• Journal of the Korean Society for Precision Engineering
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• v.30 no.11
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• pp.1193-1201
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• 2013

Improved far field type(improved type) megasonic applicable to the cleaning equipment of single wafer processing type has been developed. In this study, to improve the uniformity of acoustic pressure distribution(APD), we utilize far field with relatively uniform APD, piezoelectric ceramic with a triangle hole in its center to prevent standing wave resulted from radial mode, and reflected wave from the wall of waveguide. On the basis of these methods, two analysis models of improved type were designed to which piezoelectric ceramic of different shape of electrode attached, and APD were analyzed by means of finite element method, and then one of them was selected by analysis results, finally, the selected model was fabricated. Test results show that the fabricated is better in the uniformity of APD than the imported and the conventional, also the fabricated shows high particle removal efficiency of 92.3% using DI water alone as a cleaning solution.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2007.10a
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• pp.747-750
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• 2007

This study proposes that chlorine residue after metal etch as the source of metal corrosion, and charges should be removed by optimizing etch, PR strip and cleaning condition. Charges distributed along the metal line acts as a source of tungsten (W) plug corrosion when associated with following cleaning solution. In cleaning process after metal etch and PR strip, chemical selection is significantly important in terms of metal corrosion. Optimal corrosion preventive PH, no metal attack (choice of optimal inhibitants), high by product removal efficiency and optimal de ionized water treatment condition is critical to the metal corrosion prevention.

• Progress in Superconductivity and Cryogenics
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• v.23 no.3
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• pp.14-19
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• 2021

The reduction of carbon dioxide emissions becomes a global issue, the main source of carbon dioxide emissions in the Asian region is the energy conversion sector, especially coal-fired power plants. We are working to develop technologies that will at least limit the increase in carbon dioxide emissions from the thermal power plants as one way to reduce carbon dioxide emissions. Our research aims to reduce carbon dioxide emissions by removing iron oxide scale from the feedwater system of thermal power plants using a superconducting high-gradient magnetic separation (HGMS) system, thereby reducing the loss of power generation efficiency. In this paper, the background of thermal power plants in Asia is outlined, followed by a case study of the introduction of a chemical cleaning line at an actual thermal power plant in Japan, and the possibility of introducing it into the thermal power plants in China based on the results.

• Korean Journal of Dental Materials
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• v.44 no.1
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• pp.61-68
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• 2017

This study evaluated the effects of various cleaning methods on the shear bond strength of zirconia ceramics after saliva contamination. Eighty zirconia disk specimens were divided into 8 groups. All groups were treated with one coat of MDP primer. All specimens (except the negative control) were contaminated with human saliva on the zirconia surface. The positive control went through the bonding procedure immediately after contamination without any cleaning procedure. With the exception of control groups, the remaining six groups were rinsed with water and either applied with MDP recoating (WATER+MDP) or without MDP recoating (WATER). While some were cleaned with a Ivoclean with MDP recoating (IVOCLEAN+MDP) or not applied with MDP recoating(IVOCLEAN), others were cleaned with a 1% NaOCl solution with MDP recoating (NaOCl+MDP) or without MDP recoating (NaOCl). The shear bond strength of all specimens were measured after being stored in distilled water at $37^{\circ}C$ for 24 hours. The data was analyzed statistically by an analysis of ANOVA, Tukey's post hoc test and Student's t-test was used to compare the shear bond strength according to the re-coating of MDP after the cleaning procedure. The positive control group showed the lowest shear bond strength value, and the WATER group and NaOCl group showed no significant difference when compared to the positive control group. The IVOCLEAN group showed significantly higher shear bond strength when compared to Water group and NaOCl group but not with the group of negative control. After rinsing with water or the NaOCl solution, the comparison of the single coating of MDP and re-coating of MDP showed different shear bond strengths but there was no significant difference to the negative control. After rinsing with Ivoclean, there was no significant difference to the negative control regardless of the recoating of MDP. In conclusion, the shear bond strength was affected by the cleansing procedure and Ivoclean was found to be effective regardless of the re-coating of MDP. When water or the NaOCl solution is used to remove surface contaminants, the re-coating of MDP provides a positive effect on cementation.

• The Journal of Korean Society for School & Community Health Education
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• v.1 no.2
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• pp.87-104
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• 2000

The purpose of this study was to obtain the basic data as a improvement method through the fact-revealing concerning the drinking water management of school and utilization of student. The problems of the research are as follows: First, to investigate status of management of drinking water by area and school. Second, to investigate student's utilization of drinking water by area and school. 1,400 students was selected at 45 elementary and middle-high schools located in Kang-won province, and this study was constituted of two questionnaires(for school's questionnaire and student's questionnaire). The results was analyse through the frequency analysis, $x^2$-test on the basis of the above research problem by SPSS program. The findings of this research are as follows; 1) The Management of School Drinking Water First, the source of school drinking water was mostly piped water. Inspection of water quality has been fulfilled under four times a year, in the other hands, from the result inspection, the schools which was given inadequate determination was 22.2%. Second, reservoir cleaning and hygiene inspection failed far short of the regulations. Especially, reservoir cleaning was managed by exterior consignment industry not low-level officials. Third, school water drinking was the most supplied through the type of water purifier. Water purifier has been distributed to city-located and middle-high school highly, factually the water from water purifier was served with water cup. Fourth, the selection standard of water drinking manager showed slightly differently by school, accordingly there need to develope integrated system with the respective to its effective systematic management. Fifth, water cup was mostly treated by only water clear, which is to vindicate the problems concerning hygiene management. 2) Utilization of school student on Drinking Water First, Disbelief on drinking water of school student was very high. Especially, proportion of middle-high school student's disbelief of drinking water was higher than elementary school student, also girls higher than boys. Many of student have heard to don't drink water from around people. And there were showed meaningful differences by area and school. Second, It was showed many student recognize had to utilize water purifier, boiled water. However, they have still drunken the tap water or portable water from their home. Third, Many of student showed negative response with the respective to the management conditions of drinking water in classroom, There were showed meaningful differences by area and school. From the fact-revealing of water cup management, Students mostly answered to 'only water clear' and the answer of 'None use' or 'With personal cup' was higher. Fourth, In bad experience of Drinking Water, student mostly answered to 'occasionally' and there were showed meaningful differences by school. student's disease experience with school drinking water was few and there were showed meaningful differences by area and gender.

• Food Science and Preservation
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• v.17 no.3
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• pp.405-409
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• 2010

Surface cleaning is both essential and troublesome when a consumer seeks to eliminate soil attached to the surface of fresh ginseng because all ginseng purchased in the market is covered with soil, reflecting the post-harvest situation. To facilitate ginseng use at home, a fresh-cut type of ginseng is required. As a first step toward production of such ginseng, several washing and dipping treatments were investigated with respect to surface cleaning and reduction of microbial populations on fresh ginseng. In terms of microbial distribution on the surface of fresh ginseng, higher levels of viable bacteria (6.63 log CFU/each) and fungi (5.12 log CFU/each) were present on the rhizome head than on other regions of the root. Of the washing treatments tested, hand-brushing was effective for surface cleaning and to reduce microorganism levels on fresh ginseng, but use of a high-pressure water spray followed by hand-brushing was optimally effective. To further reduce the levelsof microorganisms on the surface of fresh ginseng after washing, additional dipping treatments in 70% (v/v) ethanol and electrolyzed acidic water (at pH 2.3) were somewhat effective but showed no significant differences compared with other dipping treatments tested, including a 3 ppm ozone solution, a 200 ppm sodium hypochlorite solution, or hot water at $50^{\circ}C$.

• Journal of Korean Society on Water Environment
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• v.22 no.5
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• pp.824-830
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• 2006

Several tests were conducted to optimize the design parameters of ln-situ soil flushing processes for diesel contaminated soil. According to the batch extraction test for three anionic surfactants evaluation, Calgonit limiting bubble occurrence was selected for its higher oil cleaning efficiency. After optimum surfactant selection, there were many sets of column flushing test. Over 70% of BTEX was removed in this surfactant dose with 400% of soil volume. In the case of no surfactant addition flushing in column, so called "blank flushing test", BTEX removal rate was 64%. But when we reused the effluent for the cleaning solution, the removal rate was decreased to 46.9%. This result showed reabsorption of oil occurred on the soil. With the addition of Calgonit solution to the diesel contaminated column, BTEX was removed up to 98.9% during the first flushing and 99.4% for the second recirculation flushing. In microcosm tests, diesel contaminated soils were cleaned by both surfactant flushing and biological activities. In anoxic condition, nitrate was used as an electron acceptor while the surfactant and the oil were used an electron donor. BTEX removal efficiency could be achieved up to 80% by biological degradation.

• Journal of the Semiconductor & Display Technology
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• v.4 no.4 s.13
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• Clean Technology
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• v.7 no.3
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• pp.179-185
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• 2001

Some companies are trying to develop the microfiltration membranes because most of them used as a prefilter is imported in Korea. However, they are faced with much difficulty such as characterization of membrane and controlling of pore size on development. In this study, a microfiltration membrane developed by a company was evaluated for applicability to use as a prefilter before reverse osmosis membrane process in production of ultra pure water. The optimum feed pressure for the raw water was obtained at 0.2 to 0.4 atm. At that time, turbidity of the treated water was 0.4 NTU and flux was 6,000 to $9,000L/m^2/hr$. In case of the conventionally treated water, it showed the very stable flux and turbidity at 90% of recovery rate. The chemical cleaning was helpful to reduce the TMP for treated water. The turbidity was improved from 0.3 NTU to 0.1 NTU after chemical cleaning.

• Environmental and Resource Economics Review
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• v.18 no.4
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• pp.767-785
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• 2009

This paper studies the effect of industrial waste water effluent charge reform. The goal of the present effluent charge system is to use environmental resources in an efficient way by charging the cost for removing emitted water pollutants. However, the present system is a type of regulation instead of providing economic incentives to the industry. That is, if a firm emits pollutants greater than the limit, it has to pay an amount greater than the cost of cleaning them taking into account the amount of waste water discharged, region, the number of violation and the level of density of pollutants. However, the excessive fees have resulted in the lowest ratio of revenue-to-effluent charge among all environmental charges. The paper estimates the effect of the change in effluent fee and revenue when the present effluent charge system is converted to one that offers economic incentives. The results show that the amount of waste water effluent charge is about four times larger than the estimated environmental cleaning cost. In addition, the results show that by modifying the effluent charge system, the ratio of revenue to effluent charge can be raised.