Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Investigation on Hermeticity of Liquid Crystal Polymer Package for MEMS Based Safety Device

MEMS 기반 안전 소자에 대한 액정 폴리머 패키지의 밀폐도 연구

  • Choi, Jinnil (Dept. of Mechanical Engineering, Hanbat National University) ;
  • Kim, Yong-Kook (Display and Nanosystem Laboratory, College of Engineering, Korea University) ;
  • Ju, Byeong-Kwon (Display and Nanosystem Laboratory, College of Engineering, Korea University)
  • 최진일 (국립한밭대학교 기계공학과) ;
  • 김용국 (고려대학교 전기전자공학부 디스플레이 및 나노시스템 연구실) ;
  • 주병권 (고려대학교 전기전자공학부 디스플레이 및 나노시스템 연구실)
  • Received : 2015.07.29
  • Accepted : 2015.09.21
  • Published : 2015.09.30
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Abstract

Liquid crystal polymer (LCP) is a thermoplastic polymer with superior mechanical and thermal properties. In addition, its characteristics include very low water absorption rate and possibility to apply bonding process under low temperature. In this study, LCP is utilized as a packaging material for a microelectronic system (MEMS) based safety device with suggestion of a low temperature packaging process. Highly sensitive and stable capacitive type humidity sensor is fabricated to investigate hermeticity of the packaged MEMS device.

Keywords

References

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