• Journal of Sensor Science and Technology
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• v.20 no.1
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• pp.58-63
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• 2011

A low loss radio frequency(RF) micro electro mechanical systems(MEMS) switch driven by a low actuation voltage was designed for the development of a new RF MEMS switch. The RF MEMS switch should be encapsulated. The glass cap and fabricated RF MEMS switch were assembled by the Au/Sn eutectic bonding principle for wafer-level packaging. The through-vias on the glass substrate was made by the glass dry etching and Au electroplating process. The packaged RF MEMS switch had an actuation voltage of 12.5 V, an insertion loss below 0.25 dB, a return loss above 16.6 dB, and an isolation value above 41.4 dB at 6 GHz.

• 전자공학회논문지 IE
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• v.44 no.1
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• pp.6-9
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• 2007

Twenty four types of thermopile for micro spectrometer infrared sensors were fabricated on low-stress Si3N4 membranes with $l.2{\mu}m-thickness$ using MEMS technology. Thermopile were designed and fabricated for optimum conditions by five parameters of thermocouple numbers $(16\sim48)$, thermocouple line widths $(10{\mu}m-25{\mu}m)$, thermocouple lengths $(100{\mu}m-500{\mu}m)$, membrane areas $(12mm2\sim2.52mm2)$ and junction areas $(150{\mu}m2\sim750{\mu}m2)$, respectively. It was thought that measurement results could be used for thermopile infrared sensors optimum structure for micro spectrometers.

• Journal of Sensor Science and Technology
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• v.26 no.2
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• pp.91-95
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• 2017

Recently, infrared (IR) spectrometers have been required in various fields such as environment, safety, mobile, automotive, and military. This IR dispersive sensor detection method of substances is widely used. In this study, we fabricated a silicon (Si) prism-based near infrared (NIR) spectrometer utilizing micro electro mechanical system (MEMS) technology. Si prism-based NIR spectrometer utilizing MEMS technology consists of upper, middle, and lower substrates. The upper substrate passes through the incident IR ray selectively. The middle substrate, acting as a prism, disperses and separates the incident IR beam. The lower substrate has an amorphous Si (a-Si)-based bolometer array to detect the IR spectrum. The fabricated Si prism-based NIR spectrometer utilizing MEMS technology has the advantage of a simple structure, easy fabrication steps, and a wide NIR region operating range.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.9
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• pp.976-981
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• 2009

MEMS capacitive gap sensor is developed for measuring abrasion depth of gun barrel rifling. Measuring abrasion depth of gun barrel rifling is very important because it is related with exactness of firing and life of arms. The method using a gap sensor is not to hurt rifling. And it can measure abrasion depth through minimum shooting, because the developed gap sensor can measure from $1{\mu}m{\sim}12{\mu}m$ using Polydimethylsiloxane(PDMS) material and making a stretchable electrode on PDMS. And it's resolution is 1 ${\mu}m$ using capacitive method and MEMS technology.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2011.11a
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• pp.191-192
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• 2011

MEMS 기반 관성 센서를 이용한 항법장치를 개발하는 경우, 칼만 필터(Kalman Filter, KF) 구축 여부에 따라 그 성능이 결정된다. 특히 해상에서 이러한 MEMS 기반 관성항법 장치를 사용하는 경우에는, 육상과 달리 다양한 제약조건이 따르게 된다. KF는 선형과 비선형으로 구분되고, 비선형은 다시 확장 KF와 Unscented KF, Particle KF 등 다양한 것이 연구 개발되어 있는데, 해상에 적용하기 위해서는 이러한 다양한 필터들의 특징과 추가 요청사항 등을 사전 조사할 필요가 있다. 본 연구에서는 기존 개발된 KF를 조사하여 해상용 MEMS 기반 관성 항법장치를 개발하는 경우 필요한 필터 구성 방법을 조사하여 문제점을 살펴보고, 이 문제 해결을 위한 방안을 검토하였다.

• Journal of Sensor Science and Technology
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• v.24 no.4
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• pp.274-279
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• 2015

This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.

• Journal of Sensor Science and Technology
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• v.24 no.5
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• pp.287-290
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• 2015

Liquid crystal polymer (LCP) is a thermoplastic polymer with superior mechanical and thermal properties. In addition, its characteristics include very low water absorption rate and possibility to apply bonding process under low temperature. In this study, LCP is utilized as a packaging material for a microelectronic system (MEMS) based safety device with suggestion of a low temperature packaging process. Highly sensitive and stable capacitive type humidity sensor is fabricated to investigate hermeticity of the packaged MEMS device.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.34 no.8
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• pp.63-70
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• 2006

Due to the small size and weight of micro aerial vehicle (MAV), only miniaturized MEMS type sensors are applicable for MAV autonomous flight system. In this paper, we propose a accelerometer and gyro mixing algorithm to improve an attitude performance of MEMS type sensors. The performance of the proposed mixing algorithm is compared with the performance of fuzzy-based mixing algorithm through simulation. The simulation results show that the attitude compensation method through the attitude compensation has better performance than the fuzzy-based mixing method for MAV attitude estimation.

• Journal of Sensor Science and Technology
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• v.18 no.5
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• pp.359-364
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• 2009

This paper presents flexible electrocardiography(ECG) sensors using micro electro mechanical systems(MEMS) and flexible printed circuit(FPC) technology. By using FPC technology, ECG sensors which consisted of an outer hook-shaped electrode and an inner circular-shaped electrode were fabricated on the polyimide substrate. Thereafter, the bipolar ECG sensor was miniaturized using MEMS technology. The ECG measurement capability was examined by attaching the sensor to the human chest and wrist. Performance of the proposed sensors was then compared with ECG measured by commercial Ag/AgCl electrodes. It was verified that ECG could be measured using proposed sensors at only single body.

• Tunnel and Underground Space
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• v.28 no.6
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• pp.547-554
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• 2018

Using crowdsourced sensor data collection technique, it is possible to collect high-density ground vibration data which is difficult to obtain by conventional methods. In this study, we have developed a crowdsourced ground vibration data collection system using MEMS sensors mounted on small electronic devices including smartphones, and implemented client and server based on the proposed infrastructure system design. The system is designed to gather vibration data quickly through Android-based smartphones or fixed devices based on Android Things, minimizing the usage of resource like power usage and data transmission traffic of the hardware.