References
- J. J. Neumann Jr and K. J. Gabriel, "CMOS-MEMS membrane for audio-frequency acoustic actuation," Sens. Actuat. A, Vol. 95, No. 2-3 pp. 175-182, 2002. https://doi.org/10.1016/S0924-4247(01)00728-2
- S. Troiler-McKinstry and P. Muralt, "Thin Film Piezoelectric for MEMS," J. Electroceram., Vol. 12, No. 1-2, pp. 7-17, 2004. https://doi.org/10.1023/B:JECR.0000033998.72845.51
- J. Bergqvist, "Finite-element modeling and characterization of a silicon condenser microphone with a highly perforated backplate," Sens. Actuat. A, Vol. 39, No. 3, 191-200, 1993. https://doi.org/10.1016/0924-4247(93)80219-7
- S. B. Horowitz, A. D. Mathias, J. R. Fox, J. P. Cortes, M. Sanghadasa and P. Ashley, "Effects of scaling and geometry on the performance of piezoelectric microphone," Sens. Actuat. A Phys. ,Vol. 185, pp. 24-32, 2012. https://doi.org/10.1016/j.sna.2012.07.008
- J. Liu, Y. Yuan, Z. Ren, Q. Tan and J. Xiong, "High-Temperature Dielectric Properties of Aluminum Nitride Ceramic for Wireless Passive Sensing Applications," Sensors, Vol. 15, No. 9, 22660-22671, 2015. https://doi.org/10.3390/s150922660
- N. Mohamad, P. Iovenitti and T. Vinay, "Modeling and Optimisation of a Spring-Supported Diaphragm Capacitive MEMS Microphone," Eng., Vol. 2, No. 10, pp. 762-770, 2010. https://doi.org/10.4236/eng.2010.210098
- B. C. Lee and G. S. Chung, "Design and Analysis of AlN Piezoelectric Micro Energy Harvester Based on Vibration," J. Korean Inst. Electr. Electron. Mater. Eng, , Vol. 23, No. 5, pp. 424-428, 2010. https://doi.org/10.4313/JKEM.2010.23.5.424
- S. W. Jung, K. H. Kim and K. W. Koo, "Fabrication and Properties of MFIS Structures using high Dielectric AlN Insulating Layers for Nonvolatile Ferroelectric," J. Inst. Electron. Eng. Kor. , Vol. 38, No. 11, pp. 765-770, 2001.
- M. Rajavelu, D. Sivakumar, R. J. Daniel and K. Sumangala, "Simulation of Perforated Diaphragm Empolyed Piezoresistive Pressure Sensor for Sensitivity Enhancement and Validation with Modified Analytical Model," Proce. Eng. Vol. 38, No. 1, pp. 3499-3506, 2012.
- Y. Sun, T. Li, J. Yan and J. Liu, "Technology optimization for polysaccharides (pop) extraction from the fruiting bodies of pleurotus ostreatus by Box-Behnken statistical design," Carbohydr. Polym., Vol. 80, No. 1, pp. 242-247, 2010. https://doi.org/10.1016/j.carbpol.2009.11.018
- J. Guo, Y. Luo, D. Fan, P. Gao, X. Ma and C. Zhu, "Analysis of Metabolic Products by Response Surface Methodology for Production of Human-like Collagen?," Chin. J. Chem. Eng. , Vol. 18, No. 5, pp. 830-836, 2010. https://doi.org/10.1016/S1004-9541(09)60135-X
- Y. Wu, S. W. Cui, J. Tang and X. Gu, "Optimization of extraction process of crude polysaccharides from boat-fruited sterculia seeds by response surface methodology," Food Chem. , Vol. 105, No. 4, pp. 1599-1605, 2007. https://doi.org/10.1016/j.foodchem.2007.03.066
- G. Yin and Y. Dang, "Optimization of extraction technology of the Lycium barbarum polysaccharides by Box-Behnken stastical design," Carbohydr. Polym., Vol. 74, No. 3, pp. 603-610, 2008. https://doi.org/10.1016/j.carbpol.2008.04.025