Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Optimal Design of a MEMS-type Piezoelectric Microphone

MEMS 구조 압전 마이크로폰의 최적구조 설계

  • Kwon, Min-Hyeong (Optic & Display Material Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Ra, Yong-Ho (Optic & Display Material Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Jeon, Dae-Woo (Optic & Display Material Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Lee, Young-Jin (Optic & Display Material Center, Korea Institute of Ceramic Engineering & Technology)
  • 권민형 (한국세라믹기술원 광.디스플레이소재센터) ;
  • 라용호 (한국세라믹기술원 광.디스플레이소재센터) ;
  • 전대우 (한국세라믹기술원 광.디스플레이소재센터) ;
  • 이영진 (한국세라믹기술원 광.디스플레이소재센터)
  • Received : 2018.07.20
  • Accepted : 2018.07.27
  • Published : 2018.07.31
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Abstract

High-sensitivity signal-to-noise ratio (SNR) microphones are essentially required for a broad range of automatic speech recognition applications. Piezoelectric microphones have several advantages compared to conventional capacitor microphones including high stiffness and high SNR. In this study, we designed a new piezoelectric membrane structure by using the finite elements method (FEM) and an optimization technique to improve the sensitivity of the transducer, which has a high-quality AlN piezoelectric thin film. The simulation demonstrated that the sensitivity critically depends on the inner radius of the top electrode, the outer radius of the membrane, and the thickness of the piezoelectric film in the microphone. The optimized piezoelectric transducer structure showed a much higher sensitivity than that of the conventional piezoelectric transducer structure. This study provides a visible path to realize micro-scale high-sensitivity piezoelectric microphones that have a simple manufacturing process, wide range of frequency and low DC bias voltage.

Keywords

References

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