• Title/Summary/Keyword: MEMS Pressure Sensor

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Development of Digital Vacuum Pressure Sensor Using MEMS Analog Pirani Gauge

  • Cho, Young Seek
    • Journal of information and communication convergence engineering
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    • v.15 no.4
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    • pp.232-236
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    • 2017
  • A digital vacuum pressure sensor is designed, fabricated, and characterized using a packaged MEMS analog Pirani gauge. The packaged MEMS analog Pirani gauge requires a current source to heat up a heater in the Pirani gauge. To investigate the feasibility of digitization for the analog Pirani gauge, its implementation is performed with a zero-temperature coefficient current source and microcontroller that are commercially available. The measurement results using the digital vacuum pressure sensor showed that its operating range is 0.05-760 Torr, which is the same as the measurement results of the packaged MEMS analog pressure sensor. The results confirm that it is feasible to integrate the analog Pirani gauge with a commercially available current source and microcontroller. The successful hybrid integration of the analog Pirani gauge and digital circuits is an encouraging result for monolithic integration with a precision current source and ADCs in the state of CMOS dies.

Demonstration of Alternative Fabrication Techniques for Robust MEMS Device

  • Chang, Sung-Pil;Park, Je-Young;Cha, Doo-Yeol;Lee, Heung-Shik
    • Transactions on Electrical and Electronic Materials
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    • v.7 no.4
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    • pp.184-188
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    • 2006
  • This work describes efforts in the fabrication and testing of robust microelectromechanical systems (MEMS). Robustness is typically achieved by investigating non-silicon substrates and materials for MEMS fabrication. Some of the traditional MEMS fabrication techniques are applicable to robust MEMS, while other techniques are drawn from other technology areas, such as electronic packaging. The fabrication technologies appropriate for robust MEMS are illustrated through laminated polymer membrane based pressure sensor arrays. Each array uses a stainless steel substrate, a laminated polymer film as a suspended movable plate, and a fixed, surface micromachined back electrode of electroplated nickel. Over an applied pressure range from 0 to 34 kPa, the net capacitance change was approximately 0.14 pF. An important attribute of this design is that only the steel substrate and the pressure sensor inlet is exposed to the flow; i.e., the sensor is self-packaged.

An Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology

  • Won Jong-Hwa;Choa Sung-Hoon;Yulong Zhao
    • Journal of Mechanical Science and Technology
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    • v.20 no.4
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    • pp.505-512
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    • 2006
  • This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

Fabrication of Single Capacitive type Differential pressure sensor for Differential Flow meter (차압식 유량계를 실장을 위한 Single Capacitive Type Differential 압력 센서 개발)

  • Shin, Kyu-Sik;Song, Sangwoo;Lee, Kyungil;Lee, Daesung;Jung, Jae Pil
    • Journal of the Microelectronics and Packaging Society
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    • v.24 no.1
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    • pp.51-56
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    • 2017
  • In this paper, we have developed a differential pressure flow sensor designed as a single capacitive type. And the sensor was fabricated using a MEMS process. Differential pressure flow sensors are the most commonly used sensors for industrial applications. The sensing diaphragm and bonding joint of the MEMS pressure sensor are easily broken at high pressure. In this paper, we proposed a structure in which the diaphragm of the sensor was not broken at a pressure exceeding the proof pressure, and the differential pressure sensor was designed and manufactured accordingly. The operating characteristics of the sensor were evaluated at a pressure three times higher than the sensor operating pressure (0-3 bar). The developed sensor was $3.0{\times}3.0mm$ and measured with a LCR meter (HP 4284a) at a pressure between 0 and 3 bar. It showed 3.67 pF at 0 bar and 5.13 pF at 3 bar. The sensor operating pressure (0-3 bar) developed a pressure sensor with hysteresis of 0.37%.

The development of a variable capacitive pressure sensor for TPMS(tire pressure monitoring system) (TPMS 적용을 위한 가변 정전 용량형 압력센서 개발)

  • Choi, Bum-Koo;Kim, Do-Hyung;Oh, Jae-Geun
    • Journal of Sensor Science and Technology
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    • v.14 no.4
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    • pp.265-271
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    • 2005
  • In this study, a variable capacitive pressure sensor is fabricated for TPMS (Tire Pressure Monitoring System). This study is for developing sensors which consecutively measure the tire pressure given as 30 psi from the industrial standard. For improving non-linearity of the prior capacitive pressure sensors, it is suggested that touch mode capacitive pressure sensor be applied. In addition, initial capacitance is designed as small as possible for the conformity to the wireless sensor. ANSYS, commercial FEA package, is used for designing and simulating the sensor. The device is progressed by MEMS (Micro Electro Mechanical Systems) fabrication and packaged with PDMS. The result is obtained sensitivity, 1 pF/psi, through a pressure test. The simulation result is discrepant from experiment one. Wafer's uniformity is presumed as the main reason of discrepancy.

Multi-functional (Temperature, Pressure, Humidity) Sensor by MEMS technology (MEMS 기술을 이용한 온도, 압력, 습도 복합 센서)

  • Kwon Sang-wook;Won Jong-Hwa
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.42 no.11
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    • pp.1-8
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    • 2005
  • In this paper, we present design and prototyping of a low-cost, integrated multi-functional micro health sensor chip that can be used or embedded in widely consumer devices, such as cell phone and PDA, for monitoring environmental condition including air pressure, temperature and humidity. This research's scope includes basic individual sensor study, architecture for integrating sensors on a chip, fabrication process compatibility and test/evaluation of prototype sensors. The results show that the integrated TPH sensor has good characteristics of ${\pm}\;1\%FS$ of linearity and hysteresis for pressure sensor and temperature sensor and of ${\pm}\;5\%FS$ of linearity and hysteresis But if we use 3rd order approximation for humidity sensor, full scale error becomes much smaller and this will be one of our future study.

The Electric Control Method on the Packaging Technology for Non-Conductive Materials Using the Surface Processing Cavity Pressure Sensor (표면 가공형 캐비티 압력센서를 이용하여 비전도성 물질용 패키지 기술에 전기적 제어방식 연구)

  • Lee, Sun-Jong;Woo, Jong-Chang
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.5
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    • pp.350-354
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    • 2020
  • In this study, a pressure sensor for each displacement was fabricated based on the silicon-based pressure sensor obtained through simulation results. Wires were bonded to the pressure sensor, and a piezoresistive pressure sensor was inserted into the printed circuit board (PCB) base by directly connecting a micro-electro-mechanical system (MEMS) sensor and a readout integrated circuit (ROIC) for signal processing. In addition, to prevent exposure, a non-conductive liquid silicone was injected into the sensor and the entire ROIC using a pipette. The packaging proceeded to block from the outside. Performing such packaging, comparing simple contact with strong contact, and confirming that the measured pulse wavelength appears accurately.

Design of a Wireless Intraocular Pressure Sensor Based on MEMS Technology (안압의 비접촉 검출을 위한 MEMS 기반의 센서 설계)

  • Kang, Buung-Joo;Park, Jong-Hoon;Lee, So-Hyun;Kang, Ji-Yoon;Park, Chang-Kun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.15 no.4
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    • pp.905-912
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    • 2011
  • Interaocular pressure (IOP) sensor and external coil to detect the resonance frequency of the IOP sensor are designed and implemented using MEMS technology. The IOP sensor is designed using 3-D electromagnetic (EM) simulation. The resonance frequency of IOP sensor needs to be lower than that of the external coil. Additionally, the resonance frequency of the IOP sensor needs to be located near the resonance frequency of the coil to get the sufficient amplitude of phase variation. The frequency where the phase peak appears must be constant according to the distance between the IOP sensor and the external coil. From the measurement results, we demonstrated that the designed IOP sensor has the same resonance frequency with various distances between the IOP sensor and the coil.

Development and Validations of Air Data System using MEMS Sensor for High-Performance UAV (MEMS 압력센서를 이용한 고성능 무인항공기용 공력자료시스템의 개발과 검증)

  • Baek, Un-Ryul;Kim, Sung-Su;Kim, Sung-Hwan;Park, Choon-Bae;Choi, Kee-Young
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.36 no.10
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    • pp.1017-1025
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    • 2008
  • The air data system(ADS) was developed for unmanned aerial vehicle(UAV) in this paper. Generally, the ADS helps flight control computer(FCC) to control the UAV above the stall speed and to hold the given altitude. The accurate measurement of airspeed and altitude of UAV is important because it indicates a flight performance and assures a safe flight. The ADS consists of MEMS pressure sensors, a lowpass filter, a micro controller unit and a pitot-tube. The ADS errors were reduced by pressure and temperature compensation of MEMS sensors. Finally, the altitude and airspeed data of the ADS was compared with GPS data in the flight test.