• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.7
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• pp.424-432
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• 2000

The plasma surface treatment, using hydrogen gas, of the silicon wafer was investigated as a pretreatment for the application to silicon-on-insulator (SOI) wafers using the silicon direct bonding technique. The chemical reactions of hydrogen plasma with surfaces were used for both the surface activation and the removal of surface contaminants. As a result of exposure of silicon wafer to the plasma, an active oxide layer was formed on the surface, which was rendered hydrophilic. The surface roughness and morphology were estimated as functions of plasma exposing time as well as of power. The surface became smoother with decreased incident hydrogen ion flux by reducing plasma exposing time and power. This process was very effective to reduce the carbon contaminants on the silicon surface, which was responsible for a high initial surface energy. The initial surface energy measured by the crack propagation method was 506 mJ/m2, which was up to about three times higher than that of a conventional RCA cleaning method.

• Korean Membrane Journal
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• v.4 no.1
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• pp.36-40
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• 2002

The diffusion coefficients of ions in the reverse transport system using the carrier mediated membrane were estimated from the diffusional membrane permeabilities and the ion activity in membrane system. In the aqueous alkali metal ions-membrane system diffusional flux of alkali metal ions driven by coupled proton was analyzed. The aqueous phase I contained NaOH solution and the aqueous phase II also contained NaCl and HCl mixed solution. The concentration of Na ions of both phases were $10^{0},\;10^{-1},\;10^{-2},\;5{\times}10^{-1}\;and\;5{\times}10^{-2}\;mol{\cdot}dm^{-3}$ and the concentration of HCI in aqueous phase II was always kept at $1{\times}10^{-1}\;mol{\cdot}dm^{-3}$. Moreover, the carrier concentration in liquid membrane was $10^{-2}\;mol{\cdot}dm^{-3}$. The results indicated that the diffusion coefficients depend strongly on the concentration of both phases electrolyte solution equilibriated with the membrane. The points were interpreted in terms of the energy barrier theory. Furthermore, eliminating the potential terms from the membrane equation was derived.

• Membrane Journal
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• v.17 no.1
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• pp.54-60
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• 2007

In this research, the cation-exchange membrane (SS membrane) containing sulfonic acid group was prepared by radiation induced grafted polymerization onto a porous hollow fiber membrane to effectively remove ammonia which was produced by urea decomposition for peritoneum dialysis system. And the metal ionic cross-linking cation-exchange membrane (SS-M membrane) was prepared by the adsorption of metallic ions (Cu, Ni, Zn) to the SS membranes. The pure water flux and adsorption capacities of ammonia to SS and SS-M membranes were examined. The pure water flux of SS membrane decreased rapidly with the density of $SO_3H$ group increasing. As the metallic ions were adsorbed to the SS membrane, the pure water flux was increased. The adsorption capacities of ammonia at the SS membrane increased with increasing of density of $SO_3H$ group. The ion-exchange capacity of ammonia of the SS membrane was approximately proportional 1 : 1 to the density of $SO_3H$ group. The SS membrane had higher adsorption capacities than the SS-M membrane. The highest adsorption capacities of SS and SS-M membrane appeared the highest pH 9.

• Membrane Journal
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• v.27 no.2
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• pp.199-204
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• 2017

In this study, a study was carried out for the separation of metal ions in lignin extract discharged from the pulp process. alumina powders were mixed with DMAc (N, N-dimethylacetamide) solvent and PESf (Polyethersulfone) polymer, PVP (polyvinylpyrrolidone) dispersant was added and slip casting method was used to prepare the membrane. The membrane was measured for pore size through a CFP (Capillary Flow Porometer) device and the surface and cross-section of the membrane were observed through a FE-SEM (Field Emission Scanning Electron Microscope). The flux was calculated by measuring the filtered weight per hour using a separation experiment device. Pore size measurements were performed under increasing pressure from 0 psi to 30 psi. The pore size of the membrane was $0.4{\mu}m$ and the flux decreased from the initial flux value of $6.36kg{\cdot}m^{-2}{\cdot}h^{-1}$ to $1.98kg{\cdot}m^{-2}{\cdot}h^{-1}$ due to the fouling of the membrane. After the permeation experiment, membrane contaminants were removed by simple washing. Separation experiments showed that Na contained in the initial lignin extract was reduced by 69%, Fe was removed by 87%, K by 95%, Ca by 93% and Mg by 96%.

• Journal of Electrochemical Science and Technology
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• v.10 no.1
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• pp.14-21
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• 2019

Supported liquid membrane process usually is used for recovering or enrichment of valuable metals in the industrial wastewater. But, even if the metals in the wastewater was separated with high chemical selectivity, it cannot be enough concentrated since separation performance of supported liquid membrane (SLM) process is limited by concentration gradient between feed solution and stripping solution. If metal concentration in the stripping solution to be enough low, transport of metal through membrane can be accomplishment constantly. Therefore, Electrodialysis (ED) has been placed after SLM process and the stripping solution of SLM was used as the feed solution for the ED process. Transport of ions in the solutions is successfully performed by ED process. Thus, the metal concentration in the stripping solution does not rise as to stop ion transport. Besides, valuable metals easily are concentrated by ED process for re-use. In this study, effects of operation parameters like initial Cd(II) concentration, HCl concentration in the feed solution of SLM and applied voltage are investigated on separation efficiency, flux and permeability of the both processes. As the feed solution concentration increased, all performance values has increased. When initial concentration of 100 mg/L is used, separation performances (SP) are 55% and 70%, for SLM and consecutive process, respectively. The best HCl concentration in the feed solution of SLM has determined as 2 M, in this conditions SP are 64% and 72%, for SLM and consecutive process, respectively. With increased of applied voltage on ED process, SP of the consecutive process has been raised from 72% to 83%. According to the obtained experimental data, consecutive process has better separation performance than SLM. When the separation performances of both processes were compared for the same operating conditions, it was determined higher the separation efficiency, permeability and flux values of the consecutive process, 8%, 9% and %10.6, respectively. Consequently, the use of the consecutive process increases the performance efficiency of both processes. The consecutive process studied has quite a good chemical separation efficiency, and enrichment capability. Moreover, this process requires few water and energy.

• Nuclear Engineering and Technology
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• v.55 no.3
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• pp.919-926
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• 2023

To analyze the cause of the destruction of thin, carbon-backed lithium fluoride targets during a measurement of the fusion of ⁷Li and ¹⁷O, we estimate theoretically the lifetimes of carbon and LiF films due to sputtering, thermal evaporation, and lattice damage and compare them with the lifetime observed in the experiment. Sputtering yields and thermal evaporation rates in carbon and LiF films are too low to play significant roles in the destruction of the targets. We estimate the lifetime of the target due to lattice damage of the carbon backing and the LiF film using a previously reported model. In the experiment, elastically scattered target and beam ions were detected by surface silicon barrier (SSB) detectors so that the product of the beam flux and the target density could be monitored during the experiment. The areas of the targets exposed to different beam intensities and fluences were degraded and then perforated, forming holes with a diameter around the beam spot size. Overall, the target thickness tends to decrease linearly as a function of the beam fluence. However, the thickness also exhibits an increasing interval after SSB counts per beam ion decreases linearly, extending the target lifetime. The lifetime of thin LiF film as determined by lattice damage is calculated for the first time using a lattice damage model, and the calculated lifetime agrees well with the observed target lifetime during the experiment. In experiments using a thin LiF target to induce nuclear reactions, this study suggests methods to predict the lifetime of the LiF film and arrange the experimental plan for maximum efficiency.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.322-325
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• 2003

BST thin films were etched with inductively coupled plasmas. A chemically assisted physical etch of BST was experimentally confirmed by ICP under various gas mixtures. After a 20 % addition of $BCl_3$ to the $Cl_2/Ar$ mixture, resulting in an increased the chemical effect. As a increases of RF power, substrate power, and substrate temperature, and decrease of working pressure, the ion energy flux and chlorine atoms density increased. The maximum etch rate of the BST thin films was 90.1 nm/min at the RF power, substrate power, working pressure, and substrate temperature were 700 W, 300 W, 1.6 Pa, and 20 $^{\circ}C$, respectively. It was proposed that sputter etching is dominant etching mechanism while the contribution of chemical reaction is relatively low due to low volatility of etching product.

• Applied Chemistry for Engineering
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• v.19 no.4
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• pp.382-387
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• 2008

$Ba_{0.5}Sr_{0.5}Co_{0.8}Fe_{0.2}O_{3-{\delta}}$ oxide was synthesized by polymerized complex method. Dense membrane of perovskite oxide was prepared using as-prepared powder by pressing and sintering at $1080^{\circ}C$. Leakage test was conducted on the membrane sealed by gold ring, Pyrex ring or Pyrex powder as a sealing material. The oxygen permeation flux of $Ba_{0.5}Sr_{0.5}Co_{0.8}Fe_{0.2}O_{3-{\delta}}$ membrane increased with increasing temperature and was $0.74mL/min{\cdot}cm^2$ at $900^{\circ}C$. In the case of the membrane applied by sealing material, oxygen permeation flux of the membrane using gold ring at $950^{\circ}C$ was higher than that using Pyrex materials because the undesired spreading of Pyrex glass materials in the membrane led to the reduction of effective permeation area. Microphotograph analysis results for the membrane after permeation test confirmedthe diffusion of Pyrex glass seal into the membrane.

• Journal of the Korean Society of Radiology
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• v.16 no.2
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• pp.141-150
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• 2022

The initial co-transport and counter-transport permeate transport characteristics of calcium ion at epithelial cell membrane model in parathyroid which irradiated by high energy x-ray(linac 6 MV) was investigated. The epithelial cell membrane model used in this experiment was a polysulfonated copolymerized membrane of poly(PS-DVB: polystyrene-divinylbenzene). The difference of sorbed water in membrane, fixed carrier concentration(SO₃^2-), initial pH value, OH^- concentration were occurred at difference of Ca²⁺concentration and quantity of parathyroid hormone, respectively. The initial co-transport and counter-transport permeate flux of Cl^-, OH^-, Ca²⁺ on fixed carrier concentration(SO₃^2-) and initial pH value of irradiated membrane was found to be decreased than non-irradiated membrane. The initial co-transport and counter-transport permeate flux of Ca²⁺ on fixed carrier concentration (SO₃^2-), initial pH value, OH^- concentration in irradiated membrane were found to be decreased about 2.68 ~ 6.87 times, about 1.42 ~ 1.63 times, about 2.07 ~ 1.672 times than non-irradiated membrane, respectively. As a result, the quantity of parathyroid hormone was decreased at irradiated membrane than non-irradiated membrane. The decrease of parathyroid hormone was occurred at hypoparathyroidism and osteoporosis, parathyroiditis, and so on. As the parathyroid hormone in epithelial cell membrane model were abnormal, cell damages were appeared at cell.

• Journal of the Korean Society of Radiology
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• v.15 no.2
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• pp.229-238
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• 2021

The selective permeate transport characteristics of iodine ion at follicle cell membrane model in thyroid which irradiated by high energy x-ray(linac 6 MV) was investigated. The follicle cell membrane model used in this experiment was a polysulfonated copolymerized membrane of poly(4-vinylpyridine-co-acrylonitrile:VP-AN). The difference of membrane thickness [2 mole AN%(w/w)], fixed carrier concentration[VP-AN%(w/w)], OH- concentration were occurred at difference of I- concentration and quantity of thyroid hormone, respectively. The tensile strength in fixed carrier concentration[VP-AN% (w/w): 0-62 %] of irradiated membrane was found to be decreased about 1.2-1.8 times than non-irradiated membrane. The I- selective permeate initial flux with increase of membrane thickness [2mole AN%(w/w)], fixed carrier concentration[VP-AN%(w/ w)], OH- concentration in irradiated membrane were found to be decreased about 2.1-4.5 times, about 2.2-2.5 times, about 2.1-2.67 times than non-irradiated membrane, respectively. As a result, the quantity of thyroid hormone was decreased at irradiated membrane than non-irradiated membrane. The decrease of thyroid hormone was occurred at hypothyroidism and hyperthyroidism, thyroid cancer, and so on. As the thyroid hormone in cell membrane model were abnormal, cell damages were appeared at cell.