1 |
D. Maier-Schneider, J. Maibach, and E. Obermeier, 'A new analytical solution for the load-deflection of square membranes', J. Microelectromech. Syst., vol. 4, no. 4, pp. 238-241, 1995
DOI
ScienceOn
|
2 |
Microphone Handbook, Bruel & Kjr A/S, Nrum, Denmark, 1996
|
3 |
J. J. Neumann Jr. and K. J. Gabriel, 'A fully-integrated CMOS-MEMS audio microphone', Transducers'03, pp. 230-233, 2005
|
4 |
N. Ono, T. Arita, Y Senjo, and S. Ando, 'Directivity steering principle for biomimicry silicon microphone', Transducers'05, pp. 792-795, 2005
|
5 |
D. Schafer, S. Shoaf, and P. Loeppert, 'Micromachined condenser microhpone for hearing aid use', Solid-State Sensor and Actuator Workshop (Hilton Head'98), pp. 27-30, 1998
|
6 |
See, for example, http://www.knowlesacoustics.com/or http://www.sonion.com/
|
7 |
W. H. Hsieh, T.-J. Yao, and Y.-C. Tai, 'A high performance MEMS thin-film teflon electret microphone', Transducers '99, pp. 1064-1067, 1999
|
8 |
D. T. Martin, K. Kadirvel, J. Liu, R. M. Fox, M. Sheplak, and T. Nishida, 'Surface and bulk micromachined dual back-plate condenser microphone', MEMS'05, pp. 319-322, 2005
|
9 |
J. W. Weigold, T. J. Brosnihan, J. Bergeron, and X. Zhang, 'A MEMS condenser microphone for consumer applications', MEMS'06, pp. 86-89, 2006
|
10 |
고상춘, 전치훈, 장원익, 문석환, 황건, 최창억, '콘덴서형 MEMS 음향센서의 제작 및 음향특성', 제7회 한국 MEMS 학술대회 논문집, pp. 81-84, 2005
|
11 |
이경일, 조진우, 이대성, 황학인, 김진우, 이석순, '도금 진동판을 이용한 초소형 정전용량형 음향센서,' 제7회 한국 MEMS 학술대회 논문집, pp. 93-96, 2005
|
12 |
P. R. Scheeper, B. Nordstrand, J. O. Gullov, B. Liu, T. Clausen, L. Midjord, and T. Storgaard-Larsen, 'A new measurement microphone based on MEMS technology', J. Microelectromech. Syst., vol. 12, no. 6, pp. 880-891, 2003
DOI
ScienceOn
|
13 |
Y. Iguchi, T. Tajima, M. Goto, M. Iwaki, A. Ando, K. Tanioka, F. Takeshi, S. Matsunaga, and Y. Yasuno, 'New fabrication process for high-performance silicon condenser microphone with monocrystalline silicon diaphragm and backplate', MEMS'04, pp. 601-604, 2004
|
14 |
G. S. K. Wong and T. F. W. Embleton Handbook of Condenser Microphones, AlP Press, New York, Chap. 3, pp. 37-69, 1995
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