References
- Z. D. Popovic, R. A. Sprague, G. A. N. Connell, 1988, Technique for monolithic fabrication of microlens array, Appl. Opt., Vol. 27, pp. 1281-1284 https://doi.org/10.1364/AO.27.001281
- D. Daly, R. F. Stevens, M. C. Hutley, N. Davies, 1990, The manufacture of microlenses by melting photoresist, Meas. Sci. Technol., Vol. 1, pp. 759- 766 https://doi.org/10.1088/0957-0233/1/8/016
- P. Ruther, B. Gerlach, J. Gottert, M. Ilie, J. Mohr, A. Muller, C. Opmann, 1997, Fabrication and characterization of microlenses realized by a modified LIGA process, Pure Appl. Opt., Vol. 6, pp. 643-653 https://doi.org/10.1088/0963-9659/6/6/006
- L. W. Pan, X. Shen, L. Lin, 2004, Microplastic lens array fabricated by a hot intrusion process, J. Microelectromech. Syst., Vol. 13, pp. 1063-1071 https://doi.org/10.1109/JMEMS.2004.838363
- U. Kohler, A. E. Guber, W. Bier, M. Heckele, 1996, Fabrication of microlenses by plasmaless isotropic etching combined with plastic moulding, Sensor Actuact. A, Vol. 53, pp. 361-363 https://doi.org/10.1016/0924-4247(96)01164-8
- D. L. MacFarlane, V. Narayan, J. A. Tatum, W. R. Cox, T. Chen, D. J. Hayes, Microjet fabrication of microlens arrays, IEEE Photonic Tech. Lett., Vol. 6, pp. 1112-1114 https://doi.org/10.1109/68.324684
- S. K. Lee, K. C. Lee, S. S. Lee, 2002, A simple method for microlens fabrication by the modified LIGA process, J. Micromech. Microeng., Vol. 12, pp. 334-340 https://doi.org/10.1088/0960-1317/12/3/321
- D. S. Kim, S. S. Yang, S. K. Lee, T. H. Kwon, S. S. Lee, 2003, Physical modeling and analysis of microlens formation fabricated by a modified LIGA process, J. Micromech. Microeng., Vol. 13, pp. 523-531 https://doi.org/10.1088/0960-1317/13/5/302
- H. S. Lee, S. K. Lee, T. H. Kwon, S. S. Lee, 2002, Birefringence distribution in V-grooved optical parts by hot embossing process, Proc. IEEELEOS Optical MEMS 2002, Lugano, Switzerland, pp. 135-136
- B. K. Lee, D. S. Kim, T. H. Kwon, 2004, Replication of microlens arrays by injection molding, Microsyst., Technol., Vol. 10, pp. 531-535 https://doi.org/10.1007/s00542-004-0387-2
- E. Hecht, 2002, Optics, Addison-Wesley, New York
Cited by
- A Study on Maskless Fabrication of Micro Les Array using UV Laser Local Thermal-Expansion Technology vol.29, pp.1-3, 2009, https://doi.org/10.1515/POLYENG.2009.29.1-3.155