• ETRI Journal
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• 제34권2호
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• pp.226-234
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• 2012

The novelty of this study resides in the fabrication of stoichiometric and stress-reduced $Si_3N_4/SiO_2/Si_3N_4$ triple-layer membrane sieves. The membrane sieves were designed to be very flat and thin, mechanically stress-reduced, and stable in their electrical and chemical properties. All insulating materials are deposited stoichiometrically by a low-pressure chemical vapor deposition system. The membranes with a thickness of 0.4 ${\mu}m$ have pores with a diameter of about 1 ${\mu}m$. The device is fabricated on a 6" silicon wafer with the semiconductor processes. We utilized the membrane sieves for plasma separations from human whole blood. To enhance the separation ability of blood plasma, an agarose gel matrix was attached to the membrane sieves. We could separate about 1 ${\mu}L$ of blood plasma from 5 ${\mu}L$ of human whole blood. Our device can be used in the cell-based biosensors or analysis systems in analytical chemistry.

• 전자공학회논문지A
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• 제33A권3호
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• pp.117-125
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• 1996

The variation of the interfacial and the electrical properties of SiO$_{2}$TiW layers as a function of anneal temperature was extensively investigated. During the deposition of SiO$_{2}$ on TiW chemical bonds such as SiO$_{2}$, TiW, WO$_{3}$, WO$_{2}$ TiO$_{2}$ Ti$_{2}$O$_{5}$ has been created at the SiO$_{2}$/TiW interface. At the anneal temperature of 300$^{\circ}C$, WO$_{3}$ and TiO$_{2}$ bonds started to break due to the reduction phenomena of W and Ti and simultaneously the metallic W and Ti bonds started to create. Above 500$^{\circ}C$, a part of Si-O bonds was broken and consequently Ti/W silicide was formed. Form the current-voltage characteristics of Al/Sico$_{2}$(220$\AA$)/TiW antifuse structure, it was found that the breakdown voltage of antifuse device wzas decreased with increasing annealing temperature for SiO$_{2}$(220$\AA$)/TiW layer. When r, the insulating property of antifuse device of the deterioration of intermetallic SiO$_{2}$ film, caused by the influw of Ti and W.W.

• 한국세라믹학회지
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• 제28권3호
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• pp.215-224
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• 1991

The synthesis of SrTiO3 powders having high purity and homogeneous submicron particle size was attempted by the oxalate method. The microstructure and dielectric properties of SrTiO3 based boundary layer capacitor (BLC) were investigated. Strontium titanyl oxalate[SrTiO(C2O4)2.4H2O] was prepared from the mixing solution of (Sr, Ti) using oxalic acid(H2C2O4) as a precipitating agent at 8$0^{\circ}C$. The crystalline SrTiO3 powder was obtained by thermal decomposition of the precipitate above $600^{\circ}C$. The crystalline SrTiO3 powder containing Nb2O5 as a dopant, TiO2 and SiO2 as additives was sintered at 1360~144$0^{\circ}C$ in the reducing atmosphere to get semiconductive SrTiO3. Insulating material containing PbO-Bi2O3-B2O3 frit was printed on the sintered semiconductive SrTiO3 and fired at 120$0^{\circ}C$ for 2h to get the grain boundary diffusion.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.391-394
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• 1998

Electroluminescence is the light emission obtained by an electrical excitation energy passing through a phosphor under an applied high electrical field. EL are paid much attention on flat panel display as a backlight and indicator, which are divided into ACPRL(alternating-current powder electroluminescent) and ACTFEL(alternating-current powder electroluminescent). In this paper, Electric and emission properties on ACPEL are investigated based on ZnS:Cu phosphor. The basic structure on this is ITO glass/phosphor/insulator/ backelectrode, CR-M which has high efficiency on thermal properties and dielectric Properties was introduced and BaTiO$_3$ as a insulating layer in order to increase app1ied electric field on phosphor. Changing on Dielectric and emission Properties was caused by a different viscosity of binder which filled on space between phosphor particle. 60cd/$m^2$ under 60V, 2kHz sinusoidal was gotten from ACPELD prepared in this work.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2006년도 추계 학술논문 발표대회 논문집
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• pp.13-16
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• 2006

This study investigates filed application in Daebul Free Trade Zone of a flowing method using drying shrinkage-reducing superplasticizer(SRS) and an insulating curing method using double bubble sheets. Test showed that fresh concrete satisfied target slump and air content. A structure adding SRS significantly decreased the total bleeding capacity and accelerated the setting time. As for the crack occurrence, the structure applying the flowing method and double bubble sheets simultaneously exhibited the most favorable crack endurance, while conventional concrete showed more than 1mm size of crack in overall, and a structure applying only the flowing method partially presented micro crack. For the area proportion of crack occurrence, the structure using the double bubble sheets indicated 9.8%, while others applying flowing method was 28%, compared with 100% of conventional one. Standard curing specimens had about $3{\sim}6%$ higher compressive strength than that of specimens cured at adjacent field construction. In addition, using SRS improved about $5{\sim}7MPa$, than that of conventional concrete at 91 days elapse.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2006년도 추계 학술논문 발표대회 논문집
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• pp.57-60
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• 2006

This study proposes the physical properties of the hardened lightweight cement using the polyethylene tube and to make the fundamental data regarding a new lightweight concrete development. The aerated concrete is displaying various effects such as lightweight, insulation characteristic and it is coming to be widely applied the slab layer of apartment as an insulating material but currently the aerated concrete has many problems. Therefore, demonstrating similar property of former aerated concrete and improving the defects, developing new hardened cement is needed. In this study, we predict adopting possibility of hollow core polyethylene tube, as a material to make cement hardening containing a lot of void. So we changed the mixing ratio, a diameter and length of the polyethylene tube and improved the compressive strength and unit capacity weight of the lightweight cement hardening body. From the test results, we judge that the aerated concrete is a developmental possibility.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2002년도 춘계 기술심포지움 논문집
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• pp.169-172
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• 2002

This study demonstrated the feasibility of using tape-casting followed by sintering as a low-cost alternative for coating glass-ceramic or glass film on a metal substrate. The process has been successfully used to fabricate a glass-on-stainless steel and a glass-ceramic-on-molybdenum electrostatic chuck(ESC) with the insulating layer thickness about $150{\mu}{\textrm}{m}$. Electrical resistivity data of the coaling were obtained between room temperature and 55$0^{\circ}C$; although the resistivity values dropped rapidly with increasing temperature in both coatings, the glass-ceramic still retained a high value of $10^{10}$ ohm-cm at $500^{\circ}C$. Clamping pressure measurements were done using a mechanical apparatus equipped with a load-cell at temperatures up to $350^{\circ}C$ and applied voltages up to 600V; the clamping behavior of all ESCs generally followed the voltage-squared curve as predicted by theory. Based on these results, we believe that we have a viable technology for manufacturing ESCs for use in reactive-ion etch systems.

• 대한전자공학회논문지SD
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• 제41권8호
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• pp.45-50
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• 2004

전류집속을 위하여 Vertical Cavity Surface Emitting Laser(VCSEL)에 임플랜트 공정으로 만들어지는 반 절연층의 깊이는 VCSEL의 특성 및 신뢰도에 많은 영향을 준다. 이 연구에서는 낮은 문턱전류와 높은 신뢰도의 관점에서 최적화된 임플랜트 깊이를 정하고, 전기적 미분특성을 사용하여 최적화된 임플랜트 깊이를 판정하는 간단한 방법을 제시하였다. 최적화된 임플랜트 깊이는 임플랜트 선단을 1 - λ cavity에서 p-DBR mirror 약 2 주기 위에 위치시키는 것이다. 이 최적화된 임플랜트 깊이는 임플랜트 영역 밑을 옆 방향으로 흐르는 누설전류의 크기로부터 구할 수 있다. 전기적 미분특성은 이 누설전류를 찾아내는 좋은 방법인데, 이 전기적 미분특성을 이용하면 임플랜트 깊이를 간단하고 빠르게 알아낼 수 있기 때문이다.

• Bulletin of the Korean Chemical Society
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• 제24권5호
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• pp.573-578
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• 2003

The structural, magnetic, and transport properties of a mono-layered manganite $La_{0.7}Sr_{1.3}MnO_{4+{\delta}}$ were investigated using variable temperature neutron powder diffraction as well as magnetization and transport measurements. The compound adopts the tetragonal I4/mmm symmetry and exhibits no magnetic reflection in the temperature region of 10 K ≤ T ≤ 300 K. A weak ferromagnetic (FM) transition occurs about 130 K, which almost coincides with the onset of a metal-insulator (M-I) transition. Extra oxygen that occupies the interstitial site between the [(La,Sr)O] layers makes the spacing between the [MnO₂] layers shorten, which enhances the inter-layer coupling and eventually leads to the M-I transition. We also found negative magneto resistance (MR) below the M-I transition temperature, which can be understood on the basis of the percolative transport via FM metallic domains in the antiferromagnetic (AFM) insulating matrix.

• Applied Science and Convergence Technology
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• 제26권6호
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• pp.208-213
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• 2017

Flexible opto-electronic devices are developed on the insulating layer deposited stainless steel (STS) substrates. The silicon dioxide ($SiO_2$) material as the diffusion barrier of Fe and Cr atoms in addition to the electrical insulation between the electronic device and STS is processed using the plasma enhanced chemical vapor deposition method. Noble silver (Ag) films of approximately 100 nm thickness have been formed on $SiO_2$ deposited STS substrates by E-beam evaporation technique. The films then were annealed at $650^{\circ}C$ for 20 min using the rapid thermal annealing (RTA) technique. It was investigated the variation of the surface morphology due to the interaction between Ag films and $SiO_2$ layers after the RTA treatment. The results showed the movement of Si atoms in silver film from $SiO_2$. In addition, the structural investigation of Ag annealed at $650^{\circ}C$ indicated that the Ag film has the material property of p-type semiconductor and the bandgap of approximately 1 eV. Also, the films annealed at $650^{\circ}C$ showed reflection with sinusoidal oscillations due to optical interference of multiple reflections originated from films and substrate surfaces. Such changes can be attributed to both formation of $SiO_2$ on Ag film surface and agglomeration of silver film between particles due to annealing.