Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)
- 2002.05a
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- Pages.169-172
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- 2002
Fabrication of Glass-Ceramic Coacted Electrostatic Chucks by Tape Casting
테이프캐스팅에 의한 결정화유리 도포형 정전척의 제조
Abstract
This study demonstrated the feasibility of using tape-casting followed by sintering as a low-cost alternative for coating glass-ceramic or glass film on a metal substrate. The process has been successfully used to fabricate a glass-on-stainless steel and a glass-ceramic-on-molybdenum electrostatic chuck(ESC) with the insulating layer thickness about
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