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Fabrication of Biomimetic MEMS Acoustic Sensor and Analysis of Its Frequency Characteristics  

Hur, Shin (Nano-Mechanical System Division, Korea Institute of Machinery and Materials)
Jung, Young-Do (Nano-Mechanical System Division, Korea Institute of Machinery and Materials)
Lee, Young-Hwa (Nano-Mechanical System Division, Korea Institute of Machinery and Materials)
Song, Won-Joon (Nano-Mechanical System Division, Korea Institute of Machinery and Materials)
Kim, Wan-Doo (Nano-Mechanical System Division, Korea Institute of Machinery and Materials)
Publication Information
Journal of the Korean Society for Nondestructive Testing / v.31, no.5, 2011 , pp. 522-528 More about this Journal
Abstract
Artificial basilar membranes made of PVDF(polyvinylidene fluoride) are manufactured using microfabrication processes. The mechanical behavior of PVDF artificial basilar membrane was measured to evaluate its performance as a mechanical frequency analyzer using scanning LDV(laser Doppler vibrometer). The experimental setup consists of the microfabricated artificial basilar membrane, a loud speaker connected to an amplifier for generating acoustic pressure of specific spectral pattern, and a scanning LDV with controlling unit for measuring the displacement of the membrane on the incoming acoustic stimulation. The microfabricated artificial basilar membrane was attached tightly upon a package containing a chamber which can be filled with silicone oil before placed on the experimental setup stage. The experiment results showed that the microfabricated artificial basilar membrane has a property as a mechanical frequency analyzer.
Keywords
Biomimetic; Acoustic Sensor; Piezoelectric; PVDF; Resonant Frequency; Laser Doppler Vibrometer (LDV); Artificial Basilar Membrane(ABM);
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  • Reference
1 G. V. Bekesy, "Some Biophysical Experiments from Fifty Years Ago," Annual Review of Physiology 36: 1 (1974)   DOI   ScienceOn
2 L. Robles and M. A. Ruggero, "Mechanics of the mammalian cochlea," Physiological Reviews, Vol. 81, No. 3, pp. 1305-1352 (2001)
3 R. D. White and K. Grosh, "Microengineered hydromechanical cochlear model," Proceedings of the National Academy of Sciences of the United States of America, Vol. 102, No. 5, pp. 1296-1301 (2004)
4 T. Xu, "Polymeric micro-cantilever array for auditory front-end processing," Sensors and Actuators A: Physical, Vol. 114, Issue: 2-3, pp. 176-182 (2004)   DOI   ScienceOn
5 M. J. Wittbrodt, "A life-sized model of the human cochlea: design, analysis, fabrication, and measurements," Ph.D Thesis, Boston University (2005)
6 N. Mukherjee, R. D. Roseman and J. P. Willging, "The piezoelectric cochlear implant: concept, feasibility, challenges, and issues," Journal of Biomedical Materials Research PartB: Applied Biomaterials, Vol. 53, No. 2, pp. 181-187 (2000)   DOI   ScienceOn
7 J. Chen, J. Engel and L. Chang, "Development of polymer-based artificial haircell using surface micromachining and 3D assembly," Transducers, Vol. 2, pp. 1035-1038 (2003)
8 H. Shintaku, T. Nakagawa, D. Kitagawa, H. Tanujaya, S. Kawano and J. Ito, "Development of p일iezoelectric acoustic sensor with frequency selectivity for artificial cochlea," Sensors and Actuators A: Physical, Vol. 158, No. 2, pp. 183-192 (2010)   DOI   ScienceOn