Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2003.03a
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- Pages.131-131
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- 2003
$V_2O_5/V/V_2O_5$ based uncooled infrared detector by MEMS technology
$V_2O_5/V/V_2O_5$ 다층박막 및 MEMS기술을 이용한 비냉각형 적외선 감지 소자의 제작
- Han, Yong-Hee (Department of Material Science and Engineering, Korea University) ;
- Hur, Jae-Sung (Department of Material Science and Engineering, Korea University) ;
- Park, In-Hoon (Department of Material Science and Engineering, Korea University) ;
- Kim, Kun-Tae (Microsystem Research Center, Korea Institute of Science and Technology) ;
- Chi-Anh (Microsystem Research Center, Korea Institute of Science and Technology) ;
- Shin, Hyun-Joon (Microsystem Research Center, Korea Institute of Science and Technology) ;
- Sung Moon (Microsystem Research Center, Korea Institute of Science and Technology)
- Published : 2003.05.01
Abstract
Surface micromachined uncooled IR detector with the optimized VOx bolometric layer was fabricated based on sandwich structure of the V
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