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http://dx.doi.org/10.5369/JSST.2015.24.5.287

Investigation on Hermeticity of Liquid Crystal Polymer Package for MEMS Based Safety Device  

Choi, Jinnil (Dept. of Mechanical Engineering, Hanbat National University)
Kim, Yong-Kook (Display and Nanosystem Laboratory, College of Engineering, Korea University)
Ju, Byeong-Kwon (Display and Nanosystem Laboratory, College of Engineering, Korea University)
Publication Information
Journal of Sensor Science and Technology / v.24, no.5, 2015 , pp. 287-290 More about this Journal
Abstract
Liquid crystal polymer (LCP) is a thermoplastic polymer with superior mechanical and thermal properties. In addition, its characteristics include very low water absorption rate and possibility to apply bonding process under low temperature. In this study, LCP is utilized as a packaging material for a microelectronic system (MEMS) based safety device with suggestion of a low temperature packaging process. Highly sensitive and stable capacitive type humidity sensor is fabricated to investigate hermeticity of the packaged MEMS device.
Keywords
LCP; MEMS; Capacitive type humidity sensor; Hermeticity;
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