Korean Journal of Metals and Materials (대한금속재료학회지)

The Korean Institute of Metals and Materials (대한금속재료학회)
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Gas Sensing Characteristics of Ru doped-WO3 Micro Gas Sensors

루테늄이 첨가된 텅스텐 산화물을 이용한 마이크로 가스 센서의 암모니아 가스 감지 특성

  • Lee, Hoi Jung (Department of Materials Science and Engineering, The University of Seoul) ;
  • Yoon, Jin Ho (Department of Materials Science and Engineering, The University of Seoul) ;
  • Kim, Bum Joon (Department of Materials Science and Engineering, The University of Seoul) ;
  • Jang, Hyun Duck (Industrial Engineering, Ajuo University) ;
  • Kim, Jung Sik (Department of Materials Science and Engineering, The University of Seoul)
  • 이회중 (서울시립대학교 신소재공학과) ;
  • 윤진호 (서울시립대학교 신소재공학과) ;
  • 김범준 (서울시립대학교 신소재공학과) ;
  • 장현덕 (아주대학교 산업공학과) ;
  • 김정식 (서울시립대학교 신소재공학과)
  • Received : 2010.12.22
  • Published : 2011.05.25
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Abstract

In this study, micro gas sensors for ammonia gas were prepared by adopting MEMS technology and using a sol-gel process. Three types of sensors were prepared via different synthesis routes starting with W sol and Ru sol mixture. This mixture was deposited on a MEMS platform and the platform was subsegueny heated to a temperature of $350^{\circ}C$. The topography and crystal structure of the sensing film were studied using FE-SEM and XRD. The response of the gas sensor to $NH_3$ gas was examined at various operating temperatures and gas concentrations. The sensor response increased almost linearly with gas concentration and the best sensing response was obtained at $333^{\circ}C$ for 5.0 ppm $NH_3$ for the specimen prepared by coating $WO_3$ powders with the Ru sol mixture.

Keywords

Acknowledgement

Supported by : 지식경제부

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