• 제목/요약/키워드: Hot Embossing

검색결과 102건 처리시간 0.029초

AAO를 이용한 나노 패턴 마스터 제작에 관한 연구 (Study on Fabrication of Highly Ordered Nano Patterned Master by Using Anodic Aluminum Oxidation)

  • 신홍규;권종태;서영호;김병희
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 춘계학술대회 논문집
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    • pp.368-370
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    • 2007
  • AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. The resulting good filled uniform nano molded structure through hot embossing molding process shows the validity of the fabricated nano pattern masters.

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Direct writing 기법을 이용한 유기태양전지용 격벽 stamper 금형 제작 및 성형에 관한 연구 (Study on the stamper mold manufacture and molding of barrier ribs for polymer solar cells using direct writing method)

  • 황철진;김종선;홍석관;오정길;강정진
    • Design & Manufacturing
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    • 제2권6호
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    • pp.28-32
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    • 2008
  • Polymer solar cells are a type of organic solar cell (also called plastic solar cell), or organic photovoltaic cell that produce electricity from sunlight using polymers. It is a relatively novel technology, they are being researched by universities, national laboratories and several companies around the world. In this paper, stamping mold of barrier ribs for polymer solar cells was manufactured by lithography and electroforming which can control the height of pattern and 80nl of barrier ribs was manufactured by using hot embossing.

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변형 LIGA 공정을 통해 제작된 마이크로 렌즈 어레이의 모델링 및 성형 (Modeling and Replication of Microlens Arrays Fabricated by a Modified LIGA Process)

  • 김동성;이현섭;이봉기;양상식;이승섭;권태헌
    • 소성∙가공
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    • 제15권1호
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    • pp.34-41
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    • 2006
  • Microlens arrays were fabricated by a modified LIGA process composed of the exposure of a PMMA (Polymethylmethacrylate) sheet to deep x-rays and subsequent thermal treatment. A successful modeling and analyses for microlens formation were presented according to the experimental procedure. A nickel mold insert was fabricated by the nickel electroforming process on the PMMA microlens arrays fabricated by the modified LIGA process. For the replication of microlens arrays having various diameters with different foci on the same substrate, both hot embossing and microinjection molding processes have been successfully utilized with the fabricated mold insert. Replicated microlenses showed very good surface roughness with the order of 1 nm. The focal lengths of the injection molded microlenses were successfully estimated theoretically and also measured experimentally.

플라스틱 미세구조 성형 해석기술 리뷰 (A Review of Numerical Simulation Methods for Molding Processes of Plastic Microstructures)

  • 박장민;차경제
    • 한국기계가공학회지
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    • 제14권4호
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    • pp.14-20
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    • 2015
  • Molding technologies for plastic microstructures have been extensively investigated during the last two decades, and theoretical and numerical studies on the micro molding process have provided efficient tools for the development of such molding technologies. In this paper, we present a review of numerical simulation methods for the micro molding process. Basic models for a description of the material property, governing equations of the flow and heat transfer during the molding process, and numerical methods will be described. Particularly, numerical simulations for micro injection molding and hot embossing processes will be presented, and their main features noted and compared to those for conventional molding processes.

LIGA공정을 이용한 정밀 고분자 광도파로 제작 (Fabrication of Polymeric Optical Waveguide by LIGA)

  • 김진태;김병철;최춘기;윤근병;정명영
    • 대한기계학회논문집A
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    • 제27권6호
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    • pp.997-1006
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    • 2003
  • LICA technique evolved as a basic fabrication process fur micro-structure. The present report deals with the basic technological features in the sequence of the LIGA technique such as deep x-ray lithography(DXRL), electroplating, and moulding processes at Pohang Light Source (PLS). We designed 3-D structured master for fabrication of polymeric optical wavegude and manufactured polymeric optical wavegude with the same using hot embossing process. Polymeric optical waveguide could be produced with ${\pm}$ 1 $\mu\textrm{m}$ accuracy and good surface roughness.

열간나노임프린트공정을 이용한 평판형 폴리머 소재의 선형 패턴 제작에 관한 연구 (A study on Linear Pattern Fabrication of Plate-type Polymer by Using Thermal Nano Imprint Lithography Process)

  • 정유나;이창수;윤성원;강충길
    • 소성∙가공
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    • 제18권8호
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    • pp.616-624
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    • 2009
  • In this work we demonstrate the hot-embossing process under different forming conditions such as forming temperature, load, and holding time in pressing, in order to determine the suitable conditions required for linear patterning on polymer plates (PC). Results showed that the replicated pattern depth increased in proportion to an increase in the forming temperature, load, and time. The reduction of the workpiece thickness increased according to the holding time in the pressing process. In the process of time, the reduction ratio of the workpiece thickness decreased due to the surface area increment of the workpiece, while the pressure on the workpiece declined. In order to reduce the bulging ratio we introduced a temperature difference between the upper and the lower punch.

나노임프린트 리소그래피를 이용한 곡면 기판 위에 정렬된 나노 볼 패턴 형성에 관한 연구 (Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography)

  • 홍성훈;배병주;곽신웅;이헌
    • 한국표면공학회지
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    • 제41권6호
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    • pp.331-334
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    • 2008
  • The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at $130^{\circ}C$ and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.

변형 LIGA 공정을 통해 제작된 마이크로 렌즈 어레이의 모델링 및 성형 (Modeling and Replication of Microlens Arrays Fabricated by a Modified LIGA Process)

  • 김동성;이현섭;이봉기;양상식;이승섭;권태헌
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2005년도 금형가공,미세가공,플라스틱가공 공동 심포지엄
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    • pp.23-28
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    • 2005
  • Microlens arrays were fabricated using a modified LIGA process based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep x-rays and subsequent thermal treatment. A successful modeling and analyses for microlens formation were presented according to the experimental procedure. A nickel mold insert was fabricated by the nickel electroforming process on the PMMA microlens arrays fabricated by the modified LIGA process. For the replication of microlens arrays having various diameters with different foci on the same substrate, the hot embossing and the microinjection molding processes have been successfully utilized with the fabricated mold insert. Fabricated microlenses showed good surface roughness than the mold insert. The focal lengths of the injection molded microlenses were successfully measured experimentally and also estimated theoretically.

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PC소재의 선형 패턴 제작에 관한 연구 (A study on Linear Pattern Fabrication of Plate-type PC)

  • 정유나;이은경;강충길
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2008년도 춘계학술대회 논문집
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    • pp.277-280
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    • 2008
  • Recently, a demand of nano/micro patterned polymer for display or biochip has been rising. Then many studies have been carried out. Nano/micro-embossing is a deformation process where the workpiece materials is heated to permit easier material flow and then forced over a planar patterned tool. In this work, the hot-emboss process is performed with different forming conditions; forming temperature, load, press hold time, to get the proper condition for linear pattern fabrication on plated-type polymers (PC). Replicated pattern depth increases in proportion to the forming temperature, load and time. Reduction of the workpiece thickness increases according to press hold time. In process of time, reduction ratio of workpiece thickness decreases because of surface area increment of the workpiece and pressure decline on it.

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