• Title/Summary/Keyword: InGaZnO

Search Result 510, Processing Time 0.024 seconds

Effect of Annealing on the Structural, Electrical and Optical Characteristics of Ga-doped ZnO(GZO)films (Ga doped ZnO 박막의 열처리 조건에 따른 구조 및 전기적 특성에 관한 연구)

  • Oh, Su-Young;Kim, Eung-Kwon;Lee, Tae-Yong;Kang, Hyun-Il;Kim, Bong-Seok;Song, Joon-Tae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.20 no.9
    • /
    • pp.776-779
    • /
    • 2007
  • In this study we present the effect of annealing temperatures on the structural, electrical and optical characteristics of Ga-doped ZnO (GZO) films. GZO target is deposited on coming 7059 glass substrates by DC sputtering. and then GZO films are annealed at temperatures of 400, 500, $600^{\circ}C$ in air ambient for 20 min. in this case of as-grown film, it shows the resistivity of $6{\times}10^{-1}{\Omega}{\cdot}cm$ and transmittance under 85%, whereas the electrical and optical properties of film annealed at $500^{\circ}C$ are enhanced up to $1.9{\times}10^{-3}{\Omega}{\cdot}cm$ and 90%, respectively.

Properties of ZnO:Ga Thin Films Deposited by RF Magnetron Sputtering with Ar Gas Flows (RF 마그네트론 스퍼터링법으로 제조한 GZO 박막의 Ar 유량에 따른 특성)

  • Kim, Deok Kyu
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.33 no.6
    • /
    • pp.450-453
    • /
    • 2020
  • In this study, ZnO:Ga thin films were fabricated on a glass substrate using various Ar flows by an RF magnetron sputter system at room temperature. The dependencies of Ar flow on different properties were investigated. An appropriate control over the Ar flow led to the formation of a high-quality thin film. The ZnO:Ga films were formed as a hexagonal wurtzite structure with high (002) preferential orientation. The films exhibited a typical columnar microstructure and a smooth top face. The average transmittance was 85~89% within the visible area. By decreasing the Ar flow, the sheet resistance was decreased due to an increase in the grain size and a decrease in the root mean square roughness. The lowest sheet resistance of 86 Ω/□ was obtained at room temperature for the 40 sccm Ar flow.

Structural and optical properties of Ga-doped ZnO nanowires synthesized by pulsed laser deposition in furnace (갈륨 도핑된 ZnO 나노와이어의 합성과 구조적 광학적 특성 분석)

  • Kim, Chang-Eun;Ahn, Byung-Du;Jean, Kyung-Ah;Son, Hyo-Jeong;Kim, Gun-Hee;Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
    • /
    • 2006.10a
    • /
    • pp.46-47
    • /
    • 2006
  • Ga-doped ZnO nanowires have been synthesized by pulsed laser deposition (PLD) in furnace on gold coated (0001) sapphire substrates. The effect of repetition rate on structural and optical properties of Ga-doped ZnO nanowires are investigated. By controlling repetition rate, the diameter of nanowires is varied between about 60 and 100 nm, and the length of nanowires is varied between about 2 and 4 um. The X-ray diffraction (XRD) reveals the structural defects induced by the Ga doping. The room temperature photoluminescence (PL) spectra of Ga-doped ZnO nanowires show strong UV emission between 382.394 and 385.279 nm with negligible visible emission.

  • PDF

Characteristics of $ZnGa_2O_4$ phosphor prepared by Precipitation method and Solid-state reaction method (침전법과 고상반응법으로 제조한 $ZnGa_2O_4$ 형광체의 특성)

  • Cha, Jae-Hyeok;Kim, Se-Jun;Kwak, Hyun-Ho;Choi, Hyung-Wook
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2007.06a
    • /
    • pp.383-384
    • /
    • 2007
  • The nano and micro-sized $ZnGa_2O_4$ phosphor were prepared by precipitation method and solid-state method. The luminescence, formation process and structure of phosphor powders were investigated by means of XRD, SEM and PL. The result of XRD analysis showed that $ZnGa_2O_4$ spinel structure was formed at as-prepared in the case of precipitation method. However, micro-sized phosphor was required high heating treatment to have a satisfactory spinel structure. The CL intensity of nano-sized phosphor was about 4-fold higher than that of micro-sized phosphor. The emission spectra of all $ZnGa_2O_4$ phosphor show a self activated blue emission band at around 420 nm in the wide range of 300~600 nm.

  • PDF

Influence of (Ga,Al) : ZnO Window Layer Thickness on the Performance of CIGS Thin Film Solar Cells ((Ga,Al):ZnO 투명전극층의 두께에 따른 CIGS 박막 태양전지의 성능 변화 연구)

  • Cha, Jung-Hwa;Jeon, Chan-Wook
    • Current Photovoltaic Research
    • /
    • v.5 no.1
    • /
    • pp.28-32
    • /
    • 2017
  • In this paper, (Ga,Al):ZnO layers were deposited by sputtering to evaluate the device performance according to the thickness of the layer. As the thickness increased, low transmittance was observed, but the electrical resistance was improved. On the other hand, the highest efficiency was recorded at 400 nm device than a 500 nm of it. Therefore, since the critical thickness exists, it is necessary to set an adequate TCO layer thickness in consideration of the characteristics of the underlying film and the device.

Device Degradation with Gate Lengths and Gate Widths in InGaZnO Thin Film Transistors (게이트 길이와 게이트 폭에 따른 InGaZnO 박막 트랜지스터의 소자 특성 저하)

  • Lee, Jae-Ki;Park, Jong-Tae
    • Journal of the Korea Institute of Information and Communication Engineering
    • /
    • v.16 no.6
    • /
    • pp.1266-1272
    • /
    • 2012
  • An InGaZnO thin film transistor with different gate lengths and widths have been fabricated and their device degradations with device sizes have been also performed after negative gate bias stress. The threshold voltage and subthreshold swing have been decreased with decrease of gate length. However, the threshold voltages were increased with the decrease of gate lengths. The transfer curves were negatively shifted after negative gate stress and the threshold voltage was decreased. However, the subthreshold swing was not changed after negative gate stress. This is due to the hole trapping in the gate dielectric materials. The decreases of the threshold voltage variation with the decrease of gate length and the increase of gate width were believed due to the less hole injection into gate dielectrics after a negative gate stress.

Effects of thin-film thickness on device instability of amorphous InGaZnO junctionless transistors (박막의 두께가 비정질 InGaZnO 무접합 트랜지스터의 소자 불안정성에 미치는 영향)

  • Jeon, Jong Seok;Jo, Seong Ho;Choi, Hye Ji;Park, Jong Tae
    • Journal of the Korea Institute of Information and Communication Engineering
    • /
    • v.21 no.9
    • /
    • pp.1627-1634
    • /
    • 2017
  • In this work, a junctionless transistor with different film thickness of amorphous InGaZnO has been fabricated and it's instability has been analyzed with different film thickness under positive and negative gate stress as well as light illumination. It was found that the threshold voltage shift and the variation of drain current have been increased with decrease of film thickness under the condition of gate stress and light illumination. The reasons for the observed results have been explained by stretched-exponential model and device simulation. Due to the reduced carrier trapping time with decrease of film thickness, electrons and holes can be activated easily. Due to the increase of vertical channel electric field reaching the back interface with decrease of film thickness, more electrons and holes can be accumulated in back interface. When one decides the film thickness for the fabrication of junctionless transistor, the more significant device instability with decrease of film thickness should be consdered.

Study of relation between gate overlap length and device reliability in amorphous InGaZnO thin film transistors (비정질 InGaZnO 박막트랜지스터에서 Gate overlap 길이와 소자신뢰도 관계 연구)

  • Moon, Young-Seon;Kim, Gun-Young;Jeong, Jin-Yong;Kim, Dae-Hyun;Park, Jong-Tae
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
    • /
    • 2014.10a
    • /
    • pp.769-772
    • /
    • 2014
  • The device reliability in amorphous InGaZnO under NBS(Negative Bias Stress) and hot carrier stress with different gate overlap has been characterized. Amorphous InGaZnO thin film transistor has been measured. and is channel $width=104{\mu}m$, $length=10{\mu}m$ with gate overlap $length=0,1,2,3{\mu}m$. The device reliability has been analyzed by I-V characteristics. From the experiment results, threshold voltage variation has been increased with increasing of the gate overlap length after hot carrier stress. Also, threshold voltage variation has been decreased and Hump Effect has been observed later with increasing of the gate overlap length after NBS.

  • PDF

Alanysis of the Optical Properties of p-type ZnO Thin Films Doped by P based on Ampouele-tube Method (Ampoule-tube 법으로 Phosphorus를 도핑한 P형 ZnO 박막의 광학적 특성 분석)

  • Yoo, In-Sung;Oh, Sang-Hyun;So, Soon-Jin;Park, Choon-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2006.11a
    • /
    • pp.145-146
    • /
    • 2006
  • The most Important research topic in the development of ZnO LED and LD is the production of p-type ZnO thin film that has minimal stress with outstanding stoichiometric ratio. In this study, Phosphorus diffused into the undoped ZnO thin films using the ampoule-tube method for the production of p-type znO thin films. The undoped ZnO thin films were deposited by RF magnetron sputtering system on $GaAs_{0.6}P_{0.4}$/GaP and Si wafers. 4N Phosphorus (P) was diffused into the undoped ZnO thin films in ampoule-tube which was performed and $630^{\circ}C$ during 3hr. We found the diffusion condition of the conductive ZnO films which had p-type properties with the highest mobility of above 532 $cm^2$/Vs compared with other studies PL spectra measured at 10K for the purpose of analyzing optical properties of p-type ZnO thin film showed strong PL intensity in the UV emission band around 365nm ~ 415nm and 365nm ~ 385nm.

  • PDF

Compositional Dependence of Photoluminescence of $ZnGa_2O_4$

  • Lee, Yong-Jei;Sahn Nahm;Kim, Myong-Ho;Suh, Kyung-Soo;Cho, Kyung-Ik;Yoo, Hyung-Joon;Byun, Jae-Dong
    • The Korean Journal of Ceramics
    • /
    • v.3 no.2
    • /
    • pp.139-143
    • /
    • 1997
  • The photoluminescence characteristics of the zinc gallate have been investigated as a function of the composition and the firing atmosphere. Two distinct emission bands were observed whose peaks are 360 nm and 430 nm respectively. These emission bands are considered to be from two different emission centers. For $ZnO/Ga_2O_3$=49.3/50.7 or higher, 430 nm band is predominant and for $ZnO/Ga_2O_3$=49.2/50.8 or lower, 360nm band becomes predominant, whereas 430 nm band is almost completely suppressed. The shift of emission peak is though to be due to the change of the cation distribution with the zinc content in the spinel zinc gallate. Also, the emission centers responsible for the 360nm band are considered to be more efficient energy absorbers than the ones for the 430 nm band. Highly efficient green emitting phosphor was obtained by activating Zn-deficient zinc gallate with manganeses.

  • PDF