Browse > Article
http://dx.doi.org/10.3365/KJMM.2011.49.5.395

Gas Sensing Characteristics of Ru doped-WO3 Micro Gas Sensors  

Lee, Hoi Jung (Department of Materials Science and Engineering, The University of Seoul)
Yoon, Jin Ho (Department of Materials Science and Engineering, The University of Seoul)
Kim, Bum Joon (Department of Materials Science and Engineering, The University of Seoul)
Jang, Hyun Duck (Industrial Engineering, Ajuo University)
Kim, Jung Sik (Department of Materials Science and Engineering, The University of Seoul)
Publication Information
Korean Journal of Metals and Materials / v.49, no.5, 2011 , pp. 395-399 More about this Journal
Abstract
In this study, micro gas sensors for ammonia gas were prepared by adopting MEMS technology and using a sol-gel process. Three types of sensors were prepared via different synthesis routes starting with W sol and Ru sol mixture. This mixture was deposited on a MEMS platform and the platform was subsegueny heated to a temperature of $350^{\circ}C$. The topography and crystal structure of the sensing film were studied using FE-SEM and XRD. The response of the gas sensor to $NH_3$ gas was examined at various operating temperatures and gas concentrations. The sensor response increased almost linearly with gas concentration and the best sensing response was obtained at $333^{\circ}C$ for 5.0 ppm $NH_3$ for the specimen prepared by coating $WO_3$ powders with the Ru sol mixture.
Keywords
compounds; sol-gel; electrical properties; resistivity; gas sensor; tungsten oxide; ruthenium; $NH_3$;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 0
연도 인용수 순위
1 Y. H. Kim, Gijeon 5 (1993).
2 J. G. Irwin and Williams, Environ. Pollut 50, 29 (1998).
3 P. J. Adams, J. Geo-phys. res. Atmos 106, 1097 (2001).   DOI
4 T. Maekawa, J. Tamaki, N. Miura, and N. Yamazoe, Chem. lett. 639 (1992).
5 G. Heiland and D. Kohl, Chem. Sen. Tech. 1, 15 (1988).
6 C. S. Kim, R. J. Lad, and C. P. Tripp, Sens. Actuators B, 76, 442 (2001).   DOI   ScienceOn
7 S. W. Oh, Y. H. Kim, D. J. Yoo, S. M. Oh, and S. J. Park, Sens. Actuators B 13, 400 (1993).   DOI   ScienceOn
8 P. J. Shaver, Appl. Phys. Lett. 11, 255 (1967).   DOI
9 J. H. Yoon and J. S. Kim, Met. Mater. Int. 16, 773 (2010)   DOI   ScienceOn
10 T. Seiyama, Anal Chem 34, 1502 (1962).   DOI
11 M. S. Wagh, G. H. Jain, D. R. Patil, S. A. Patil, and L. A. Patil, Sens. Actuators B 115, 128 (2006).   DOI   ScienceOn
12 M. J. Madou and S. R. Morrison, Adam Hilger, Bristol 6, 124 (1989).
13 N. Barsan, D. Koziej, and U. Weimar, Sens. Actuators B 121, 18 (2007).   DOI   ScienceOn
14 H. K. Hong, B. H. Kim, Y. I. Cheon, and Y. K. Sung, J. IEEK 13, 372 (1990).
15 S. G. Lee, S. D. Choi, and K. H. Kim, KIEEME 3, 224 (1990).