Electron Density Measurement of Inductively Coupled Plasma Using Langmuir Probe (Langmuir Probe를 이용한 유도결합형 플라즈마의 전자 밀도 측정)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2003.07b
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- pp.1111-1114
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- 2003