Crystallization of IGZO thin film with spontaneously formed superlattice structure induced by Zno buffer layer (Zno 버퍼층을 이용한 자발적 초격자구조를 갖는 IGZO 박막의 결정화)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2010.06a
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- pp.4-4
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- 2010