하여 소형으로 간편하게 제작할 수 있는 잠재력을 가진다.

• 한국지반환경공학회 논문집
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• 제14권8호
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• pp.45-51
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• 2013

분진, 소음, 진동 등 열악한 환경을 가진 지하구조물 건설현장에서는 작업자의 위치추적 및 원활한 감독자의 작업 전달과 함께 위험사고 발생 시 신속한 건설현장의 작업자 구출 등을 위한 기술개발이 절실히 요구되고 있다. 본 연구에서는 MEMS INS와 기압센서를 이용하여 지하공간 작업자들의 위치정보를 확보하기 위해 건설현장 테스트를 실시하였고, 검출된 결과를 바탕으로 위치 및 표고에 대한 정확도 분석을 수행하여 그 활용성에 대한 검증을 하였다. 연구수행결과 4km 구간에 대하여 작업자의 수평위치정확도는 10m 이내로 발생하였으며, 수직위치정확도의 경우 4m 이내로 층간 구분이 가능한 수준까지 위치정확도를 확보할 수 있어 지하구조물 건설현장에서의 활용성이 충분한 것으로 분석되었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.131-131
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• 2003

Surface micromachined uncooled IR detector with the optimized VOx bolometric layer was fabricated based on sandwich structure of the V$_2$O$_{5}$V/V$_2$O$_{5}$. In order to improve the detectivity of the IR detector, we optimized a few factors in the viewpoint of bolometric material. Vanadium oxide thin film is a promising material for uncooled microbolometers due to its high temperature coefficient of resistance at room temperature. It is, however, very difficult to deposit vanadium oxide thin films having high temperature coefficient of resistance and low resistance because of process limits in microbolometer fabrication. In order to increase the responsivity and decrease noise, we increase TCR of bolometric material and decrease room temperature resistance based on the sandwich structure of the V$_2$O$_{5}$V/V$_2$O$_{5}$ by conventional sputter. By oxygen diffusion through low temperature annealing of V$_2$O$_{5}$V/V$_2$O$_{5}$ in oxygen ambient, various mixed phase vanadium oxide was formed and we obtained TCR in range of-1.2 ~-2.6%/$^{\circ}C$ at room temperature resistance of 5~100k$\Omega$.mega$.

• 센서학회지
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• 제26권4호
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• pp.235-238
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• 2017

In this study, the design of a tri-axis micromachined gyroscope is proposed and the vibration characteristic of the structure is analyzed. Tri-axis vibratory gyroscopes that utilize Coriolis effect are the most commonly used micromachined inertial sensors because of their advantages, such as low cost, small packaging size, and low power consumption. The proposed design is a single structure with four proof masses, which are coupled to their adjacent ones. The coupling springs of the proof masses orthogonally transfer the driving vibrational motion. The resonant frequencies of the gyroscope are analyzed by finite element method (FEM) simulation. The suspension beam spring design of proof masses limits the resonance frequencies of four modes, viz., drive mode, pitch, roll and yaw sensing mode in the range of 110 Hz near 21 kHz, 21173 Hz, 21239 Hz, 21244 Hz, and 21280 Hz, respectively. The unwanted modes are separated from the drive and sense modes by more than 700 Hz. Thereafter the drive and the sense mode vibrations are calculated and simulated to confirm the driving feasibility and estimate the sensitivity of the gyroscope. The cross-axis sensitivities caused by driving motion are 1.5 deg/s for both x- and y-axis, and 0.2 deg/s for z-axis.

• 한국구조물진단유지관리공학회 논문집
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• 제11권2호
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• pp.134-144
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• 2007

본 연구에서는 구조물의 모니터링 시스템을 위하여 최근에 급속하게 발전하는 스마트 센서 기술을 이용하여 스마트 센서 장치를 개발하였고 다양한 실험을 통하여 개발한 스마트 센서의 기본적 성능 평가와 모형 구조물을 이용한 손상 검출 실험을 실시하였다. 본 논문은 Part 1로써 스마트 센서의 개발과 성능 평가에 관한 것이고 Part 2에서는 스마트 센서를 이용한 손상 검출 결과를 유선 계측 시스템을 이용한 실험결과와 비교하였다. 스마트 센서는 고 출력의 무선 모뎀과 고 성능 MEMS 센서, AVR 마이크로컨트롤러를 이용하여 개발하였으며 센서의 제어와 운영을 위한 임베디드 프로그램을 개발하였다. 스마트 센서의 성능을 검증하기 위하여 민감도와 분해능 분석 실험과 캔틸레버 보와 가진기를 이용한 데이터 획득 실험, 실 구조물을 이용한 현장 적용 실험을 실시하였다. 실험 결과, 개발한 스마트 센서의 성능에 대한 만족스런 결과를 얻었다.

• 한국소음진동공학회논문집
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• 제24권5호
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• pp.381-389
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• 2014

This study is concerned with the estimation of vibration-field of a cylindrical structure by modal expansion method(MEM). MEM is a technique that identifies modal participation factors using some of vibration signals and natural modes of the structure: The selection of sensor locations has a big influence on predicted vibration results. Therefore, this paper deals with four optimal sensor placement( OSP) methods, EFI, EFI-DPR, EVP, AutoMAC, for the estimation of vibration field. It also finds optimal sensor locations of the cylindrical structure by each OSP method and then performs MEMs. Predicted vibration results compared with reference ones obtained by forced response analysis. The standard deviations of errors between reference and predicted results were also calculated. It is utilized to select the most suitable OSP method for estimation of vibration field of the cylindrical structure.