1 |
Lei Gu, et al., 'novel capacitive-type humidity sensor using CMOS fabrication technology', Sensors and Actuators B: Chemical., vol. 99(2-3), pp. 491-498, May 1, 2004
DOI
ScienceOn
|
2 |
Matsuguchi, M, Umeda, S., Sadaoka, Y, Sakai, Y., 'Characterization of polymers for a capacitive-type humidity sensor based on water sorption behavior', Sensors and Actuators b: Chemical, vol. 49 (3), pp. 179-185, July 1, 1998
DOI
ScienceOn
|
3 |
Harrey, P.M., 'Capacitive-type humidity sensors fabricated using the offset lithographic printing process', Sensors and Actuators B: Chemical, vol. 87 (2), pp. 226-232, December 10, 2002
DOI
ScienceOn
|
4 |
'RH calibration with saturated salts' http://www.natmus.dk/
|
5 |
'Relative humidity sensor', Center for microcomputer applications, 2003. (http://www.cma.science.uva.nl/engilsh/download/pdf/manuals/d025i.pdf)
|
6 |
Gregory T. A. Kovacs, 'Micromachined transducers source book', Boston Kluwer Academic Publishers, 2001
|
7 |
Kanda, Y., Yasukawa, A., 'Optimum design considerations for silicon piezoresistive pressure sensors', Sensors and Actuator A:Physical., vol. 62 (1-3), pp.539-542, July, 1997
DOI
ScienceOn
|
8 |
Y. Ohmura, 'Piezoresistance effect in p-type Si', Phys. Rev. B., vol. 42, pp9178-9181, 1990
DOI
ScienceOn
|
9 |
P. T. Lai, et. al., 'Spreading-resistance temperature sensor on Silicon-On-Insulator', Electron Device Letters, IEEE, vol. 20(11), pp.23-30, 1995
DOI
ScienceOn
|