Design and Vibration Analysis of Tri-axis Linear Vibratory MEMS Gyroscope |
Seok, Seyeong
(Department of Mechanical Engineering, Pohang University of Science and Technology)
Moon, Sanghee (Standing Egg Inc.) Kim, Kanghyun (Department of Mechanical Engineering, Pohang University of Science and Technology) Kim, Suhyeon (Department of Mechanical Engineering, Pohang University of Science and Technology) Yang, Seongjin (Department of Mechanical Engineering, Pohang University of Science and Technology) Lim, Geunbae (Department of Mechanical Engineering, Pohang University of Science and Technology) |
1 | N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined inertial sensors," Proc. IEEE, Vol. 86, No. 8, pp. 1640-1659, Aug. 1998. DOI |
2 | K. Liu et al., "The development of micro-gyroscope technology," J. Micromech. Microeng., Vol. 19, No. 11, p. 113001, 2009. DOI |
3 | D. Xia, C. Yu, and L. Kong, "The development of micromachined gyroscope structure and circuitry technology," Sensors, Vol. 14, No. 1, pp. 1394-1473, Jan. 2014. DOI |
4 | J. Sung et al., "A gyroscope fabrication method for high sensitivity and robustness to fabrication tolerances," J. Micromech. Microeng., Vol. 24, No. 7, p. 075013, 2014. DOI |
5 | D. Xia, L. Kong, and H. Gao, "Design and analysis of a novel fully decoupled tri-axis linear vibratory gyroscope with matched modes," Sensors, Vol. 15, No. 7, pp. 16929- 16955, Jul. 2015. DOI |
6 | S. Sonmezoglu et al., "Single-Structure Micromachined Three-Axis Gyroscope with Reduced Drive-Force Coupling," IEEE Electron Device Lett., Vol. 36, No. 9, pp. 953- 956, Sep. 2015. DOI |
7 | S. Wisher et al., "A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope," in 2016 IEEE 29th Int. Conf. on Micro Electro Mech. Syst. (MEMS), 2016, pp. 930-933. |
8 | M. A. Shah, F. Iqbal, I. A. Shah, and B. Lee, "Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope," J. Sensors, 2016. [Online]. Available: https://www.hindawi.com/journals/js/2016/4615389/. [Accessed: 06-Jul-2017]. |
9 | D. Xia, L. Kong, and H. Gao, "A Mode Matched Triaxial Vibratory Wheel Gyroscope with Fully Decoupled Structure," Sensors, Vol. 15, No. 11, pp. 28979-29002, Nov. 2015. DOI |
10 | N. C. Tsai and C. Y. Sue, "Design and Analysis of a Tri- Axis Gyroscope Micromachined by Surface Fabrication," IEEE Sensors. J., vol. 8, no. 12, pp. 1933-1940, Dec. 2008. DOI |
![]() |