• 제목/요약/키워드: In-situ characterization

검색결과 252건 처리시간 0.029초

Cross-sectional TEM Specimens Priparation of Precisely Selected Regions of Semiconductor Devices using Focused Ion Beam Milling

  • 김정태;김호정;조윤성;최수한
    • 한국재료학회지
    • /
    • 제3권2호
    • /
    • pp.193-196
    • /
    • 1993
  • A procedure for preparing cross-sectional specimens for transmission electron microscopy(TEM)by focused ion beam(FIB)milling of specific regions of semiconductor devices is outlined. This technique enables TEM specimens to be pripared at precisely preselected area. In-situ #W thin film deposition on the top surface of desired site is complementally used to secure the TEM specimens to be less wedge shaped, which is main shortcoming of previous FIB-assisted TEM sample preparation technique. This technique is quite useful for the TEM sample priparation for fault finding and the characterization of fabrication process associated with submicron contact technologies.

  • PDF

플라즈마 분자선 에피탁시 법으로 성장된 비극성 ZnO 박막의 표면 형상 분석 (Surface Morphology Characterization of Nonpolar ZnO Thin Films Grown by Plasma-Assisted Molecular Beam Epitaxy)

  • 이재욱;이정용;한석규;홍순구
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2007년도 춘계학술발표회 초록집
    • /
    • pp.161-162
    • /
    • 2007
  • (1-102) R-면 사파이어 기판 위에 플라즈마 분자선 에피탁시 법으로 성장시킨 비극성 ZnO 박막의 표면 형상을 원자력간현미경(AFM) 및 투과전자현미경으로 분석하였다. AFM 관찰 결과 ZnO<0001> 방향으로 길쭉한 제방 모양의 표면 형상이 나타남을 알 수 있었고, 고분해능 투과전자현미경 관찰을 통해 박막 성장 중에 관찰되는 V(chevron 모양) 형상의 in-situ RHEED 패턴을 야기시키는 박막 표면의 facet 면을 원자 level에서 확인하였다.

  • PDF

Natural Ripening versus Artificial Enhancing of Silty Reclaimed Tidal Soils for Upland Cropping Tested by Profile Characterization

  • Ibrahim, Muhammad;Han, Kyung-Hwa;Lee, Kyung-Do;Youn, Kwan-Hee;Ha, Sang-Keun;Zhang, Yong-Seon;Hur, Seung-Oh;Yoon, Sung-Won;Cho, Hee-Rae
    • 한국토양비료학회지
    • /
    • 제45권1호
    • /
    • pp.9-15
    • /
    • 2012
  • This study was performed to produce basic data for silty reclaimed tidal lands and to develop techniques of environmentally-friendly utilization in agricultural system. We chose the two sites in Saemangeum reclaimed tidal lands, one (Site I) has been treated with cultivating green manure and conducting the desalinization process through submergence since April, 2007 and the other (Site II) has been under natural condition without artificial treatment. In situ and ex situ physic-chemical properties were determined and comparisons were made for soil profiles examined at these two sites in April 2009. Surface soil of Site I had lower EC and higher field saturated hydraulic conductivity than those of Site II, uncultivated land. Especially, exchangeable sodium content was lowest in Site I Ap1 layer than in other layers. This is probably due to flooding desalination and green manure cultivation. Besides, Ap1 and A2 layers of soil profile in Site I showed brighter soil color and more root observation than those of Site II. This is probably due to green manure cultivation. By the large, for high cash upland crops and intensive agricultural use of silty reclaimed tidal land, site-specific soil ripening such as flooding desalination and green manure cultivation could be useful.

Microbial Community Analysis of 5-Stage Biological Nutrient Removal Process with Step Feed System

  • Park, Jong-Bok;Lee, Han-Woong;Lee, Soo-Youn;Lee, Jung-Ok;Bang, Iel-Soo;Park, Eui-So;Park, Doo-Hyun;Park, Yong-Keun
    • Journal of Microbiology and Biotechnology
    • /
    • 제12권6호
    • /
    • pp.929-935
    • /
    • 2002
  • The 5-stage biological nutrient removal (BNR) process with step feed system showed a very stable organic carbon and nutrient removal efficiency ($87\%\;COD\,;79\%\;nitrogen,\;and\;87\%$ phosphorus) for an operation period of 2 years. In each stage at the pilot plant, microbial communities, which are important in removing nitrogen and phosphorus, were investigated using fluorescence in-situ hybridization (FISH) and 165 rDNA characterization. All tanks of 5-stage sludge had a similar composition of bacterial communities. The totat cell numbers of each reactor were found to be around $2.36-2.83{\times}10^9$ cells/ml. About $56.5-62.0\%$ of total 4,6-diamidino-2-phenylindol (DAPI) cells were hybridized to the bacterial-specific probe EUB388. Members of ${\beta}$-proteobacteria were the most abundant proteobacterial group, accounting for up to $20.6-26.7\%$. The high G+C Gram-positive bacterial group and Cytophaga-Flexibacter cluster counts were also found to be relatively high. The beta subclass proteobacteria did not accumulate a large amount of polyphosphate. The proportion of phosphorus-accumulating organisms (PAOs) in the total population of the sludge was almost $50\%$ in anoxic-1 tank. The high G+C Gram-positive bacteria and Cytophaga-Flexibacter cluster indicate a key role of denitrifying phosphorus-accumulating organisms (dPAOs). Both groups might be correlated with some other subclass of proteobacteria for enhancing nitrogen and phosphorus removal in this process.

Dual Responsive Pectin Hydrogels and Their Silver Nanocomposites: Swelling Studies, Controlled Drug Delivery and Antimicrobial Applications

  • Reddy, P. Rama Subba;Eswaramma, S.;Krishna Rao, K.S.V.;Lee, Yong Ill
    • Bulletin of the Korean Chemical Society
    • /
    • 제35권8호
    • /
    • pp.2391-2399
    • /
    • 2014
  • Novel dual responsive pectin hydrogels composed from poly(acrylamidoglycolic acid-co-vinylcaprolactam)/Pectin (PAV-PC) and also PAV-PC hydrogels are used as templates for the production of silver nanoparticles. 5-Fluorouracil is an anticancer drug and has been loaded in situ into PAV-PC hydrogels. Structure and morphology characterization of PAV-PC hydrogels were investigated by fourier transform infrared spectroscopy, differential scanning calorimetry, thermo gravimetric analysis, X-ray diffraction studies, scanning electron microscopy and transmission electron microscopy. The results revealed a molecular level dispersion of the drug in PAV-PC hydrogels. In vitro release of 5-fluorouracil from the PAV-PC hydrogels has been carried out in GIT fluids as well as in various temperatures. 5-Fluorouracil released from PAV-PC hydrogels was 50% at pH 1.2, and 85% at pH 7.4 within 24 h. The release profile was characterized with PAV-PC hydrogels and initial burst effect was significantly reduced in two buffer media (1.2 and 7.4), followed by a continuous and controlled release phase, the drug release mechanism from polymer was due to Fickian diffusion. In situ fabrication of silver nanoparticles inside the hydrogel network via the reduction of sodium borohydrate by PAV-PC chains led to hydrogel nanocomposites. The diameter of the nanocomposites was about 50-100 nm, suitable for uptake within the gastrointestinal tract due to their nanosize range and mucoadhesive properties. These nanocomposite PAV-PC hydrogels showed strong antimicrobial activity towards Bacillus subtilis (G+ve) and Escherichia coli (G-ve).

Synthesis and Characterization of Biodegradable Thermo- and pH-Sensitive Hydrogels Based on Pluronic F127/Poly($\varepsilon$-caprolactone) Macromer and Acrylic Acid

  • Zhao, Sanping;Cao, Mengjie;Wu, Jun;Xu, Weilin
    • Macromolecular Research
    • /
    • 제17권12호
    • /
    • pp.1025-1031
    • /
    • 2009
  • Several kinds of biodegradable hydrogels were prepared via in situ photopolymerization of Pluronic F127/poly($\varepsilon$-caprolactone) macromer and acrylic acid (AA) comonomer in aqueous medium. The swelling kinetics measurements showed that the resultant hydrogels exhibited both thermo- and pH-sensitive behaviors, and that this stimuli-responsiveness underwent a fast reversible process. With increasing pH of the local buffer solutions, the pH sensitivity of the hydrogels was increased, while the temperature sensitivity was decreased. In vitro hydrolytic degradation in the buffer solution (pH 7.4, $37^{\circ}C$), the degradation rate of the hydrogels was greatly improved due to the introduction of the AA comonomer. The in vitro release profiles of bovine serum albumin (BSA) in-situ embedded into the hydrogels were also investigated: the release mechanism of BSA based on the Peppas equation was followed Case II diffusion. Such biodegradable dual-sensitive hydrogel materials may have more advantages as a potentially interesting platform for smart drug delivery carriers and tissue engineering scaffolds.

매립지 침출수 현장 처리를 위한 폴리우레탄과 개질토의 특성 분석 실험에 관한 연구 (Characterization of Polyurethane and Soil Layers for In-situ Treatment of Landfill Leachate)

  • 박찬수;정영욱;박중섭;백원석;신원식;천병식;한우선;박재우
    • 한국물환경학회지
    • /
    • 제23권2호
    • /
    • pp.281-286
    • /
    • 2007
  • A chemical and biological permeable barrier with economic feasibility is suggested to treat landfill leachate in this study. The proposed composite layers consist of bentonite, and polyurethane (PU) foam that is mixed with powdered activated carbon (PAC) and inoculated with microorganisms from local wastewater treatment plant. Each layer is mixed with local sand, and yellow brown soil. Batch tests were conducted to investigate the sorptions of nitrate on the PU foam and PAC, and nitrification/denitrification rate of each layer material. Nitrification occurred in 30 minutes with initial ammonia concentration of 100 mg/L, and the concentration of nitrate attached in the PU foam increased after 270 minutes. Results of denitrification batch tests showed 76.6%, 87.3% and 88% of nitrate removal efficiency at 10%, 20% and 30% of the volume ratio of PU foam, respectively. The pH increased from 7 to 9.42, and alkalinity increased from 980 mg/L to 1720 mg/L during the denitrification batch tests. In the column experiments using the proposed composite layers with 20% of the volume ratio of the PU foam, about 96% of BOD, 63% of COD, 58.1~79.5% of total nitrogen were removed.

전도성 물질 서스펜션을 함유한 마이크로캡슐 (Preparation and Characterization of Functional Microcapsules Containing Suspensions of Conducting Materials)

  • 임대우;권원호
    • 공업화학
    • /
    • 제26권1호
    • /
    • pp.40-46
    • /
    • 2015
  • 카본나노튜브(CNT)와 폴리아닐린(PANI)과 같은 도전성물질의 서스펜션을 함유한 마이크로캡슐이 멜라민과 포름알데히드의 in situ 중합법에 의해 제조되었다. 평균직경 $10-20{\mu}m$의 안정된 마이크로캡슐이 관찰되었으며, 이 마이크로 캡슐의 표면 모폴로지와 화학구조, 열적특성을 광학현미경, 주사전자현미경(SEM), 적외선 분광분석(FT-IR), 열중량분석(TGA) 등으로 측정하였다. 테트라클로로에틸렌과 아이소파 G (isopar-G) 및 CNT나 PANI로 구성된 도전성물질 서스펜션을 함유한 마이크로캡슐의 전기전도도를 캡슐벽을 깨뜨린 후 측정하였다. 마이크로캡슐의 심물질인 CNT나 PANI의 양이 증가할수록 측정된 전류는 증가하였다. 분쇄된 캡슐의 심물질의 전도도를 측정한 결과는 CNT나 PANI가 캡슐이 깨졌을 때, 빠져나온 심물질인 전도성 물질이 단락된 서킷을 연결해 줄 수 있는, 자기치유형 전자재료 시스템에 폴리 멜라민 포름알데히드 베이스의 코어 쉘(core shell) 마이크로캡슐이 적용 가능한 것을 보여준다.

RPCVD를 이용한 실리콘 게르마늄 이종 접합 바이폴라 트랜지스터 제작 및 특성 분석 (Fabrication and characterization of the SiGe HBTs using an RPCVD)

  • 한태현;서광열
    • 한국전기전자재료학회논문지
    • /
    • 제17권8호
    • /
    • pp.823-829
    • /
    • 2004
  • In this paper, non-self-aligned SiGe HBTs with ${f}_\tau$ and${f}_max $above 50 GHz have been fabricated using an RPCVD(Reduced Pressure Chemical Vapor Deposition) system for wireless applications. In the proposed structure, in-situ boron doped selective epitaxial growth(BDSEG) and TiSi$_2$ were used for the base electrode to reduce base resistance and in-situ phosphorus doped polysilicon was used for the emitter electrode to reduce emitter resistance. SiGe base profiles and collector design methodology to increase ${f}_\tau$ and${f}_max $ are discussed in detail. Two SiGe HBTs with the collector-emitter breakdown voltages ${BV}_CEO$ of 3 V and 6 V were fabricated using SIC(selective ion-implanted collector) implantation. Fabricated SiGe HBTs have a current gain of 265 ∼ 285 and Early voltage of 102 ∼ 120 V, respectively. For the $1\times{8}_\mu{m}^2$ emitter, a SiGe HBT with ${BV}_CEO$= 6 V shows a cut-off frequency, ${f}_\tau$of 24.3 GHz and a maximum oscillation frequency, ${f}_max $of 47.6 GHz at $I_c$of 3.7 mA and$V_CE$ of 4 V. A SiGe HBT with ${BV}_CEO$ = 3 V shows ${f}_\tau$of 50.8 GHz and ${f}_max $ of 52.2 GHz at $I_c$ of 14.7 mA and $V_CE$ of 2 V.

PECVD에 의한 OLED 소자의 Thin Film Passivation 특성 (Characterization of Thin Film Passivation for OLED by PECVD)

  • 김관도;장석희;김종민;장상목
    • Korean Chemical Engineering Research
    • /
    • 제50권3호
    • /
    • pp.574-581
    • /
    • 2012
  • OLED 소자는 수분과 산소의 침투에 의하여 유기물이 열화되어 수명이 감소하는 문제점을 가지고 있다. 이러한 문제점을 해결하기 위해서 OLED 소자의 봉지 기술이 최근 연구되고 있다. 현재 유리나 금속 용기를 이용하여 캡슐화 하는 방법이 널리 사용되고 있지만 이러한 방법으로는 유연한(flexible) 소자의 구현이 어렵기 때문에 이를 대체할 수 있는 기술들이 연구되고 있다. 박막 필름을 이용한 OLED의 봉지 기술은 유연한 디스플레이에 적용할 수 있는 기술로 사용될 수 있다. 본 연구에서는 치밀하고 결함이 없는 패시베이션(passivation) 박막을 형성하기 위해서 상온에서 증착이 가능한 PECVD를 이용한 무기 박막 증착 방법을 개발하고 증착 조건과 구조에 따른 OLED의 특성 변화를 분석하였다. 하나의 시스템에서 in-situ로 패시베이션할 수 있는 시스템 및 공정을 구축하였으며 단일 무기 박막의 WVTR(Water Vapor Transmission Rate) 값을 $1{\times}10^{-2}g/m^2{\cdot}day$ 이하로 확보하였고 제작된 박막을 패시베이션막으로 유연한 디스플레이에 적용할 수 있는 가능성을 제시하였다.