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http://dx.doi.org/10.5369/JSST.2018.27.4.269

Optimal Design of a MEMS-type Piezoelectric Microphone  

Kwon, Min-Hyeong (Optic & Display Material Center, Korea Institute of Ceramic Engineering & Technology)
Ra, Yong-Ho (Optic & Display Material Center, Korea Institute of Ceramic Engineering & Technology)
Jeon, Dae-Woo (Optic & Display Material Center, Korea Institute of Ceramic Engineering & Technology)
Lee, Young-Jin (Optic & Display Material Center, Korea Institute of Ceramic Engineering & Technology)
Publication Information
Journal of Sensor Science and Technology / v.27, no.4, 2018 , pp. 269-274 More about this Journal
Abstract
High-sensitivity signal-to-noise ratio (SNR) microphones are essentially required for a broad range of automatic speech recognition applications. Piezoelectric microphones have several advantages compared to conventional capacitor microphones including high stiffness and high SNR. In this study, we designed a new piezoelectric membrane structure by using the finite elements method (FEM) and an optimization technique to improve the sensitivity of the transducer, which has a high-quality AlN piezoelectric thin film. The simulation demonstrated that the sensitivity critically depends on the inner radius of the top electrode, the outer radius of the membrane, and the thickness of the piezoelectric film in the microphone. The optimized piezoelectric transducer structure showed a much higher sensitivity than that of the conventional piezoelectric transducer structure. This study provides a visible path to realize micro-scale high-sensitivity piezoelectric microphones that have a simple manufacturing process, wide range of frequency and low DC bias voltage.
Keywords
Piezoelectric transducer; microphone; Response surface methodology; Microphone sensitivity; AlN piezoelectric film;
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Times Cited By KSCI : 1  (Citation Analysis)
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