• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.625-626
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• 2013

• Information and Communications Magazine
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• v.27 no.9
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• pp.30-38
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• 2010

본 논문은 인간의 청각기능을 보조하거나 대체할 수 있는 차세대 청각보조장치 및 완전 이식형 인공와우에 관련한 기술동향에 대해서 기술한다. 청각보조장치는 MEMS 마이크로폰과 음장가시화 기술을 기반으로 하여 청각정보를 시각적으로 전달하고자 하는 장치이다. 이를 위해서는 초소형 MEMS 마이크로폰의 최적화 및 실시간 음장가시화 기술 개발이 선행되어야 한다. 차세대 생체모사 인공와우 기술은 기존 인공와우의 단점인 잦은 충전, 장애 노출 등을 극복하고 향상된 음감을 전달할 수 있는 완전 이식형 인공와우로서 그 기술동향을 논하고자 한다.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.23 no.5
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• pp.555-567
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• 2019

Speech recognition rate is lowered even in a noisy environment, and it is difficult for a person with a speech disability or an inconvenient language to use it in a social life. In addition to improving the inconvenience of using the language, 280 words were selected using the word selection method which was improved when the word was selected considering the pronunciation characteristics of the language impaired. The MEMS development device used in the experiment was made considering material, lead wire type, length and direction. We improved the speech recognition rate by using the developed word selection method and the MEMS device developed to improve the speech recognition rate due to incorrect pronunciation and severe noise. The new method of selecting words and the mems device were improved and the results were included.

• Electronics and Telecommunications Trends
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• v.25 no.5
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• pp.1-10
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• 2010

스마트폰, 태블릿 PC의 등장과 더불어 모바일 IT 제품들은 빠르게 소형화, 슬림화, 저전력화 되고 있으며, 이런 시스템의 요구에 대응하기 위하여 음향부품은 기술 전환기를 맞이하고 있다. 대표적 음향소자로는 소리를 전기적 신호로 변환하는 센서인 마이크로폰과 전기 에너지를 소리 에너지로 변환하는 액추에이터인 스피커가 있는데, 최근초소형 MEMS 마이크로폰과 초박형 압전 스피커와 같은 새로운 제품이 시장에서 주목받고 있다. 본 고에서는 음향소자의 기술 개요, 새로운 제품의 장단점 및 개발 동향, 그리고 시장 및 산업 동향을 살펴봄으로써 관련 국내 업계가 기술 전환기를 대비하는 데 필요한 기초 정보를 제공하고자 한다.

• Electronics and Telecommunications Trends
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• v.28 no.5
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• pp.83-92
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• 2013

IT 기술이 발달함에 따라 저전력, 초소형 센서노드를 설치하여 무인으로 정보를 얻을 수 있는 시스템의 도입이 점차 확대되는 추세이며, 이것을 위하여 온도, 습도, 가스 등 환경정보를 획득할 수 있는 센서뿐만 아니라 초소형 저전력 복합환경센서 ROIC(Read-Out Integrated Circuit)의 중요성이 증가하고 있다. 또한 휴대폰, 노트북, 스마트폰, 태블랫 PC 등의 모바일 IT 제품들은 빠르게 소형화, 슬림화, 저전력화 되고 있다. 이런 시스템의 요구에 따라 음향부품도 기본적인 음향감지/출력 성능 이외에 크기 및 소모전력이 중요한 기능요소로 크게 부각되고 있으며, 이것을 위하여 소형화, 저가격화가 가능한 MEMS(Microelectromechanical Systems) 음향센서 및 ROIC 개발이 요구되고 있다. 따라서 본고에서는 복합환경센서 ROIC 및 MEMS 마이크로폰 ROIC의 기술동향 등에 대해서 고찰하고자 한다.

• Journal of Sensor Science and Technology
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• v.16 no.1
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• pp.62-67
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• 2007

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin (Au/Sn) eutectic solder bonding. The membrane chip has 2.5 mm${\times}$2.5 mm, $0.5{\mu}m$ thick low stress silicon nitride membrane, 2 mm${\times}$2 mm Au/Ni/Cr membrane electrode, and $3{\mu}m$ thick Au/Sn layer. The backplate chip has 2 mm${\times}$2 mm, $150{\mu}m$ thick single crystal silicon rigid backplate, 1.8 mm${\times}$1.8 mm backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50-60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is $39.8{\mu}V/Pa$ (-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.23 no.11
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• pp.1397-1406
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• 2019

In everyday mobile phone calls between the disabled and non-disabled people due to neurological impairment, the communication accuracy is often hindered by combining the accuracy of pronunciation due to the neurological impairment and the pronunciation features of the disabled. In order to improve this problem, the limiting method is MEMS (micro electro mechanical systems), which includes an induction line that artificially corrects difficult vocalization according to the oral characteristics of the language impaired by improving the word of out of vocabulary. mechanical System) Microphone device improvement. S/W improvement is decision tree with invert function, and improved matrix-vector rnn method is proposed considering continuous word characteristics. Considering the characteristics of H/W and S/W, a similar dictionary was created, contributing to the improvement of speech intelligibility for smooth communication.

• Journal of Sensor Science and Technology
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• v.27 no.4
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• pp.269-274
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• 2018

High-sensitivity signal-to-noise ratio (SNR) microphones are essentially required for a broad range of automatic speech recognition applications. Piezoelectric microphones have several advantages compared to conventional capacitor microphones including high stiffness and high SNR. In this study, we designed a new piezoelectric membrane structure by using the finite elements method (FEM) and an optimization technique to improve the sensitivity of the transducer, which has a high-quality AlN piezoelectric thin film. The simulation demonstrated that the sensitivity critically depends on the inner radius of the top electrode, the outer radius of the membrane, and the thickness of the piezoelectric film in the microphone. The optimized piezoelectric transducer structure showed a much higher sensitivity than that of the conventional piezoelectric transducer structure. This study provides a visible path to realize micro-scale high-sensitivity piezoelectric microphones that have a simple manufacturing process, wide range of frequency and low DC bias voltage.

• Journal of the Korean Society for Nondestructive Testing
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• v.31 no.5
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• pp.522-528
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• 2011

Artificial basilar membranes made of PVDF(polyvinylidene fluoride) are manufactured using microfabrication processes. The mechanical behavior of PVDF artificial basilar membrane was measured to evaluate its performance as a mechanical frequency analyzer using scanning LDV(laser Doppler vibrometer). The experimental setup consists of the microfabricated artificial basilar membrane, a loud speaker connected to an amplifier for generating acoustic pressure of specific spectral pattern, and a scanning LDV with controlling unit for measuring the displacement of the membrane on the incoming acoustic stimulation. The microfabricated artificial basilar membrane was attached tightly upon a package containing a chamber which can be filled with silicone oil before placed on the experimental setup stage. The experiment results showed that the microfabricated artificial basilar membrane has a property as a mechanical frequency analyzer.